Total properties:
47
|
|
Patent #:
|
|
Issue Dt:
|
08/26/1997
|
Application #:
|
08491154
|
Filing Dt:
|
06/16/1995
|
Title:
|
METHOD OF REMOVING SPUTTER DEPOSITION FROM COMPONENTS OF VACUUM DEPOSITION EQUIPMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
07/29/1997
|
Application #:
|
08511975
|
Filing Dt:
|
08/07/1995
|
Title:
|
APPARATUS AND METHOD FOR THE IMMERSION CLEANING AND TRANSPORT OF SEMICONDUCTOR COMPONENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/08/1998
|
Application #:
|
08723861
|
Filing Dt:
|
09/30/1996
|
Title:
|
APPARATUS FOR OBTAINING, STORING AND TRANSPORTING LIQUID SAMPLES AND METHODS FOR MAKING AND USING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
12/21/1999
|
Application #:
|
08890116
|
Filing Dt:
|
07/09/1997
|
Title:
|
CARBON DIOXIDE CLEANING PROCESS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/21/1999
|
Application #:
|
08992204
|
Filing Dt:
|
12/17/1997
|
Title:
|
METHOD AND APPARATUS FOR STORING AND SHIPPING HAZARDOUS MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/1999
|
Application #:
|
09052871
|
Filing Dt:
|
03/31/1998
|
Title:
|
APPARATUS FOR OBTAINING, STORING AND TRANSPORTING LIQUID SAMPLES AND METHODS FOR MAKING AND USING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
03/11/2003
|
Application #:
|
09504299
|
Filing Dt:
|
02/15/2000
|
Title:
|
VOLUME EFFICIENT CLEANING SYSTEMS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/15/2001
|
Application #:
|
09642051
|
Filing Dt:
|
08/16/2000
|
Title:
|
Container for transporting refurbished semiconductor processing equipment
|
|
|
Patent #:
|
|
Issue Dt:
|
11/18/2003
|
Application #:
|
09879412
|
Filing Dt:
|
06/11/2001
|
Title:
|
STEAM CLEANING SYSTEM AND METHOD FOR SEMICONDUCTOR PROCESS EQUIPMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2004
|
Application #:
|
09927263
|
Filing Dt:
|
08/10/2001
|
Publication #:
|
|
Pub Dt:
|
03/11/2004
| | | | |
Title:
|
METHOD FOR CLEANING SEMICONDUCTOR FABRICATION EQUIPMENT PARTS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/19/2003
|
Application #:
|
09945259
|
Filing Dt:
|
08/31/2001
|
Publication #:
|
|
Pub Dt:
|
06/06/2002
| | | | |
Title:
|
CLEANING OF SEMICONDUCTOR PROCESS EQUIPMENT CHAMBER PARTS USING ORGANIC SOLVENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/2003
|
Application #:
|
10010470
|
Filing Dt:
|
11/08/2001
|
Title:
|
PROCESS FOR CLEANING COMPONENTS USING CLEANING MEDIA
|
|
|
Patent #:
|
|
Issue Dt:
|
10/28/2003
|
Application #:
|
10288404
|
Filing Dt:
|
11/04/2002
|
Title:
|
VOLUME EFFICIENT CLEANING METHODS AND SYSTEMS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/07/2005
|
Application #:
|
10304535
|
Filing Dt:
|
11/25/2002
|
Publication #:
|
|
Pub Dt:
|
05/27/2004
| | | | |
Title:
|
METHOD OF CLEANING A COATED PROCESS CHAMBER COMPONENT
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/2005
|
Application #:
|
10622393
|
Filing Dt:
|
07/18/2003
|
Title:
|
SYSTEM FOR REMOVING CONTAMINANTS FROM SEMICONDUCTOR PROCESS EQUIPMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
05/16/2006
|
Application #:
|
10627185
|
Filing Dt:
|
07/24/2003
|
Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
Title:
|
CLEANING PROCESS AND APPARATUS FOR SILICATE MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/2006
|
Application #:
|
10627416
|
Filing Dt:
|
07/24/2003
|
Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
Title:
|
ULTRASONIC ASSISTED ETCH USING CORROSIVE LIQUIDS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/29/2006
|
Application #:
|
10643409
|
Filing Dt:
|
08/19/2003
|
Publication #:
|
|
Pub Dt:
|
02/24/2005
| | | | |
Title:
|
METHOD FOR REMOVING A COMPOSITE COATING CONTAINING TANTALUM DEPOSITION AND ARC SPRAYED ALUMINUM FROM CERAMIC SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
08/30/2005
|
Application #:
|
10664351
|
Filing Dt:
|
09/16/2003
|
Title:
|
STEAM CLEANING SYSTEM AND METHOD FOR SEMICONDUCTOR PROCESS EQUIPMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
07/13/2010
|
Application #:
|
10696394
|
Filing Dt:
|
10/28/2003
|
Title:
|
CLEANING PROCESSES FOR SILICON CARBIDE MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/07/2005
|
Application #:
|
10742604
|
Filing Dt:
|
12/19/2003
|
Publication #:
|
|
Pub Dt:
|
08/26/2004
| | | | |
Title:
|
CLEANING CHAMBER SURFACES TO RECOVER METAL-CONTAINING COMPOUNDS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/17/2009
|
Application #:
|
10863151
|
Filing Dt:
|
06/07/2004
|
Publication #:
|
|
Pub Dt:
|
12/08/2005
| | | | |
Title:
|
TEXTURED CHAMBER SURFACE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/21/2011
|
Application #:
|
10870716
|
Filing Dt:
|
06/17/2004
|
Title:
|
ELECTROCHEMICAL REMOVAL OF TANTALUM-CONTAINING MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/11/2007
|
Application #:
|
11054794
|
Filing Dt:
|
02/09/2005
|
Publication #:
|
|
Pub Dt:
|
10/06/2005
| | | | |
Title:
|
METHODS FOR REMOVING SILICON AND SILICON-NITRIDE CONTAMINATION LAYERS FROM DEPOSITION TUBES
|
|
|
Patent #:
|
|
Issue Dt:
|
07/11/2006
|
Application #:
|
11055180
|
Filing Dt:
|
02/09/2005
|
Publication #:
|
|
Pub Dt:
|
10/06/2005
| | | | |
Title:
|
APPARATUS FOR APPLYING DISPARATE ETCHING SOLUTIONS TO INTERIOR AND EXTERIOR SURFACES
|
|
|
Patent #:
|
|
Issue Dt:
|
11/18/2008
|
Application #:
|
11061013
|
Filing Dt:
|
02/17/2005
|
Publication #:
|
|
Pub Dt:
|
08/04/2005
| | | | |
Title:
|
CLEANING PROCESS AND APPARATUS FOR SILICATE MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/12/2008
|
Application #:
|
11128684
|
Filing Dt:
|
05/12/2005
|
Title:
|
CLEANING BENCH FOR REMOVING CONTAMINANTS FROM SEMICONDUCTOR PROCESS EQUIPMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
09/19/2006
|
Application #:
|
11144551
|
Filing Dt:
|
06/02/2005
|
Title:
|
STEAM CLEANING SYSTEM AND METHOD FOR SEMICONDUCTOR PROCESS EQUIPMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
06/30/2009
|
Application #:
|
11192600
|
Filing Dt:
|
07/29/2005
|
Publication #:
|
|
Pub Dt:
|
02/01/2007
| | | | |
Title:
|
METHOD AND APPARATUS FOR THE APPLICATION OF TWIN WIRE ARC SPRAY COATINGS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11272844
|
Filing Dt:
|
11/14/2005
|
Publication #:
|
|
Pub Dt:
|
05/17/2007
| | | | |
Title:
|
Apparatus and methods for slurry cleaning of etch chambers
|
|
|
Patent #:
|
|
Issue Dt:
|
12/01/2009
|
Application #:
|
11360238
|
Filing Dt:
|
02/22/2006
|
Title:
|
METHOD FOR REMOVING ALUMINUM FLUORIDE CONTAMINATION FROM ALUMINUM-CONTAINING SURFACES OF SEMICONDUCTOR PROCESS EQUIPMENT
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11400125
|
Filing Dt:
|
04/07/2006
|
Publication #:
|
|
Pub Dt:
|
08/17/2006
| | | | |
Title:
|
System and method for cleaning semiconductor fabrication equipment parts
|
|
|
Patent #:
|
|
Issue Dt:
|
05/27/2008
|
Application #:
|
11477191
|
Filing Dt:
|
06/27/2006
|
Publication #:
|
|
Pub Dt:
|
11/02/2006
| | | | |
Title:
|
ULTRASONIC ASSISTED ETCH USING CORROSIVE LIQUIDS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/11/2008
|
Application #:
|
11479883
|
Filing Dt:
|
06/30/2006
|
Title:
|
APPARATUS FOR APPLYING DISPARATE ETCHING SOLUTIONS TO INTERIOR AND EXTERIOR SURFACES
|
|
|
Patent #:
|
|
Issue Dt:
|
06/02/2009
|
Application #:
|
11712802
|
Filing Dt:
|
02/28/2007
|
Title:
|
FIREPOLISHED QUARTZ PARTS FOR USE IN SEMICONDUCTOR PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
09/07/2010
|
Application #:
|
11931272
|
Filing Dt:
|
10/31/2007
|
Publication #:
|
|
Pub Dt:
|
05/01/2008
| | | | |
Title:
|
METHODS AND APPARATUS FOR CLEANING CHAMBER COMPONENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/21/2012
|
Application #:
|
11948766
|
Filing Dt:
|
11/30/2007
|
Publication #:
|
|
Pub Dt:
|
06/04/2009
| | | | |
Title:
|
CLEANING PROCESS RESIDUES FROM SUBSTRATE PROCESSING CHAMBER COMPONENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/21/2012
|
Application #:
|
11948766
|
Filing Dt:
|
11/30/2007
|
Publication #:
|
|
Pub Dt:
|
06/04/2009
| | | | |
Title:
|
CLEANING PROCESS RESIDUES FROM SUBSTRATE PROCESSING CHAMBER COMPONENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/23/2008
|
Application #:
|
12069836
|
Filing Dt:
|
02/12/2008
|
Title:
|
CLEANING BENCH FOR REMOVING CONTAMINANTS FROM SEMICONDUCTOR PROCESS EQUIPMENT
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12146676
|
Filing Dt:
|
06/26/2008
|
Publication #:
|
|
Pub Dt:
|
01/01/2009
| | | | |
Title:
|
METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBER PARTS USING SELECTIVE SPRAY ETCH
|
|
|
Patent #:
|
|
Issue Dt:
|
07/23/2013
|
Application #:
|
12189141
|
Filing Dt:
|
08/09/2008
|
Publication #:
|
|
Pub Dt:
|
02/12/2009
| | | | |
Title:
|
METHODS AND APPARATUS FOR EX SITU SEASONING OF ELECTRONIC DEVICE MANUFACTURING PROCESS COMPONENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/23/2013
|
Application #:
|
12189141
|
Filing Dt:
|
08/09/2008
|
Publication #:
|
|
Pub Dt:
|
02/12/2009
| | | | |
Title:
|
METHODS AND APPARATUS FOR EX SITU SEASONING OF ELECTRONIC DEVICE MANUFACTURING PROCESS COMPONENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/17/2012
|
Application #:
|
12339037
|
Filing Dt:
|
12/18/2008
|
Publication #:
|
|
Pub Dt:
|
08/06/2009
| | | | |
Title:
|
METHODS FOR CLEANING PROCESS KITS AND CHAMBERS, AND FOR RUTHENIUM RECOVERY
|
|
|
Patent #:
|
|
Issue Dt:
|
01/17/2012
|
Application #:
|
12339037
|
Filing Dt:
|
12/18/2008
|
Publication #:
|
|
Pub Dt:
|
08/06/2009
| | | | |
Title:
|
METHODS FOR CLEANING PROCESS KITS AND CHAMBERS, AND FOR RUTHENIUM RECOVERY
|
|
|
Patent #:
|
|
Issue Dt:
|
03/27/2012
|
Application #:
|
12618693
|
Filing Dt:
|
11/13/2009
|
Publication #:
|
|
Pub Dt:
|
03/11/2010
| | | | |
Title:
|
TEXTURED CHAMBER SURFACE
|
|
|
Patent #:
|
|
Issue Dt:
|
02/12/2013
|
Application #:
|
12881503
|
Filing Dt:
|
09/14/2010
|
Publication #:
|
|
Pub Dt:
|
03/17/2011
| | | | |
Title:
|
METHOD AND APPARATUS FOR SHOWERHEAD CLEANING
|
|
|
Patent #:
|
|
Issue Dt:
|
04/08/2014
|
Application #:
|
13585294
|
Filing Dt:
|
08/14/2012
|
Publication #:
|
|
Pub Dt:
|
02/14/2013
| | | | |
Title:
|
METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBER PARTS USING SELECTIVE SPRAY ETCH
|
|