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Total properties:
16
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Patent #:
|
|
Issue Dt:
|
05/04/1993
|
Application #:
|
07784291
|
Filing Dt:
|
10/29/1991
|
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Title:
|
CERAMIC ELECTROSTATIC WAFER CHUCK
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/14/1995
|
Application #:
|
08169903
|
Filing Dt:
|
12/20/1993
|
|
Title:
|
ELECTROSTATIC CHUCK WITH REFERENCE ELECTRODE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
09/26/1995
|
Application #:
|
08169910
|
Filing Dt:
|
12/20/1993
|
|
Title:
|
METHOD OF MAKING AN ELECTROSTATIC CHUCK WITH OXIDE INSULATOR
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|
|
|
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Patent #:
|
|
Issue Dt:
|
07/16/1996
|
Application #:
|
08169911
|
Filing Dt:
|
12/20/1993
|
|
Title:
|
METHOD OF MAKING ELECTROSTATIC CHUCK WITH OXIDE INSULATOR
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/31/1995
|
Application #:
|
08169932
|
Filing Dt:
|
12/20/1993
|
|
Title:
|
GUARD RING ELECTROSTATIC CHUCK
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|
|
|
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Patent #:
|
|
Issue Dt:
|
05/28/1996
|
Application #:
|
08241527
|
Filing Dt:
|
05/12/1994
|
|
Title:
|
ELECTROSTATIC CHUCK HAVING RELATIVELY THICK AND THIN AREAS AND MEANS FOR UNIFORMLY COOLING SAID THICK AND THIN AREAS DURING CHUCK ANODIZATION
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/05/1996
|
Application #:
|
08338306
|
Filing Dt:
|
11/14/1994
|
|
Title:
|
TRI-POLAR ELECTROSTATIC CHUCK
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/02/1996
|
Application #:
|
08434092
|
Filing Dt:
|
05/03/1995
|
|
Title:
|
MEMBRANE ELECTROSTATIC CHUCK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/04/1999
|
Application #:
|
08982914
|
Filing Dt:
|
12/02/1997
|
|
Title:
|
ELECTROSTATIC CHUCK EMPLOYING THERMOELECTRIC COOLING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/18/1999
|
Application #:
|
09058734
|
Filing Dt:
|
04/12/1998
|
|
Title:
|
ELECTROSTATIC CHUCK WITH CERAMIC POLE PRETECTION
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/05/2002
|
Application #:
|
09165285
|
Filing Dt:
|
10/01/1998
|
|
Title:
|
ELECTROSTATIC CHUCK WITH REFERENCE ELECTRODE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/12/2002
|
Application #:
|
09272408
|
Filing Dt:
|
03/18/1999
|
|
Title:
|
GUARD RING ELECTROSTATIC CHUCK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/31/2001
|
Application #:
|
09350726
|
Filing Dt:
|
07/09/1999
|
|
Title:
|
ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/22/2004
|
Application #:
|
10085571
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Filing Dt:
|
02/27/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/04/2003
| | | | |
|
Title:
|
HYBRID CERAMIC ELECTROSTATIC CLAMP
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/23/2010
|
Application #:
|
11823978
|
Filing Dt:
|
06/29/2007
|
|
Publication #:
|
|
Pub Dt:
|
01/01/2009
| | | | |
|
Title:
|
POLYCERAMIC E-CHUCK
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/31/2013
|
Application #:
|
13117262
|
Filing Dt:
|
05/27/2011
|
|
Publication #:
|
|
Pub Dt:
|
06/07/2012
| | | | |
|
Title:
|
SUBSTRATE SUPPORTS FOR SEMICONDUCTOR APPLICATIONS
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|
