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Total properties:
50
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Patent #:
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Issue Dt:
|
07/02/2002
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Application #:
|
09693490
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Filing Dt:
|
10/20/2000
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Title:
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METHOD OF PRODUCING SHORT-WAVE RADIATION FROM A GAS-DISCHARGE PLASMA AND DEVICE FOR IMPLEMENTING IT
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|
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Patent #:
|
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Issue Dt:
|
10/12/2004
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Application #:
|
10109581
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Filing Dt:
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03/27/2002
|
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Publication #:
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Pub Dt:
|
11/14/2002
| | | | |
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Title:
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METHOD AND APPARATUS FOR GENERATING HIGH OUTPUT POWER GAS DISCHARGE BASED SOURCE OF EXTREME ULTRAVIOLET RADIATION AND/OR SOFT X-RAYS
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|
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Patent #:
|
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Issue Dt:
|
02/14/2006
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Application #:
|
10218690
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Filing Dt:
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08/12/2002
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Publication #:
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Pub Dt:
|
03/27/2003
| | | | |
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Title:
|
STABLE ENERGY DETECTOR FOR EXTREME ULTRAVIOLET RADIATION DETECTION
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Patent #:
|
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Issue Dt:
|
05/17/2005
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Application #:
|
10267373
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Filing Dt:
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10/09/2002
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Publication #:
|
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Pub Dt:
|
04/10/2003
| | | | |
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Title:
|
ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET (EUV) RADIATION BASED ON A GAS DISCHARGE
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|
|
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Patent #:
|
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Issue Dt:
|
08/03/2004
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Application #:
|
10357173
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Filing Dt:
|
02/03/2003
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Publication #:
|
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Pub Dt:
|
08/07/2003
| | | | |
|
Title:
|
METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION BASED ON A RADIATION-EMITTING PLASMA
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|
|
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Patent #:
|
|
Issue Dt:
|
05/17/2005
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Application #:
|
10357899
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Filing Dt:
|
02/04/2003
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Publication #:
|
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Pub Dt:
|
08/07/2003
| | | | |
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Title:
|
ARRANGEMENT FOR MONITORING THE ENERGY RADIATED BY AN EUV RADIATION SOURCE
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|
|
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Patent #:
|
|
Issue Dt:
|
03/08/2005
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Application #:
|
10360067
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Filing Dt:
|
02/07/2003
|
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Publication #:
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Pub Dt:
|
10/23/2003
| | | | |
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Title:
|
METHOD FOR ENERGY CONTROL OF PULSED DRIVEN, GAS DISCHARGED-COUPLED BEAM SOURCES
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Patent #:
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|
Issue Dt:
|
07/05/2005
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Application #:
|
10360372
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Filing Dt:
|
02/07/2003
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Publication #:
|
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Pub Dt:
|
08/28/2003
| | | | |
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Title:
|
METHOD FOR ENERGY STABILIZATION OF GAS DISCHARGED PUMPED IN SELECTED IMPULSE FOLLOWING DRIVEN BEAM SOURCES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/15/2005
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Application #:
|
10393930
|
Filing Dt:
|
03/20/2003
|
|
Publication #:
|
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Pub Dt:
|
09/25/2003
| | | | |
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Title:
|
DETECTOR ARRANGEMENT FOR ENERGY MEASUREMENT OF PULSED X-RAY RADIATION
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/19/2005
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Application #:
|
10407394
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Filing Dt:
|
04/04/2003
|
|
Publication #:
|
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Pub Dt:
|
10/09/2003
| | | | |
|
Title:
|
ARRANGEMENT FOR THE SUPPRESSION OF PARTICLE EMISSION IN THE GENERATION OF RADIATION BASED ON HOT PLASMA
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|
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|
Patent #:
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|
Issue Dt:
|
12/07/2004
|
Application #:
|
10425301
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Filing Dt:
|
04/29/2003
|
|
Publication #:
|
|
Pub Dt:
|
10/30/2003
| | | | |
|
Title:
|
METHOD FOR THE STABILIZATION OF THE RADIATION OUTPUT OF A GAS DISCHARGE-COUPLED RADIATION SOURCE IN PULSED OPERATION
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|
|
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Patent #:
|
|
Issue Dt:
|
11/17/2009
|
Application #:
|
10562496
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Filing Dt:
|
12/27/2005
|
|
Publication #:
|
|
Pub Dt:
|
05/22/2008
| | | | |
|
Title:
|
METHOD AND DEVICE FOR PRODUCING EXTREME ULTRAVIOLET RADIATION OR SOFT X-RAY RADIATION
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/12/2008
|
Application #:
|
10567942
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Filing Dt:
|
02/23/2006
|
|
Publication #:
|
|
Pub Dt:
|
07/20/2006
| | | | |
|
Title:
|
PLASMA RADIATION SOURCE AND DEVICE FOR CREATING A GAS CURTAIN FOR PLASMA RADIATION SOURCES
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|
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Patent #:
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Issue Dt:
|
06/27/2006
|
Application #:
|
10682000
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Filing Dt:
|
10/08/2003
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|
Publication #:
|
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Pub Dt:
|
06/03/2004
| | | | |
|
Title:
|
ARRANGEMENT FOR THE OPTICAL DETECTION OF A MOVING TARGET FLOW FOR A PULSED ENERGY BEAM PUMPED RADIATION
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Patent #:
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Issue Dt:
|
04/19/2005
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Application #:
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10697579
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Filing Dt:
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10/30/2003
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Publication #:
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Pub Dt:
|
07/15/2004
| | | | |
|
Title:
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RADIATION SOURCE FOR GENERATING EXTREME ULTRAVIOLET RADIATION
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Patent #:
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|
Issue Dt:
|
11/09/2004
|
Application #:
|
10741882
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Filing Dt:
|
12/19/2003
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|
Publication #:
|
|
Pub Dt:
|
07/29/2004
| | | | |
|
Title:
|
RADIATION SOURCE WITH HIGH AVERAGE EUV RADIATION OUTPUT
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Patent #:
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|
Issue Dt:
|
09/20/2005
|
Application #:
|
10772910
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Filing Dt:
|
02/05/2004
|
|
Publication #:
|
|
Pub Dt:
|
08/12/2004
| | | | |
|
Title:
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ARRANGEMENT FOR THE GENERATION OF EUV RADIATION WITH HIGH REPETITION RATES
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Patent #:
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Issue Dt:
|
07/18/2006
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Application #:
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10784438
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Filing Dt:
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02/23/2004
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|
Publication #:
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Pub Dt:
|
08/26/2004
| | | | |
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Title:
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ARRANGEMENT FOR DEBRIS REDUCTION IN A RADIATION SOURCE BASED ON A PLASMA
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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11020749
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Filing Dt:
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12/22/2004
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|
Publication #:
|
|
Pub Dt:
|
09/15/2005
| | | | |
|
Title:
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ARRANGEMENT FOR GENERATING PULSED CURRENTS WITH A HIGH REPETITION RATE AND HIGH CURRENT STRENGTH FOR GAS DISCHARGE PUMPED RADIATION SOURCES
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Patent #:
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Issue Dt:
|
09/25/2007
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Application #:
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11149916
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Filing Dt:
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06/10/2005
|
|
Publication #:
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Pub Dt:
|
12/15/2005
| | | | |
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Title:
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APPARATUS FOR THE TEMPORALLY STABLE GENERATION OF EUV RADIATION BY MEANS OF A LASER-INDUCED PLASMA
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Patent #:
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Issue Dt:
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07/29/2008
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Application #:
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11182363
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Filing Dt:
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07/15/2005
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Publication #:
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Pub Dt:
|
02/02/2006
| | | | |
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Title:
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ARRANGEMENT FOR PROVIDING TARGET MATERIAL FOR THE GENERATION OF SHORT-WAVELENGTH ELECTROMAGNETIC RADIATION
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Patent #:
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Issue Dt:
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05/13/2008
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Application #:
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11213007
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Filing Dt:
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08/26/2005
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Publication #:
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Pub Dt:
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03/02/2006
| | | | |
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Title:
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ARRANGEMENT FOR PROVIDING A REPRODUCIBLE TARGET FLOW FOR THE ENERGY BEAM-INDUCED GENERATION OF SHORT-WAVELENGTH ELECTROMAGNETIC RADIATION
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Patent #:
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Issue Dt:
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01/13/2009
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Application #:
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11354324
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Filing Dt:
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02/14/2006
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Publication #:
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Pub Dt:
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08/31/2006
| | | | |
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Title:
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DEVICE AND METHOD FOR GENERATING EXTREME ULTRAVIOLET (EUV) RADIATION
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Patent #:
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Issue Dt:
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04/29/2008
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Application #:
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11380487
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Filing Dt:
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04/27/2006
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Publication #:
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Pub Dt:
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11/02/2006
| | | | |
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Title:
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METHOD AND ARRANGEMENT FOR THE SUPPRESSION OF DEBRIS IN THE GENERATION OF SHORT-WAVELENGTH RADIATION BASED ON A PLASMA
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Patent #:
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Issue Dt:
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06/19/2007
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Application #:
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11393325
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Filing Dt:
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03/30/2006
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Publication #:
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Pub Dt:
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10/05/2006
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Title:
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RADIATION SOURCE FOR THE GENERATION OF SHORT-WAVELENGTH RADIATION
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Patent #:
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Issue Dt:
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02/12/2008
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Application #:
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11402391
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Filing Dt:
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04/11/2006
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Publication #:
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Pub Dt:
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10/12/2006
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Title:
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COLLECTOR MIRROR FOR PLASMA-BASED, SHORT-WAVELENGTH RADIATION SOURCES
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Patent #:
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Issue Dt:
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02/10/2009
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Application #:
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11421144
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Filing Dt:
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05/31/2006
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Publication #:
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Pub Dt:
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12/07/2006
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Title:
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ARRANGEMENT FOR THE GENERATION OF INTENSIVE SHORT-WAVELENGTH RADIATION BASED ON A GAS DISCHARGE PLASMA
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Patent #:
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Issue Dt:
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05/12/2009
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Application #:
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11426086
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Filing Dt:
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06/23/2006
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Publication #:
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Pub Dt:
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04/19/2007
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Title:
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ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RADIATION
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Patent #:
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Issue Dt:
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09/21/2010
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11464887
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08/16/2006
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Publication #:
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Pub Dt:
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02/22/2007
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Title:
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ARRANGEMENT FOR RADIATION GENERATION BY MEANS OF A GAS DISCHARGE
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Patent #:
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Issue Dt:
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08/19/2008
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11504957
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Filing Dt:
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08/16/2006
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Publication #:
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Pub Dt:
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03/01/2007
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Title:
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EUV RADIATION SOURCE WITH HIGH RADIATION OUTPUT BASED ON A GAS DISCHARGE
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Patent #:
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Issue Dt:
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07/13/2010
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11539342
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Filing Dt:
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10/06/2006
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Publication #:
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Pub Dt:
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04/12/2007
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Title:
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ARRANGEMENT FOR THE SUPPRESSION OF UNWANTED SPECTRAL COMPONENTS IN A PLASMA-BASED EUV RADIATION SOURCE
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Patent #:
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Issue Dt:
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06/02/2009
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11560118
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Filing Dt:
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11/15/2006
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Pub Dt:
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05/24/2007
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Title:
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ARRANGEMENT FOR THE GENERATION OF SHORT-WAVELENGTH RADIATION BASED ON A GAS DISCHARGE PLASMA AND METHOD FOR THE PRODUCTION OF COOLANT-CARRYING ELECTRODE HOUSING
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Patent #:
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Issue Dt:
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02/12/2008
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11623628
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01/16/2007
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Publication #:
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Pub Dt:
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07/26/2007
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Title:
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NARROW-BAND TRANSMISSION FILTER FOR EUV RADIATION
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Patent #:
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Issue Dt:
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01/13/2009
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11693169
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Filing Dt:
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03/29/2007
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Publication #:
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Pub Dt:
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10/04/2007
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Title:
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ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION BASED ON AN ELECTRICALLY OPERATED GAS DISCHARGE
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Patent #:
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Issue Dt:
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08/30/2011
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11693207
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Filing Dt:
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03/29/2007
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Publication #:
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Pub Dt:
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10/04/2007
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Title:
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ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION BY MEANS OF AN ELECTRICALLY OPERATED GAS DISCHARGE
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Patent #:
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Issue Dt:
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10/06/2009
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11733845
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04/11/2007
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Pub Dt:
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03/20/2008
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Title:
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ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION FROM A PLASMA GENERATED BY AN ENERGY BEAM WITH HIGH CONVERSION EFFICIENCY AND MINIMUM CONTAMINATION
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Patent #:
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Issue Dt:
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01/19/2010
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11756026
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05/31/2007
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Publication #:
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Pub Dt:
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01/10/2008
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Title:
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ARRANGEMENT FOR THE GENERATION OF EXTREME ULTRAVIOLET RADIATION BY MEANS OF ELECTRIC DISCHARGE AT ELECTRODES WHICH CAN BE REGENERATED
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Issue Dt:
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07/05/2011
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11949924
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Filing Dt:
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12/04/2007
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Pub Dt:
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06/19/2008
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Title:
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METHOD AND ARRANGEMENT FOR STABILIZING THE AVERAGE EMITTED RADIATION OUTPUT OF A PULSED RADIATION SOURCE
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Issue Dt:
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10/12/2010
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12018353
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Filing Dt:
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01/23/2008
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Publication #:
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Pub Dt:
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07/31/2008
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Title:
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ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RADIATION BY MEANS OF AN ELECTRICALLY OPERATED GAS DISCHARGE
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Patent #:
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Issue Dt:
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09/29/2009
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12041121
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03/03/2008
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Pub Dt:
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10/30/2008
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Title:
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ARRANGEMENT FOR SWITCHING HIGH ELECTRIC CURRENTS BY A GAS DISCHARGE
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07/06/2010
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12120536
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05/14/2008
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Pub Dt:
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11/20/2008
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Title:
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DEVICE FOR THE GENERATION OF A GAS CURTAIN FOR PLASMA-BASED EUV RADIATION SOURCES
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04/03/2012
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12128784
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05/29/2008
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01/15/2009
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Title:
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METHOD AND ARRANGEMENT FOR CLEANING OPTICAL SURFACES IN PLASMA-BASED RADIATION SOURCES
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10/27/2015
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12254272
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10/20/2008
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04/23/2009
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Title:
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ARRANGEMENT FOR GENERATING EUV RADIATION
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04/10/2012
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12773148
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05/04/2010
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Pub Dt:
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11/11/2010
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Title:
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ARRANGEMENT FOR THE CONTINUOUS GENERATION OF LIQUID TIN AS EMITTER MATERIAL IN EUV RADIATION SOURCES
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04/23/2013
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13239564
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09/22/2011
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04/05/2012
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Title:
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METHOD AND APPARATUS FOR THE GENERATION OF EUV RADIATION FROM A GAS DISCHARGE PLASMA
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10/01/2013
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13291171
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11/08/2011
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Pub Dt:
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05/10/2012
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Title:
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METHOD AND ARRANGEMENT FOR THE STABILIZATION OF THE SOURCE LOCATION OF THE GENERATION OF EXTREME ULTRAVIOLET (EUV) RADIATION BASED ON A DISCHARGE PLASMA
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Patent #:
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04/01/2014
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13307244
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11/30/2011
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Pub Dt:
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06/07/2012
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Title:
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METHOD FOR THE SPATIALLY RESOLVED MEASUREMENT OF PARAMETERS IN A CROSS SECTION OF A BEAM BUNDLE OF HIGH-ENERGY RADIATION OF HIGH INTENSITY
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12/17/2013
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13311023
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12/05/2011
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Pub Dt:
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06/21/2012
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Title:
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METHOD AND APPARATUS FOR THE GENERATION OF SHORT-WAVELENGTH RADIATION BY MEANS OF A GAS DISCHARGE-BASED HIGH-FREQUENCY, HIGH-CURRENT DISCHARGE
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04/02/2013
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13436923
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03/31/2012
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Pub Dt:
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10/04/2012
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Title:
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METHOD AND ARRANGEMENT FOR THE ADJUSTMENT OF CHARACTERISTICS OF A BEAM BUNDLE OF HIGH-ENERGY RADIATION EMITTED FROM A PLASMA
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Patent #:
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Issue Dt:
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05/05/2015
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14053822
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10/15/2013
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Pub Dt:
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04/17/2014
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Title:
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DEVICE FOR GENERATING SHORT-WAVELENGTH ELECTROMAGNETIC RADIATION BASED ON A GAS DISCHARGE PLASMA
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