Patent Assignment Details
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| Reel/Frame: | 024824/0619 | |
| Pages: | 4 |
| | Recorded: | 08/11/2010 | | |
| Attorney Dkt #: | 2055-29 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/19/2013
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Application #:
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12854545
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Filing Dt:
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08/11/2010
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Publication #:
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Pub Dt:
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03/10/2011
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Title:
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WORKPIECE DE-CHUCKING DEVICE OF PLASMA REACTOR FOR DRY-CLEANING INSIDE OF REACTION CHAMBER AND ELECTROSTATIC CHUCK DURING WORKPIECE DE-CHUCKING, AND WORKPIECE DE-CHUCKING METHOD USING THE SAME
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Assignee
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| 4TH FL., 958-1, YOUNGTONG-DONG, YOUNGTONG-KU, |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF 443-810 |
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Correspondence name and address
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IPLA P.A.
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3550 WILSHIRE BLVD.
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17TH FLOOR
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LOS ANGELES, CA 90010
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