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Reel/Frame:	027064/0622			Pages:	5
		Recorded:	10/14/2011
Attorney Dkt #:	411Z-2011-004
Conveyance:	CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).

Total properties: 50

Patent #:	5320983	Issue Dt:	06/14/1994	Application #:	07930615	Filing Dt:	09/30/1992
Title:	SPIN-ON GLASS PROCESSING TECHNIQUE FOR THE FABRICATION OF SEMICONDUCTOR DEVICES

Patent #:	5364818	Issue Dt:	11/15/1994	Application #:	07962214	Filing Dt:	01/26/1993
Title:	SOG WITH MOISTURE RESISTANT PROTECTIVE CAPPING LAYER

Patent #:	5470798	Issue Dt:	11/28/1995	Application #:	07965264	Filing Dt:	01/26/1993
Title:	MOISTURE-FREE SOG PROCESS

Patent #:	5457073	Issue Dt:	10/10/1995	Application #:	08039485	Filing Dt:	04/30/1993
Title:	MULTI-LEVEL INTERCONNECTION CMOS DEVICES WITH SOG

Patent #:	5447613	Issue Dt:	09/05/1995	Application #:	08078166	Filing Dt:	06/21/1993
Title:	PREVENTING OF VIA POISONING BY GLOW DISCHARGE INDUCED DESORPTION

Patent #:	5541445	Issue Dt:	07/30/1996	Application #:	08196078	Filing Dt:	02/25/1994
Title:	HIGH PERFORMANCE PASSIVATION FOR SEMICONDUCTOR DEVICES

Patent #:	5587325	Issue Dt:	12/24/1996	Application #:	08313091	Filing Dt:	09/30/1994
Title:	METHOD OF PREPARING ANTIMONY DOPED SEMICONDUCTOR WITH INTRINSIC GETTERING

Patent #:	5747361	Issue Dt:	05/05/1998	Application #:	08543497	Filing Dt:	10/16/1995
Title:	STABILIZATION OF THE INTERFACE BETWEEN ALUMINUM AND TITANIUM NITRIDE

Patent #:	5935395	Issue Dt:	08/10/1999	Application #:	08666256	Filing Dt:	06/20/1996
Title:	SUBSTRTAE PROCESSING APPARATUS WITH NON-EVAPORABLE GETTER PUMP

Patent #:	6074946	Issue Dt:	06/13/2000	Application #:	08794441	Filing Dt:	02/04/1997
Title:	INTEGRATED PROCESSING FOR AN ETCH MODULE USING A HARD MASK TECHNIQUE

Patent #:	6127266	Issue Dt:	10/03/2000	Application #:	08979956	Filing Dt:	11/26/1997
Title:	STABILIZATION OF THE INTERFACE BETWEEN TIN AND A1 ALLOYS

Patent #:	6133060	Issue Dt:	10/17/2000	Application #:	09010191	Filing Dt:	01/21/1998
Title:	METHOD OF PROTECTING LIGHT SENSITIVE REGIONS OF INTEGRATED CIRCUITS

Patent #:	6268620	Issue Dt:	07/31/2001	Application #:	09236101	Filing Dt:	01/25/1999
Title:	METHOD OF FORMING CAPACITORS ON INTEGRATED CIRCUIT

Patent #:	6083805	Issue Dt:	07/04/2000	Application #:	09314105	Filing Dt:	05/19/1999
Title:	METHOD OF FORMING CAPACITORS IN A SEMICONDUCTOR DEVICE

Patent #:	6372671	Issue Dt:	04/16/2002	Application #:	09652796	Filing Dt:	08/31/2000
Title:	SURFACE STABILIZATION OF SILICON RICH SILICA GLASS USING INCREASED POST DEPOSITION DELAY

Patent #:	6598610	Issue Dt:	07/29/2003	Application #:	09775465	Filing Dt:	02/05/2001
Publication #:	US20020106459	Pub Dt:	08/08/2002
Title:	METHOD OF DEPOSITING A THICK DIELECTRIC FILM

Patent #:	6724967	Issue Dt:	04/20/2004	Application #:	09799491	Filing Dt:	03/07/2001
Publication #:	US20020064359	Pub Dt:	05/30/2002
Title:	METHOD OF MAKING A FUNCTIONAL DEVICE WITH DEPOSITED LAYERS SUBJECT TO HIGH TEMPERATURE ANNEAL

Patent #:	6770213	Issue Dt:	08/03/2004	Application #:	09799495	Filing Dt:	03/07/2001
Publication #:	US20020088769	Pub Dt:	07/11/2002
Title:	METHOD OF INSPECTING AN ANISOTROPIC ETCH IN A MICROSTRUCTURE

Patent #:	6537623	Issue Dt:	03/25/2003	Application #:	09799496	Filing Dt:	03/07/2001
Publication #:	US20020071914	Pub Dt:	06/13/2002
Title:	MANUFACTURE OF SILICA WAVEGUIDES WITH MINIMAL ABSORPTION

Patent #:	6602791	Issue Dt:	08/05/2003	Application #:	09842836	Filing Dt:	04/27/2001
Publication #:	US20020160561	Pub Dt:	10/31/2002
Title:	MANUFACTURE OF INTEGRATED FLUIDIC DEVICES

Patent #:	6573133	Issue Dt:	06/03/2003	Application #:	09848278	Filing Dt:	05/04/2001
Publication #:	US20020020884	Pub Dt:	02/21/2002
Title:	METHOD OF FORMING SPACERS IN CMOS DEVICES

Patent #:	6825127	Issue Dt:	11/30/2004	Application #:	09910795	Filing Dt:	07/24/2001
Publication #:	US20030022505	Pub Dt:	01/30/2003
Title:	MICRO-FLUIDIC DEVICES

Patent #:	6555441	Issue Dt:	04/29/2003	Application #:	09923367	Filing Dt:	08/08/2001
Publication #:	US20030032299	Pub Dt:	02/13/2003
Title:	METHOD OF ALIGNING STRUCTURES ON OPPOSITE SIDES OF A WAFER

Patent #:	6716476	Issue Dt:	04/06/2004	Application #:	09956916	Filing Dt:	09/21/2001
Publication #:	US20030059556	Pub Dt:	03/27/2003
Title:	METHOD OF DEPOSITING AN OPTICAL QUALITY SILICA FILM BY PECVD

Patent #:	6849491	Issue Dt:	02/01/2005	Application #:	09964472	Filing Dt:	09/28/2001
Publication #:	US20030068844	Pub Dt:	04/10/2003
Title:	METHOD OF MAKING HIGH-VOLTAGE BIPOLAR/CMOS/DMOS (BCD) DEVICES

Patent #:	6656528	Issue Dt:	12/02/2003	Application #:	09987829	Filing Dt:	11/16/2001
Publication #:	US20030094433	Pub Dt:	05/22/2003
Title:	METHOD OF MAKING SPECULAR INFRARED MIRRORS FOR USE IN OPTICAL DEVICES

Patent #:	6749893	Issue Dt:	06/15/2004	Application #:	10059117	Filing Dt:	01/31/2002
Publication #:	US20030143334	Pub Dt:	07/31/2003
Title:	METHOD OF PREVENTING CRACKING IN OPTICAL QUALITY SILICA LAYERS

Patent #:	6937806	Issue Dt:	08/30/2005	Application #:	10101622	Filing Dt:	03/21/2002
Publication #:	US20030180021	Pub Dt:	09/25/2003
Title:	METHOD OF MAKING PHOTONIC DEVICES WITH SOG INTERLAYER

Patent #:	6635509	Issue Dt:	10/21/2003	Application #:	10120528	Filing Dt:	04/12/2002
Title:	WAFER-LEVEL MEMS PACKAGING

Patent #:	6902656	Issue Dt:	06/07/2005	Application #:	10153593	Filing Dt:	05/24/2002
Publication #:	US20030217915	Pub Dt:	11/27/2003
Title:	FABRICATION OF MICROSTRUCTURES WITH VACUUM-SEALED CAVITY

Patent #:	6896821	Issue Dt:	05/24/2005	Application #:	10226189	Filing Dt:	08/23/2002
Publication #:	US20040035820	Pub Dt:	02/26/2004
Title:	FABRICATION OF MEMS DEVICES WITH SPIN-ON GLASS

Patent #:	7138293	Issue Dt:	11/21/2006	Application #:	10310814	Filing Dt:	12/06/2002
Publication #:	US20040067604	Pub Dt:	04/08/2004
Title:	WAFER LEVEL PACKAGING TECHNIQUE FOR MICRODEVICES

Patent #:	6833282	Issue Dt:	12/21/2004	Application #:	10435043	Filing Dt:	05/12/2003
Publication #:	US20030197209	Pub Dt:	10/23/2003
Title:	A METHOD OF FORMING AN OPTICAL SENSOR DEVICE HAVING A COMPOSITE SANDWICH STRUCTURE OF ALTERNATING TITANIUM NITRIDE LAYERS

Patent #:	7144750	Issue Dt:	12/05/2006	Application #:	10459619	Filing Dt:	06/12/2003
Publication #:	US20050233492	Pub Dt:	10/20/2005
Title:	METHOD OF FABRICATING SILICON-BASED MEMS DEVICES

Patent #:	7037745	Issue Dt:	05/02/2006	Application #:	10839130	Filing Dt:	05/06/2004
Publication #:	US20050250238	Pub Dt:	11/10/2005
Title:	METHOD OF MAKING ELECTRICAL CONNECTIONS TO HERMETICALLY SEALED MEMS DEVICES

Patent #:	7101754	Issue Dt:	09/05/2006	Application #:	10864472	Filing Dt:	06/10/2004
Publication #:	US20050277304	Pub Dt:	12/15/2005
Title:	TITANIUM SILICATE FILMS WITH HIGH DIELECTRIC CONSTANT

Patent #:	7291513	Issue Dt:	11/06/2007	Application #:	11004973	Filing Dt:	12/07/2004
Publication #:	US20050142685	Pub Dt:	06/30/2005
Title:	HERMETIC WAFER-LEVEL PACKAGING FOR MEMS DEVICES WITH LOW-TEMPERATURE METALLURGY

Patent #:	7341905	Issue Dt:	03/11/2008	Application #:	11020217	Filing Dt:	12/27/2004
Publication #:	US20050136599	Pub Dt:	06/23/2005
Title:	METHOD OF MAKING HIGH-VOLTAGE BIPOLAR/CMOS/DMOS (BCD) DEVICES

Patent #:	7579622	Issue Dt:	08/25/2009	Application #:	11054946	Filing Dt:	02/11/2005
Publication #:	US20050145962	Pub Dt:	07/07/2005
Title:	FABRICATION OF MEMS DEVICES WITH SPIN-ON GLASS

Patent #:	7439093	Issue Dt:	10/21/2008	Application #:	11227065	Filing Dt:	09/16/2005
Publication #:	US20070065967	Pub Dt:	03/22/2007
Title:	METHOD OF MAKING A MEMS DEVICE CONTAINING A CAVITY WITH ISOTROPIC ETCH FOLLOWED BY ANISOTROPIC ETCH

Patent #:	7160752	Issue Dt:	01/09/2007	Application #:	11242960	Filing Dt:	10/05/2005
Publication #:	US20060166403	Pub Dt:	07/27/2006
Title:	FABRICATION OF ADVANCED SILICON-BASED MEMS DEVICES

Patent #:	7459329	Issue Dt:	12/02/2008	Application #:	11254774	Filing Dt:	10/21/2005
Publication #:	US20060110895	Pub Dt:	05/25/2006
Title:	METHOD OF FABRICATING SILICON-BASED MEMS DEVICES

Patent #:	7365016	Issue Dt:	04/29/2008	Application #:	11314535	Filing Dt:	12/22/2005
Publication #:	US20060211163	Pub Dt:	09/21/2006
Title:	ANHYDROUS HF RELEASE OF PROCESS FOR MEMS DEVICES

Patent #:	7807550	Issue Dt:	10/05/2010	Application #:	11424059	Filing Dt:	06/14/2006
Publication #:	US20070015341	Pub Dt:	01/18/2007
Title:	METHOD OF MAKING MEMS WAFERS

Patent #:	8071486	Issue Dt:	12/06/2011	Application #:	11457911	Filing Dt:	07/17/2006
Publication #:	US20070134927	Pub Dt:	06/14/2007
Title:	METHOD FOR REMOVING RESIDUES FORMED DURING THE MANUFACTURE OF MEMS DEVICES

Patent #:	7614253	Issue Dt:	11/10/2009	Application #:	11561044	Filing Dt:	11/17/2006
Publication #:	US20070130996	Pub Dt:	06/14/2007
Title:	METHOD OF REDUCING STRESS-INDUCED MECHANICAL PROBLEMS IN OPTICAL COMPONENTS

Patent #:	7682860	Issue Dt:	03/23/2010	Application #:	11687287	Filing Dt:	03/16/2007
Publication #:	US20070231943	Pub Dt:	10/04/2007
Title:	PROTECTION CAPSULE FOR MEMS DEVICES

Patent #:	7799376	Issue Dt:	09/21/2010	Application #:	11829646	Filing Dt:	07/27/2007
Publication #:	US20090029533	Pub Dt:	01/29/2009
Title:	METHOD OF CONTROLLING FILM STRESS IN MEMS DEVICES

Patent #:	7799656	Issue Dt:	09/21/2010	Application #:	12045853	Filing Dt:	03/11/2008
Publication #:	US20080299695	Pub Dt:	12/04/2008
Title:	MICROCHANNELS FOR BIOMEMS DEVICES

Patent #:	7927904	Issue Dt:	04/19/2011	Application #:	12651561	Filing Dt:	01/04/2010
Publication #:	US20100173436	Pub Dt:	07/08/2010
Title:	METHOD OF MAKING BIOMEMS DEVICES

Assignor

DALSA SEMICONDUCTOR INC.

Exec Dt:

02/14/2011

Assignee

TELEDYNE DALSA SEMICONDUCTOR INC.

605 MCMURRAY ROAD

WATERLOO, ONTARIO, CANADA N2V 2E9

Correspondence name and address
	WENDY K. BILLINGSLEY
	1049 CAMINO DOS RIOS
	THOUSAND OAKS, CA 91360

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