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Total properties:
12
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Patent #:
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Issue Dt:
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10/28/2014
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Application #:
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13738918
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Filing Dt:
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01/10/2013
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Publication #:
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Pub Dt:
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07/10/2014
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Title:
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Method of Timing Laser Beam Pulses to Regulate Extreme Ultraviolet Light Dosing
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Patent #:
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Issue Dt:
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10/28/2014
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Application #:
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13738923
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Filing Dt:
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01/10/2013
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Publication #:
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Pub Dt:
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07/10/2014
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Title:
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Method of Timing Laser Beam Pulses to Regulate Extreme Ultraviolet Light Dosing
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Patent #:
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Issue Dt:
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04/07/2015
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Application #:
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13768588
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Filing Dt:
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02/15/2013
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Publication #:
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Pub Dt:
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08/21/2014
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Title:
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SYSTEM AND METHOD FOR ADJUSTING SEED LASER PULSE WIDTH TO CONTROL EUV OUTPUT ENERGY
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Patent #:
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Issue Dt:
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07/29/2014
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Application #:
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13830380
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Filing Dt:
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03/14/2013
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Title:
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TARGET FOR EXTREME ULTRAVIOLET LIGHT SOURCE
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Patent #:
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Issue Dt:
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03/25/2014
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Application #:
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13843626
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Filing Dt:
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03/15/2013
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Title:
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EXTREME ULTRAVIOLET LIGHT SOURCE
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Patent #:
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Issue Dt:
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09/09/2014
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Application #:
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13874306
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Filing Dt:
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04/30/2013
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Publication #:
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Pub Dt:
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09/12/2013
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Title:
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DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING
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Patent #:
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Issue Dt:
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06/10/2014
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Application #:
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13973894
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Filing Dt:
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08/22/2013
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Publication #:
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Pub Dt:
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02/13/2014
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Title:
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LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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01/31/2017
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Application #:
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14022026
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Filing Dt:
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09/09/2013
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Publication #:
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Pub Dt:
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03/12/2015
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Title:
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TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
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Patent #:
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Issue Dt:
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01/19/2016
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Application #:
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14037817
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Filing Dt:
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09/26/2013
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Publication #:
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Pub Dt:
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03/26/2015
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Title:
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SYSTEM AND METHOD FOR CONTROLLING DROPLET TIMING IN AN LPP EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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03/29/2016
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Application #:
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14094361
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Filing Dt:
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12/02/2013
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Publication #:
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Pub Dt:
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06/04/2015
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Title:
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APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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06/21/2016
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Application #:
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14104200
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Filing Dt:
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12/12/2013
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Publication #:
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Pub Dt:
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06/18/2015
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Title:
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FINAL FOCUS ASSEMBLY FOR EXTREME ULTRAVIOLET LIGHT SOURCE
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Patent #:
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Issue Dt:
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08/19/2014
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Application #:
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14137030
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Filing Dt:
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12/20/2013
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Title:
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System and Method for Controlling Droplet Timing and Steering in an LPP EUV Light Source
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