Patent Assignment Details
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| Reel/Frame: | 037712/0625 | |
| Pages: | 8 |
| | Recorded: | 02/11/2016 | | |
| Attorney Dkt #: | KLA P4132US2 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/15/2017
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Application #:
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15018104
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Filing Dt:
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02/08/2016
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Publication #:
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Pub Dt:
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06/02/2016
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Title:
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Method and System for Adaptively Scanning a Sample During Electron Beam Inspection
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Assignee
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER
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14301 FNB PARKWAY, SUITE 220
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OMAHA, NE 68154
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