|
Total properties:
71
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/14/1989
|
Application #:
|
07043852
|
Filing Dt:
|
04/29/1987
|
|
Title:
|
CLEANING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/26/1989
|
Application #:
|
07144515
|
Filing Dt:
|
01/15/1988
|
|
Title:
|
MEGASONIC CLEANING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/08/1989
|
Application #:
|
07197867
|
Filing Dt:
|
05/24/1988
|
|
Title:
|
APPARATUS FOR TREATING WAFERS UTILIZING MEGASONIC ENERGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/12/1991
|
Application #:
|
07272501
|
Filing Dt:
|
11/16/1988
|
|
Title:
|
MEGASONIC CLEANING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/06/1991
|
Application #:
|
07482086
|
Filing Dt:
|
02/15/1990
|
|
Title:
|
MEGASONIC CLEANING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/25/1992
|
Application #:
|
07598426
|
Filing Dt:
|
10/16/1990
|
|
Title:
|
SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/22/1992
|
Application #:
|
07598909
|
Filing Dt:
|
10/16/1990
|
|
Title:
|
SINGLE CHAMBER MEGASONIC ENERGY CLEANER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/28/1993
|
Application #:
|
07791094
|
Filing Dt:
|
11/12/1991
|
|
Title:
|
MEGASONIC CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/15/1994
|
Application #:
|
07809799
|
Filing Dt:
|
12/18/1991
|
|
Title:
|
SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSENG SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/10/1993
|
Application #:
|
07876043
|
Filing Dt:
|
04/30/1992
|
|
Title:
|
PROCESS FOR ETCHING OXIDE FILMS IN A SEALED PHOTOCHEMICAL REACTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/22/1994
|
Application #:
|
08042889
|
Filing Dt:
|
04/05/1993
|
|
Title:
|
MEGASONIC TRANSDUCER ASSEMBLY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/17/1996
|
Application #:
|
08275807
|
Filing Dt:
|
07/15/1994
|
|
Title:
|
METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/1997
|
Application #:
|
08277792
|
Filing Dt:
|
07/20/1994
|
|
Title:
|
MEGASONIC CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/12/1997
|
Application #:
|
08361139
|
Filing Dt:
|
12/21/1994
|
|
Title:
|
SEMICONDUCTOR WAFER CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/21/2000
|
Application #:
|
08724518
|
Filing Dt:
|
09/30/1996
|
|
Title:
|
WAFER CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/15/1998
|
Application #:
|
08851668
|
Filing Dt:
|
05/06/1997
|
|
Title:
|
INDUSTRIAL ROBOT SAFETY DEVICE THAT SHUTS DOWN OPERATION IN REPONSE TO VARIATION IN TENSION OF A ROPE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/01/1999
|
Application #:
|
08908330
|
Filing Dt:
|
08/07/1997
|
|
Title:
|
SEMICONDUCTOR WAFER CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/1999
|
Application #:
|
08908345
|
Filing Dt:
|
08/07/1997
|
|
Title:
|
SEMICONDUCTOR WAFER CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/14/1999
|
Application #:
|
08910033
|
Filing Dt:
|
08/11/1997
|
|
Title:
|
SEMICONDUCTOR WAFER CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/03/2000
|
Application #:
|
09040176
|
Filing Dt:
|
03/17/1998
|
|
Title:
|
GAS SEAL AND SUPPORT FOR ROTATING SEMICONDUCTOR PROCESSOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/31/2000
|
Application #:
|
09057182
|
Filing Dt:
|
04/08/1998
|
|
Title:
|
WAFER CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/12/2000
|
Application #:
|
09358568
|
Filing Dt:
|
07/20/1999
|
|
Title:
|
SEMICONDUCTOR WAFER CLEANING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/02/2001
|
Application #:
|
09643328
|
Filing Dt:
|
08/22/2000
|
|
Title:
|
WAFER CLEANING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/30/2002
|
Application #:
|
09694938
|
Filing Dt:
|
10/23/2000
|
|
Title:
|
SEMICONDUCTOR WAFER CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2004
|
Application #:
|
09906384
|
Filing Dt:
|
07/16/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/23/2003
| | | | |
|
Title:
|
MEGASONIC CLEANER PROBE SYSTEM WITH GASIFIED FLUID
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/20/2004
|
Application #:
|
09922509
|
Filing Dt:
|
08/03/2001
|
|
Publication #:
|
|
Pub Dt:
|
02/06/2003
| | | | |
|
Title:
|
MEGASONIC PROBE ENERGY ATTENUATOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/15/2002
|
Application #:
|
09953504
|
Filing Dt:
|
09/13/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/31/2002
| | | | |
|
Title:
|
WAFER CLEANING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/2004
|
Application #:
|
10014121
|
Filing Dt:
|
12/11/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/27/2002
| | | | |
|
Title:
|
PARTICLE BARRIER DRAIN
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
11/18/2003
|
Application #:
|
10052823
|
Filing Dt:
|
01/17/2002
|
|
Publication #:
|
|
Pub Dt:
|
07/17/2003
| | | | |
|
Title:
|
SYSTEM FOR REMOVAL OF PHOTORESIST USING SPARGER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/27/2004
|
Application #:
|
10053364
|
Filing Dt:
|
01/18/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/10/2002
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR CHEMICAL INJECTION IN SILICON WAFER PROCESSING
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|
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|
|
Patent #:
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|
Issue Dt:
|
03/29/2005
|
Application #:
|
10053449
|
Filing Dt:
|
01/17/2002
|
|
Publication #:
|
|
Pub Dt:
|
07/03/2003
| | | | |
|
Title:
|
LOW PROFILE WAFER CARRIER
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|
|
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|
Patent #:
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|
Issue Dt:
|
10/30/2007
|
Application #:
|
10059682
|
Filing Dt:
|
01/29/2002
|
|
Publication #:
|
|
Pub Dt:
|
07/31/2003
| | | | |
|
Title:
|
MEGASONIC PROBE ENERGY DIRECTOR
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
01/04/2005
|
Application #:
|
10091011
|
Filing Dt:
|
03/04/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/30/2003
| | | | |
|
Title:
|
CLEANING AND DRYING METHOD AND APPARATUS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
04/20/2004
|
Application #:
|
10098847
|
Filing Dt:
|
03/15/2002
|
|
Publication #:
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|
Pub Dt:
|
09/19/2002
| | | | |
|
Title:
|
DRYING VAPOR GENERATION
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|
|
|
|
Patent #:
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|
Issue Dt:
|
07/27/2004
|
Application #:
|
10117725
|
Filing Dt:
|
04/05/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/10/2002
| | | | |
|
Title:
|
CHEMICAL CONCENTRATION CONTROL DEVICE
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|
|
|
|
Patent #:
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|
Issue Dt:
|
01/18/2005
|
Application #:
|
10117739
|
Filing Dt:
|
04/05/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/02/2003
| | | | |
|
Title:
|
MEMBRANE DRYER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/18/2003
|
Application #:
|
10117768
|
Filing Dt:
|
04/05/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/10/2002
| | | | |
|
Title:
|
PROCESS TANK WITH PRESSURIZED MIST GENERATION
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|
|
|
|
Patent #:
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|
Issue Dt:
|
01/11/2005
|
Application #:
|
10117778
|
Filing Dt:
|
04/05/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/10/2002
| | | | |
|
Title:
|
NEXTGEN WET PROCESS TANK
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|
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Patent #:
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|
Issue Dt:
|
03/06/2007
|
Application #:
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10140029
|
Filing Dt:
|
05/06/2002
|
|
Publication #:
|
|
Pub Dt:
|
11/06/2003
| | | | |
|
Title:
|
RECIPROCATING MEGASONIC PROBE
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|
Patent #:
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|
Issue Dt:
|
06/29/2004
|
Application #:
|
10171426
|
Filing Dt:
|
06/12/2002
|
|
Publication #:
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|
Pub Dt:
|
12/12/2002
| | | | |
|
Title:
|
MEGASONIC CLEANER AND DRYER
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|
|
|
|
Patent #:
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|
Issue Dt:
|
08/02/2005
|
Application #:
|
10171429
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Filing Dt:
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06/12/2002
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Publication #:
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Pub Dt:
|
12/12/2002
| | | | |
|
Title:
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STACKABLE PROCESS CHAMBERS
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Patent #:
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Issue Dt:
|
08/16/2005
|
Application #:
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10171430
|
Filing Dt:
|
06/12/2002
|
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
|
Title:
|
MEGASONIC CLEANER AND DRYER SYSTEM
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10171431
|
Filing Dt:
|
06/12/2002
|
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
|
Title:
|
Method of applying liquid to a megasonic apparatus for improved cleaning control
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
10171494
|
Filing Dt:
|
06/12/2002
|
|
Publication #:
|
|
Pub Dt:
|
02/05/2004
| | | | |
|
Title:
|
Megasonic cleaner and dryer system
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|
|
|
|
Patent #:
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|
Issue Dt:
|
01/27/2004
|
Application #:
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10243463
|
Filing Dt:
|
09/12/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
|
Title:
|
WAFER CLEANING
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2004
|
Application #:
|
10243486
|
Filing Dt:
|
09/12/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/23/2003
| | | | |
|
Title:
|
WAFER CLEANING
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/30/2003
|
Application #:
|
10304583
|
Filing Dt:
|
11/25/2002
|
|
Publication #:
|
|
Pub Dt:
|
06/19/2003
| | | | |
|
Title:
|
METHOD OF PROCESSING SUBSTRATES USING PRESSURIZED MIST GENERATION
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/12/2006
|
Application #:
|
10341425
|
Filing Dt:
|
01/10/2003
|
|
Publication #:
|
|
Pub Dt:
|
07/15/2004
| | | | |
|
Title:
|
MEGASONIC CLEANING SYSTEM WITH BUFFERED CAVITATION METHOD
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|
|
|
|
Patent #:
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|
Issue Dt:
|
06/21/2005
|
Application #:
|
10358636
|
Filing Dt:
|
02/05/2003
|
|
Publication #:
|
|
Pub Dt:
|
08/07/2003
| | | | |
|
Title:
|
CAPILLARY DRYING OF SUBSTRATES
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
11/16/2004
|
Application #:
|
10366054
|
Filing Dt:
|
02/13/2003
|
|
Publication #:
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|
Pub Dt:
|
07/24/2003
| | | | |
|
Title:
|
PROCESS AND APPARATUS FOR REMOVAL OF PHOTORESIST FROM SEMICONDUCTOR WAFERS USING SPRAY NOZZLES
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|
|
|
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Patent #:
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|
Issue Dt:
|
03/08/2005
|
Application #:
|
10634440
|
Filing Dt:
|
08/05/2003
|
|
Publication #:
|
|
Pub Dt:
|
02/26/2004
| | | | |
|
Title:
|
METHOD FOR REMOVAL OF PHOTORESIST USING SPARGER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2005
|
Application #:
|
10699042
|
Filing Dt:
|
10/31/2003
|
|
Publication #:
|
|
Pub Dt:
|
08/05/2004
| | | | |
|
Title:
|
SUBSTRATE PROCESS TANK WITH ACOUSTICAL SOURCE TRANSMISSION AND METHOD OF PROCESSING SUBSTRATES
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Patent #:
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Issue Dt:
|
10/10/2006
|
Application #:
|
10726774
|
Filing Dt:
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12/03/2003
|
|
Publication #:
|
|
Pub Dt:
|
10/21/2004
| | | | |
|
Title:
|
METHOD OF CLEANING A SIDE OF A THIN FLAT SUBSTRATE BY APPLYING SONIC ENERGY TO THE OPPOSITE SIDE OF THE SUBSTRATE
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Patent #:
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|
Issue Dt:
|
05/23/2006
|
Application #:
|
10742214
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Filing Dt:
|
12/19/2003
|
|
Publication #:
|
|
Pub Dt:
|
07/22/2004
| | | | |
|
Title:
|
SONIC-ENERGY CLEANER SYSTEM WITH GASIFIED FLUID
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|
|
|
Patent #:
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Issue Dt:
|
05/17/2005
|
Application #:
|
10760596
|
Filing Dt:
|
01/20/2004
|
|
Publication #:
|
|
Pub Dt:
|
09/02/2004
| | | | |
|
Title:
|
APPARATUS AND METHODS FOR REDUCING DAMAGE TO SUBSTRATES DURING MEGASONIC CLEANING PROCESSES
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|
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Patent #:
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|
Issue Dt:
|
09/05/2006
|
Application #:
|
10864927
|
Filing Dt:
|
06/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
11/11/2004
| | | | |
|
Title:
|
MEGASONIC CLEANER AND DRYER
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
01/02/2007
|
Application #:
|
10864929
|
Filing Dt:
|
06/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
07/28/2005
| | | | |
|
Title:
|
MEGASONIC CLEANING USING SUPERSATURATED CLEANING SOLUTION
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10865440
|
Filing Dt:
|
06/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
11/25/2004
| | | | |
|
Title:
|
Megasonic cleaner and dryer
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/25/2007
|
Application #:
|
10895511
|
Filing Dt:
|
07/20/2004
|
|
Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR POINT-OF-USE FILTRATION AND PURIFICATION OF FLUIDS USED IN SUBSTRATE PROCESSING
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|
|
|
|
Patent #:
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|
Issue Dt:
|
01/30/2007
|
Application #:
|
10909764
|
Filing Dt:
|
08/02/2004
|
|
Publication #:
|
|
Pub Dt:
|
02/03/2005
| | | | |
|
Title:
|
PROCESS SEQUENCE FOR PHOTORESIST STRIPPING AND/OR CLEANING OF PHOTOMASKS FOR INTEGRATED CIRCUIT MANUFACTURING
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10931441
|
Filing Dt:
|
09/01/2004
|
|
Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
|
Title:
|
Apparatus for carrying reticles and method of using the same to process reticles
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/2005
|
Application #:
|
10951009
|
Filing Dt:
|
09/27/2004
|
|
Publication #:
|
|
Pub Dt:
|
04/28/2005
| | | | |
|
Title:
|
MEMBRANE DRYER
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
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11176406
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Filing Dt:
|
07/07/2005
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Publication #:
|
|
Pub Dt:
|
01/19/2006
| | | | |
|
Title:
|
System and method for pre-gate cleaning of substrates
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|
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
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11177147
|
Filing Dt:
|
07/08/2005
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Publication #:
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Pub Dt:
|
02/02/2006
| | | | |
|
Title:
|
Method and apparatus for creating ozonated process solutions having high ozone concentration
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
11178923
|
Filing Dt:
|
07/11/2005
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Publication #:
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|
Pub Dt:
|
01/26/2006
| | | | |
|
Title:
|
Reduced pressure irradiation processing method and apparatus
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11227705
|
Filing Dt:
|
09/15/2005
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|
Publication #:
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|
Pub Dt:
|
03/16/2006
| | | | |
|
Title:
|
System and method of powering a sonic energy source and use of the same to process substrates
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11266402
|
Filing Dt:
|
11/03/2005
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|
Publication #:
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|
Pub Dt:
|
05/03/2007
| | | | |
|
Title:
|
APPARATUS AND METHOD FOR REMOVING TRACE AMOUNTS OF LIQUID FROM SUBSTRATES DURING SINGLE-SUBSTRATE PROCESSING
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11370361
|
Filing Dt:
|
03/08/2006
|
|
Publication #:
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|
Pub Dt:
|
11/23/2006
| | | | |
|
Title:
|
Method and system for processing substrates with sonic energy that reduces or eliminates damage to semiconductor devices
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11370707
|
Filing Dt:
|
03/08/2006
|
|
Publication #:
|
|
Pub Dt:
|
11/23/2006
| | | | |
|
Title:
|
Method and system for processing substrates with sonic energy that reduces or eliminates damage to semiconductor devices
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/11/2007
|
Application #:
|
11375907
|
Filing Dt:
|
03/15/2006
|
|
Publication #:
|
|
Pub Dt:
|
08/17/2006
| | | | |
|
Title:
|
TRANSDUCER ASSEMBLY FOR MAGASONIC PROCESSING OF AN ARTICLE AND APPARATUS UTILIZING THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/01/2007
|
Application #:
|
11386634
|
Filing Dt:
|
03/22/2006
|
|
Publication #:
|
|
Pub Dt:
|
08/10/2006
| | | | |
|
Title:
|
APPARATUS FOR MEGASONIC PROCESSING OF AN ARTICLE
|
|
