Patent Assignment Details
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| Reel/Frame: | 014452/0638 | |
| Pages: | 5 |
| | Recorded: | 08/20/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10381625
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Filing Dt:
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08/20/2003
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Publication #:
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Pub Dt:
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01/29/2004
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Title:
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ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY
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Assignee
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| CARL-ZEISS-STRASSE 22,73447 |
| OBERKOCHEN, GERMANY |
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Correspondence name and address
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OHLANDT, GREELEY ET.AL.
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CHARLES N.J. RUGGIERO
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ONE LANDMARK SQUARE, 10TH FLOOR
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STAMFORD, CT 06901-2682
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