Patent Assignment Details
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| Reel/Frame: | 011572/0639 | |
| Pages: | 5 |
| | Recorded: | 03/02/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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09727881
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Filing Dt:
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12/01/2000
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Publication #:
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Pub Dt:
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06/06/2002
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Title:
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METHOD AND APPARATUS FOR SMOOTHING THIN CONDUCTIVE FILMS BY GAS CLUSTER ION BEAM
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Assignee
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| 37 MANNING ROAD |
| A CORPORATION OF MASSACHUSETTS |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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PERKINS, SMITH & COHEN, LLP
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JERRY COHEN
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ONE BEACON STREET
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BOSTON, MA 02108-3106
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