Patent Assignment Details
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| Reel/Frame: | 025463/0639 | |
| Pages: | 4 |
| | Recorded: | 12/07/2010 | | |
| Attorney Dkt #: | 1015292-000410 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/14/2015
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Application #:
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12962166
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Filing Dt:
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12/07/2010
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Publication #:
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Pub Dt:
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06/23/2011
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Title:
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METHODOLOGY FOR CLEANING OF SURFACE METAL CONTAMINATION FROM AN UPPER ELECTRODE USED IN A PLASMA CHAMBER
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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BUCHANAN, INGERSOLL & ROONEY PC
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POST OFFICE BOX 1404
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ALEXANDRIA, VA 22313-1404
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