Patent Assignment Details
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Reel/Frame: | 020834/0644 | |
| Pages: | 6 |
| | Recorded: | 04/21/2008 | | |
Attorney Dkt #: | 40007524-0004-002 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/12/2009
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Application #:
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11576944
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Filing Dt:
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04/21/2008
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Publication #:
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Pub Dt:
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10/30/2008
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Title:
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METHOD AND APPARATUS FOR IMPROVED CHEMICAL MECHANICAL PLANARIZATION PAD WITH PRESSURE CONTROL AND PROCESS MONITOR
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Assignee
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2144 BERING DRIVE |
SAN JOSE, CALIFORNIA 95131 |
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Correspondence name and address
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SONNENSCHEIN NATH & ROSENTHAL LLP
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P.O. BOX 061080
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WACKER DRIVE STATION, SEARS TOWER
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CHICAGO, IL 60606-1080
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