Patent Assignment Details
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| Reel/Frame: | 004126/0646 | |
| Pages: | 2 |
| | Recorded: | 05/16/1983 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/06/1984
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Application #:
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06459745
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Filing Dt:
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01/21/1983
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Title:
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HEATER ASSEMBLY FOR THERMAL PROCESSING OF A SEMICONDUCTOR WAFER IN A VACUUM CHAMBER
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Assignee
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| A CORP. OF DE |
| PALO ALTO, CALIFORNIA |
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Correspondence name and address
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WILLIAM R. MCCLELLAN
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VARIAN ASSOCIATES/ PATENT DEPT.
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8 SALEM ROAD
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BEVERLY, MA 01915
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