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Reel/Frame:018567/0646   Pages: 8
Recorded: 11/27/2006
Attorney Dkt #:5649-1056ip2
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
11438941
Filing Dt:
05/23/2006
Publication #:
Pub Dt:
03/15/2007
Title:
Method of forming a tantalum carbon nitride layer and method of manufacturing a semiconductor device using the same
Assignors
1
Exec Dt:
07/07/2006
2
Exec Dt:
07/11/2006
3
Exec Dt:
11/21/2006
4
Exec Dt:
07/06/2006
5
Exec Dt:
07/12/2006
6
Exec Dt:
06/02/2006
Assignee
1
416 MAETAN-DONG, YEONGTONG-GU
SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Correspondence name and address
DOLORES W. HERMAN
MYERS BIGEL SIBLEY & SAJOVEC
P.O. BOX 37428
RALEIGH, NC 27627

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