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Total properties:
17
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|
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|
Patent #:
|
|
Issue Dt:
|
12/01/1987
|
Application #:
|
06767611
|
Filing Dt:
|
08/20/1985
|
|
Title:
|
OPTICAL SCATTEROMETER HAVING IMPROVED SENSITIVITY AND BANDWIDTH
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/31/1993
|
Application #:
|
07591452
|
Filing Dt:
|
10/01/1990
|
|
Title:
|
TWO-DIMENSIONAL OPTICAL SCATTEROMETER APPARATUS AND PROCESS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/30/1997
|
Application #:
|
08510990
|
Filing Dt:
|
08/03/1995
|
|
Title:
|
LENS SCATTEROMETER SYSTEM EMPLOYING SOURCE LIGHT BEAM SCANNING MEANS
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|
|
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Patent #:
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|
Issue Dt:
|
08/18/1998
|
Application #:
|
08525767
|
Filing Dt:
|
01/26/1996
|
|
Title:
|
METHOD AND APPARATUS FOR MAPPING OF SEMICONDUCTOR MATERIALS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/28/2002
|
Application #:
|
09029293
|
Filing Dt:
|
03/05/1998
|
|
Title:
|
OPTICAL INSTRUMENTS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
09/26/2006
|
Application #:
|
09254521
|
Filing Dt:
|
03/08/1999
|
|
Title:
|
MICRO DEFECTS IN SEMI-CONDUCTORS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/25/2003
|
Application #:
|
09720951
|
Filing Dt:
|
04/18/2001
|
|
Title:
|
METHOD AND DEVICE FOR DETERMINING THE DEPENDENCE OF A FIRST MEASURED QUANTITY ON A SECOND MEASURED QUANTITY
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|
|
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|
Patent #:
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|
Issue Dt:
|
06/28/2005
|
Application #:
|
10381208
|
Filing Dt:
|
09/22/2003
|
|
Publication #:
|
|
Pub Dt:
|
06/03/2004
| | | | |
|
Title:
|
METHOD TO DETECT SURFACE METAL CONTAMINATION
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|
Patent #:
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|
Issue Dt:
|
08/29/2006
|
Application #:
|
10469536
|
Filing Dt:
|
10/28/2003
|
|
Publication #:
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|
Pub Dt:
|
05/13/2004
| | | | |
|
Title:
|
DETECTION AND CLASSIFICATION OF MICRO-DEFECTS IN SEMI-CONDUCTORS
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|
Patent #:
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|
Issue Dt:
|
05/11/2010
|
Application #:
|
10520439
|
Filing Dt:
|
04/05/2006
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|
Publication #:
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|
Pub Dt:
|
09/21/2006
| | | | |
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Title:
|
MONITORING APPARATUS AND METHOD FOR IMPROVING THE ACCURACY AND REPEATABILITY OF ELECTROCHEMICAL CAPACITANCE VOLTAGE (ECV) MEASUREMENTS
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10549860
|
Filing Dt:
|
07/13/2006
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|
Publication #:
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|
Pub Dt:
|
09/27/2007
| | | | |
|
Title:
|
Overlay Metrology Mark
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10549863
|
Filing Dt:
|
12/08/2006
|
|
Publication #:
|
|
Pub Dt:
|
03/29/2007
| | | | |
|
Title:
|
Overlay metrology mark
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|
Patent #:
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|
Issue Dt:
|
09/15/2009
|
Application #:
|
10549865
|
Filing Dt:
|
07/28/2006
|
|
Publication #:
|
|
Pub Dt:
|
11/23/2006
| | | | |
|
Title:
|
DETECTION METHOD AND APPARATUS METAL PARTICULATES ON SEMICONDUCTORS
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|
Patent #:
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|
Issue Dt:
|
09/28/2010
|
Application #:
|
10572329
|
Filing Dt:
|
12/12/2006
|
|
Publication #:
|
|
Pub Dt:
|
04/12/2007
| | | | |
|
Title:
|
FOCUSING SYSTEM AND METHOD
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|
|
|
|
Patent #:
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|
Issue Dt:
|
07/07/2009
|
Application #:
|
10905717
|
Filing Dt:
|
01/18/2005
|
|
Publication #:
|
|
Pub Dt:
|
11/03/2005
| | | | |
|
Title:
|
SEALING RING ASSEMBLY AND MOUNTING METHOD
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11370588
|
Filing Dt:
|
03/08/2006
|
|
Publication #:
|
|
Pub Dt:
|
09/18/2008
| | | | |
|
Title:
|
Semiconductor testing instrument to determine safe operating area
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|
|
|
|
Patent #:
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|
Issue Dt:
|
11/04/2008
|
Application #:
|
11528723
|
Filing Dt:
|
09/26/2006
|
|
Title:
|
MICRO DEFECTS IN SEMI-CONDUCTORS
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|
