Patent Assignment Details
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Reel/Frame: | 019792/0652 | |
| Pages: | 3 |
| | Recorded: | 09/06/2007 | | |
Attorney Dkt #: | MILLER-CON2 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/09/2010
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Application #:
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11684818
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Filing Dt:
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03/12/2007
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Publication #:
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Pub Dt:
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09/18/2008
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Title:
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DYNAMIC TEMPERATURE BACKSIDE GAS CONTROL FOR IMPROVED WITHIN-SUBSTRATE PROCESS UNIFORMITY
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Assignee
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10887 EAST GOLD DUST AVENUE |
SCOTTSDALE, ARIZONA 85259 |
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Correspondence name and address
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GREENBERG TRAURIG LLP
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1750 TYSONS BOULEVARD
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SUITE 1200
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MCLEAN, VA 22102
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