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Total properties:
15
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Patent #:
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|
Issue Dt:
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06/06/1995
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Application #:
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08067392
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Filing Dt:
|
05/25/1993
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Title:
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METHOD FOR A REACTIVE SURFACE TREATMENT OF A WORKPIECE AND A TREATMENT CHAMBER FOR PRACTICING SUCH METHOD
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Patent #:
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Issue Dt:
|
12/02/1997
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Application #:
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08237432
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Filing Dt:
|
05/03/1994
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Title:
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METHOD FOR IMPROVING THE RATE OF A PLASMA ENHANCED VACUUM TREATMENT
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|
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Patent #:
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|
Issue Dt:
|
05/14/1996
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Application #:
|
08237575
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Filing Dt:
|
05/03/1994
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Title:
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PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATING SAME
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Patent #:
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|
Issue Dt:
|
12/22/1998
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Application #:
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08576236
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Filing Dt:
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12/21/1995
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Title:
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HEATING SYSTEM, VACUUM PROCESS CHAMBER COMPRISING SUCH A HEATING SYSTEM AND OPERATION OF SUCH A VACUUM PROCESS CHAMBER
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Patent #:
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Issue Dt:
|
06/13/2000
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Application #:
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08881759
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Filing Dt:
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06/24/1997
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Title:
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METHOD FOR MONITORING THE FLOW OF A GAS INTO A VACUUM REACTOR
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Patent #:
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Issue Dt:
|
10/02/2001
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Application #:
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09177894
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Filing Dt:
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10/23/1998
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Title:
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PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATION SAME
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|
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Patent #:
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|
Issue Dt:
|
08/28/2001
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Application #:
|
09360247
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Filing Dt:
|
07/23/1999
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Title:
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CAPACITIVELY COUPLED RF-PLASMA REACTOR
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|
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Patent #:
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Issue Dt:
|
03/18/2003
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Application #:
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09379742
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Filing Dt:
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08/24/1999
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Publication #:
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Pub Dt:
|
06/14/2001
| | | | |
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Title:
|
METHOD FOR IMPROVING THE RATE OF A PLASMA ENHANCED VACUUM TREATMENT
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|
|
|
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Patent #:
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|
Issue Dt:
|
01/23/2001
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Application #:
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09441373
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Filing Dt:
|
11/17/1999
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Title:
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PROCESS FOR HANDLING WORKPIECES AND APPARATUS THEREFOR
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|
|
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Patent #:
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|
Issue Dt:
|
05/21/2002
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Application #:
|
09441374
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Filing Dt:
|
11/17/1999
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|
Title:
|
PROCESSES FOR VACUUM TREATING WORKPIECES, AND CORRESPONDING PROCESS EQUIPMENT
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|
|
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Patent #:
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|
Issue Dt:
|
01/07/2003
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Application #:
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09559408
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Filing Dt:
|
04/26/2000
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Title:
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DESING OF GAS INJECTION FOR THE ELECTRODE IN A CAPACITIVELY COUPLED RF PLASMA REACTOR
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|
|
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Patent #:
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|
Issue Dt:
|
05/10/2005
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Application #:
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09766835
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Filing Dt:
|
01/23/2001
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Publication #:
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|
Pub Dt:
|
12/13/2001
| | | | |
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Title:
|
PROCESSES FOR VACUUM TREATING WORKPIECES, AND CORRESPONDING PROCESS EQUIPMENT
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|
|
|
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Patent #:
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|
Issue Dt:
|
01/06/2004
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Application #:
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09925646
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Filing Dt:
|
08/10/2001
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|
Publication #:
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Pub Dt:
|
03/07/2002
| | | | |
|
Title:
|
PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATING SAME
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|
|
|
|
Patent #:
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|
Issue Dt:
|
12/11/2007
|
Application #:
|
10300873
|
Filing Dt:
|
11/21/2002
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|
Publication #:
|
|
Pub Dt:
|
04/17/2003
| | | | |
|
Title:
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AN RF PLASMA REACTOR HAVING A DISTRIBUTION CHAMBER WITH AT LEAST ONE GRID
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/02/2015
|
Application #:
|
11877419
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Filing Dt:
|
10/23/2007
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|
Publication #:
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|
Pub Dt:
|
04/24/2008
| | | | |
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Title:
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RF Plasma Reactor Having a Distribution Chamber with at Least One Grid
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