Patent Assignment Details
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| Reel/Frame: | 012397/0661 | |
| Pages: | 4 |
| | Recorded: | 12/06/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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10021324
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Filing Dt:
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12/06/2001
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Publication #:
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Pub Dt:
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04/25/2002
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Title:
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ENDPOINT DETECTION IN THE ETCHING OF DIELECTRIC LAYERS
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Assignee
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| UNIT 3, HOWTH JUNCTION BUSINESS PARK |
| KILBARRACK, DUBLIN 5, IRELAND |
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Correspondence name and address
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LAW OFFICES OF THOMAS M. FREIBURGER
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THOMAS M. FREIBURGER
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650 CALIFORNIA STREET
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25TH FLOOR
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SAN FRANCISCO, CA 94108
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