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Patent Assignment Details

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Reel/Frame:	016844/0668			Pages:	3
		Recorded:	09/30/2005
Attorney Dkt #:	TTI-0000
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 14

Patent #:	5996415	Issue Dt:	12/07/1999	Application #:	08847144	Filing Dt:	04/30/1997
Title:	IMPROVED APPARATUS AND METHOD FOR CHARACTERIZING SEMICONDUCTOR WAFERS DURING PROCESSING

Patent #:	6112595	Issue Dt:	09/05/2000	Application #:	09420217	Filing Dt:	10/18/1999
Title:	APPARATUS AND METHOD FOR CHARACTERIZING SEMICONDUCTOR WAFERS DURING PROCESSING

Patent #:	6690473	Issue Dt:	02/10/2004	Application #:	09495821	Filing Dt:	02/01/2000
Title:	INTEGRATED SURFACE METROLOGY

Patent #:	6340602	Issue Dt:	01/22/2002	Application #:	09735286	Filing Dt:	12/11/2000
Title:	Method of measuring meso-scale structures on wafers

Patent #:	6510395	Issue Dt:	01/21/2003	Application #:	09800306	Filing Dt:	03/01/2001
Publication #:	US20020022936	Pub Dt:	02/21/2002
Title:	METHOD OF DETECTING RESIDUE ON A POLISHED WAFER

Patent #:	NONE	Issue Dt:		Application #:	09927102	Filing Dt:	08/10/2001
Publication #:	US20020018217	Pub Dt:	02/14/2002
Title:	Optical critical dimension metrology system integrated into semiconductor wafer process tool

Patent #:	6572456	Issue Dt:	06/03/2003	Application #:	09927142	Filing Dt:	08/10/2001
Publication #:	US20020065028	Pub Dt:	05/30/2002
Title:	BATHLESS WAFER MEASUREMENT APPARATUS AND METHOD

Patent #:	6667805	Issue Dt:	12/23/2003	Application #:	09932548	Filing Dt:	08/17/2001
Publication #:	US20020021441	Pub Dt:	02/21/2002
Title:	SMALL-SPOT SPECTROMETRY INSTRUMENT WITH REDUCED POLARIZATION

Patent #:	6677602	Issue Dt:	01/13/2004	Application #:	09932786	Filing Dt:	08/17/2001
Title:	NOTCH AND FLAT SENSOR FOR WAFER ALIGNMENT

Patent #:	6850333	Issue Dt:	02/01/2005	Application #:	09938415	Filing Dt:	08/23/2001
Title:	OPTIMIZED APERTURE SHAPE FOR OPTICAL CD/PROFILE METROLOGY

Patent #:	6623991	Issue Dt:	09/23/2003	Application #:	09999410	Filing Dt:	10/31/2001
Publication #:	US20020090743	Pub Dt:	07/11/2002
Title:	METHOD OF MEASURING MESO-SCALE STRUCTURES ON WAFERS

Patent #:	6806105	Issue Dt:	10/19/2004	Application #:	10621218	Filing Dt:	07/16/2003
Publication #:	US20040018653	Pub Dt:	01/29/2004
Title:	METHOD OF MEASURING MESO-SCALE STRUCTURES ON WAFERS

Patent #:	6829054	Issue Dt:	12/07/2004	Application #:	10654073	Filing Dt:	09/03/2003
Publication #:	US20040080757	Pub Dt:	04/29/2004
Title:	INTEGRATED SURFACE METROLOGY

Patent #:	7049633	Issue Dt:	05/23/2006	Application #:	10919718	Filing Dt:	08/17/2004
Publication #:	US20050057755	Pub Dt:	03/17/2005
Title:	METHOD OF MEASURING MESO-SCALE STRUCTURES ON WAFERS

Assignor

Exec Dt:

09/27/2005

Assignee

1250 RELIANCE WAY

FREMONT, CALIFORNIA 94539

Correspondence name and address
	STALLMAN & POLLOCK LLP
	ATTN: MICHAEL A. STALLMAN
	SUITE 2200
	353 SACRAMENTO STREET
	SAN FRANCISCO, CA 94111

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