Total properties:
36
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Patent #:
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Issue Dt:
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07/31/1984
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Application #:
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06390726
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Filing Dt:
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06/21/1982
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Title:
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SILICA SOL COMPOSITIONS FOR POLISHING SILICON WAFERS
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Patent #:
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Issue Dt:
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03/01/1988
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Application #:
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06628354
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Filing Dt:
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07/06/1984
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Title:
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SUBSTRATE CONTAINING FIBERS OR PREDETERMINED ORIENTATION AND PROCESS OF MAKING THE SAME
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Patent #:
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Issue Dt:
|
05/13/1986
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Application #:
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06736056
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Filing Dt:
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05/20/1985
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Title:
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AQUEOUS SILICA COMPOSITIONS FOR POLISHING SILICON WAFERS
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Patent #:
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Issue Dt:
|
05/22/1990
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Application #:
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06843881
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Filing Dt:
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03/25/1986
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Title:
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PAD MATERIAL FOR GRINDING, LAPPING AND POLISHING
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Patent #:
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Issue Dt:
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06/21/1988
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Application #:
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07050840
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Filing Dt:
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05/15/1987
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Title:
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CONCENTRATED LAPPING SLURRIES
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Patent #:
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Issue Dt:
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09/19/1989
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Application #:
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07242231
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Filing Dt:
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09/09/1988
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Title:
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LAPPING SLURRY COMPOSITIONS WITH IMPROVED LAP RATE
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Patent #:
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Issue Dt:
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06/27/1989
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Application #:
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07248335
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Filing Dt:
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09/20/1988
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Title:
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INVERTED CELL PAD MATERIAL FOR GRINDING, LAPPING, SHAPING AND POLISHING
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Patent #:
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Issue Dt:
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10/23/1990
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Application #:
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07291129
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Filing Dt:
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12/27/1988
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Title:
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CLEANING OF SILICON WAFERS WITH AN AQUEOUS SOLUTION OF KOH AND A NITROGEN-CONTAINING COMPOUND
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Patent #:
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Issue Dt:
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11/02/1993
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Application #:
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07829736
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Filing Dt:
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01/31/1992
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Title:
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APPARATUS FOR INTERLAYER PLANARIZATION OF SEMICONDUCTOR MATERIAL
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Patent #:
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Issue Dt:
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11/23/1993
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Application #:
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07874654
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Filing Dt:
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04/27/1992
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Title:
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COMPOSITIONS AND METHODS FOR POLISHING AND PLANARIZING SURFACES
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Patent #:
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Issue Dt:
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07/27/1993
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Application #:
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07932284
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Filing Dt:
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08/19/1992
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Title:
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LOW SODIUM, LOW METALS SILICA POLISHING SLURRIES
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Patent #:
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Issue Dt:
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01/30/1996
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Application #:
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08015609
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Filing Dt:
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02/09/1993
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Title:
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POLISHING APPARATUS AND METHOD USING A ROTARY WORK HOLDER TRAVELLING DOWN A RAIL FOR POLSHING A WORKPIECE WITH LINEAR PADS
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Patent #:
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Issue Dt:
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02/14/1995
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Application #:
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08095749
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Filing Dt:
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07/21/1993
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Title:
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0XIDE PARTICLES AND METHOD FOR PRODUCING THEM
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Patent #:
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Issue Dt:
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01/17/1995
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Application #:
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08116322
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Filing Dt:
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09/03/1993
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Title:
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ACTIVATED POLISHING COMPOSITIONS
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Patent #:
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Issue Dt:
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02/06/1996
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Application #:
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08224768
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Filing Dt:
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04/08/1994
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Title:
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POLISHING PADS AND METHODS FOR THEIR USE
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|
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Patent #:
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|
Issue Dt:
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07/09/1996
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Application #:
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08264289
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Filing Dt:
|
06/23/1994
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Title:
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A COMPOSITION FOR REDUCING OR ELIMINATING STATIC CHARG IN ADHESIVE FILM
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Patent #:
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|
Issue Dt:
|
11/26/1996
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Application #:
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08274134
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Filing Dt:
|
07/12/1994
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Title:
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POLYMERIC POLISHING PAD CONTAINING HOLLOW POLYMERIC MICROELEMENTS
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|
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Patent #:
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|
Issue Dt:
|
01/02/1996
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Application #:
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08301558
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Filing Dt:
|
09/06/1994
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Title:
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ACTIVATED POLISHING COMPOSITIONS
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|
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Patent #:
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|
Issue Dt:
|
02/25/1997
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Application #:
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08517578
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Filing Dt:
|
08/21/1995
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Title:
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POLISHING PADS AND METHODS FOR THEIR USE
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|
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Patent #:
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|
Issue Dt:
|
12/02/1997
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Application #:
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08541898
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Filing Dt:
|
10/10/1995
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Title:
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POLISHING SLURRIES COMPRISING TWO ABRASIVE COMPONENTS AND METHOD FOR THEIR USE
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|
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Patent #:
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|
Issue Dt:
|
06/23/1998
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Application #:
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08608287
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Filing Dt:
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02/28/1996
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Title:
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COMPOSITIONS AND METHODS FOR POLISHING SILICA, SILICATES, AND SILICON NITRIDE
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|
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Patent #:
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|
Issue Dt:
|
01/19/1999
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Application #:
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08758064
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Filing Dt:
|
11/27/1996
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Title:
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POLISHING SILICON WAFERS WITH IMPROVED POLISHING SLURRIES
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|
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Patent #:
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|
Issue Dt:
|
01/25/2000
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Application #:
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08782717
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Filing Dt:
|
01/13/1997
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Title:
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METHODS FOR USING POLISHING PADS
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|
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Patent #:
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|
Issue Dt:
|
04/14/1998
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Application #:
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08802829
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Filing Dt:
|
02/19/1997
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Title:
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COMPOSITION AND METHOD FOR POLISHING A COMPOSITE OF SILICA AND SILICON NITRIDE
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|
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Patent #:
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|
Issue Dt:
|
08/22/2000
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Application #:
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08814514
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Filing Dt:
|
03/10/1997
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Title:
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METHOD OF MAKING POLISHING PADS
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|
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Patent #:
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|
Issue Dt:
|
05/26/1998
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Application #:
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08819236
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Filing Dt:
|
03/17/1997
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Title:
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COMPOSITION AND METHOD FOR POLISHING A COMPOSITE COMPRISING TITANIUM
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|
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Patent #:
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|
Issue Dt:
|
12/14/1999
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Application #:
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08859132
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Filing Dt:
|
05/20/1997
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Title:
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METHOD FOR POLISHING A COMPOSITE COMPRISING AN INSULATOR, A METAL, AND TITANIUM
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|
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Patent #:
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|
Issue Dt:
|
06/23/1998
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Application #:
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08889338
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Filing Dt:
|
07/08/1997
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Title:
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COMPOSITION AND METHOD FOR POLISHING A COMPOSITE COMPRISING TITANIUM
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|
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Patent #:
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|
Issue Dt:
|
08/03/1999
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Application #:
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08912144
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Filing Dt:
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08/15/1997
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Title:
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APPARATUS AND METHODS FOR RECIRCULATING CHEMICAL-MECHANICAL POLISHING OF SEMICONDUCTOR WAFERS
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|
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Patent #:
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|
Issue Dt:
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06/13/2000
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Application #:
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08915775
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Filing Dt:
|
08/21/1997
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Title:
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METHOD FOR PHOTOELECTROCHEMICAL POLISHING OF SILICON WAFERS
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|
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Patent #:
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|
Issue Dt:
|
05/04/1999
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Application #:
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08954979
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Filing Dt:
|
10/20/1997
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Title:
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METHOD FOR PLANARIZING A SEMICONDUCTOR DEVICE SURFACE WITH POLYMERIC PAD CONTAINING HOLLOW POLYMERIC MICROELEMENTS
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|
|
Patent #:
|
|
Issue Dt:
|
03/14/2000
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Application #:
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09005708
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Filing Dt:
|
01/12/1998
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Title:
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POLYMERIC POLISHING PAD HAVING PHOTOLITHOGRAPHICALLY INDUCED SURFACE PATTERNS(S) AND METHODS RELATING THERETO
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|
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Patent #:
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|
Issue Dt:
|
02/08/2000
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Application #:
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09021437
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Filing Dt:
|
02/10/1998
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Title:
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POLISHING PAD AND METHODS RELATING THERETO
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|
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Patent #:
|
|
Issue Dt:
|
03/28/2000
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Application #:
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09037668
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Filing Dt:
|
03/10/1998
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Title:
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COMPOSITION FOR POLISHING A COMPOSITE OF SILICA AND SILICON NITRIDE
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|
|
Patent #:
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|
Issue Dt:
|
08/08/2000
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Application #:
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09049864
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Filing Dt:
|
03/27/1998
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Title:
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POLISHING SYSTEM HAVING A MULTI-PHASE POLISHING SUBSTRATE AND METHODS RELATING THERETO
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|
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Patent #:
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|
Issue Dt:
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10/17/2000
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Application #:
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09071566
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Filing Dt:
|
05/01/1998
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Title:
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COMPOSITION AND METHOD FOR POLISHING A COMPOSITE OF SILICA AND SILICON NITRIDE
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