Patent Assignment Details
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| Reel/Frame: | 015818/0674 | |
| Pages: | 2 |
| | Recorded: | 09/20/2004 | | |
| Attorney Dkt #: | NEC0258US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10945375
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Filing Dt:
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09/20/2004
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Publication #:
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Pub Dt:
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03/23/2006
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Title:
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CMP process endpoint detection method by monitoring and analyzing vibration data
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Assignee
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| 2880 SCOTT BOULEVARD |
| SANTA CLARA, CALIFORNIA 95050-2554 |
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Correspondence name and address
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CAMPBELL STEPHENSON ASCOLESE LLP
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ERIC A. STEPHENSON
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4807 SPICEWOOD SPRINGS ROAD
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BUILDING 4, SUITE 201
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AUSTIN, TX 78759
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