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Total properties:
29
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Patent #:
|
|
Issue Dt:
|
03/31/1992
|
Application #:
|
07660552
|
Filing Dt:
|
02/22/1991
|
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Title:
|
FLOW DIVIDING STRUCTURE OF MASS FLOW CONTROLLER
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|
|
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Patent #:
|
|
Issue Dt:
|
10/12/1993
|
Application #:
|
08008638
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Filing Dt:
|
01/25/1993
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|
Title:
|
FLUID FLOW CONTROL VALVE AND VALVE DISK
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|
|
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Patent #:
|
|
Issue Dt:
|
05/16/2000
|
Application #:
|
08799304
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Filing Dt:
|
02/11/1997
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|
Title:
|
MICRO MASS FLOW CONTROL APPARATUS AND METHOD
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|
|
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Patent #:
|
|
Issue Dt:
|
11/23/1999
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Application #:
|
08980246
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Filing Dt:
|
11/28/1997
|
|
Title:
|
FLOW CONTROL VALVE UTILIZING SONIC NOZZLE
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|
|
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Patent #:
|
|
Issue Dt:
|
10/19/1999
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Application #:
|
08982583
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Filing Dt:
|
12/02/1997
|
|
Title:
|
FLUID CONTROL APPARATUS
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|
|
|
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Patent #:
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|
Issue Dt:
|
12/28/1999
|
Application #:
|
09222287
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Filing Dt:
|
12/28/1998
|
|
Title:
|
VAPORIZER IN A LIQUID MATERIAL VAPORIZING AND FEEDING APPARATUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
05/29/2001
|
Application #:
|
09579751
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Filing Dt:
|
05/26/2000
|
|
Title:
|
Exhauster pressure control system
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/15/2001
|
Application #:
|
09607301
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Filing Dt:
|
06/30/2000
|
|
Title:
|
Valve closure seating method and apparatus
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/12/2003
|
Application #:
|
10266815
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Filing Dt:
|
10/08/2002
|
|
Title:
|
LIQUID MATERIAL VAPORIZING AND FEEDING APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/08/2008
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Application #:
|
10985775
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Filing Dt:
|
11/10/2004
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|
Publication #:
|
|
Pub Dt:
|
06/01/2006
| | | | |
|
Title:
|
REACTIVE LOAD RESONANT DRIVE CIRCUIT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/01/2008
|
Application #:
|
11177814
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Filing Dt:
|
07/08/2005
|
|
Publication #:
|
|
Pub Dt:
|
01/11/2007
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR DRIVING AN INDUSTRIAL CONTROL DEVICE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/05/2011
|
Application #:
|
11407837
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Filing Dt:
|
04/20/2006
|
|
Publication #:
|
|
Pub Dt:
|
10/25/2007
| | | | |
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Title:
|
FLOW CONTROLLER DELIVERY OF A SPECIFIED-QUANTITY OF A FLUID
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/13/2009
|
Application #:
|
11413780
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Filing Dt:
|
04/28/2006
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|
Publication #:
|
|
Pub Dt:
|
11/29/2007
| | | | |
|
Title:
|
ADAPTIVE RESPONSE TIME CLOSED LOOP CONTROL ALGORITHM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/29/2009
|
Application #:
|
11481228
|
Filing Dt:
|
07/05/2006
|
|
Publication #:
|
|
Pub Dt:
|
01/10/2008
| | | | |
|
Title:
|
MULTI-MODE CONTROL ALGORITHM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/26/2010
|
Application #:
|
11680785
|
Filing Dt:
|
03/01/2007
|
|
Publication #:
|
|
Pub Dt:
|
09/04/2008
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR MEASURING THE TEMPERATURE OF A GAS IN A MASS FLOW CONTROLLER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2010
|
Application #:
|
11994696
|
Filing Dt:
|
06/12/2008
|
|
Publication #:
|
|
Pub Dt:
|
10/30/2008
| | | | |
|
Title:
|
EXHAUST APPARATUS PRESSURE CONTROL SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/06/2009
|
Application #:
|
12118886
|
Filing Dt:
|
05/12/2008
|
|
Publication #:
|
|
Pub Dt:
|
09/04/2008
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR DRIVING AN INDUSTRIAL CONTROL DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2010
|
Application #:
|
12238879
|
Filing Dt:
|
09/26/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/01/2010
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR OPERATING A MASS FLOW CONTROLLER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/05/2011
|
Application #:
|
12250205
|
Filing Dt:
|
10/13/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/15/2010
| | | | |
|
Title:
|
MASS FLOW CONTROLLER HAVING A FIRST PAIR OF THERMAL SENSING ELEMENTS OPPOSING A SECOND PAIR OF THERMAL SENSING ELEMENTS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/18/2014
|
Application #:
|
12356661
|
Filing Dt:
|
01/21/2009
|
|
Publication #:
|
|
Pub Dt:
|
07/22/2010
| | | | |
|
Title:
|
MASS FLOW CONTROLLER HYSTERESIS COMPENSATION SYSTEM & METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/12/2012
|
Application #:
|
12494970
|
Filing Dt:
|
06/30/2009
|
|
Publication #:
|
|
Pub Dt:
|
12/30/2010
| | | | |
|
Title:
|
THERMAL FLOW SENSOR WITH ZERO DRIFT COMPENSATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/17/2012
|
Application #:
|
12502918
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Filing Dt:
|
07/14/2009
|
|
Publication #:
|
|
Pub Dt:
|
01/20/2011
| | | | |
|
Title:
|
THERMAL MASS FLOW SENSOR WITH IMPROVED RESPONSE ACROSS FLUID TYPES
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12540055
|
Filing Dt:
|
08/12/2009
|
|
Publication #:
|
|
Pub Dt:
|
07/01/2010
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR MONITORING CONTROL STATUS OF AN EXHAUST APPARATUS PRESSURE CONTROL SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/05/2012
|
Application #:
|
12549142
|
Filing Dt:
|
08/27/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/03/2011
| | | | |
|
Title:
|
MULTI-MODE CONTROL LOOP WITH IMPROVED PERFORMANCE FOR MASS FLOW CONTROLLER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/28/2012
|
Application #:
|
12561834
|
Filing Dt:
|
09/17/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/17/2011
| | | | |
|
Title:
|
TEMPERATURE INSENSTIVE MASS FLOW CONTROLLER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/06/2013
|
Application #:
|
12757574
|
Filing Dt:
|
04/09/2010
|
|
Publication #:
|
|
Pub Dt:
|
10/13/2011
| | | | |
|
Title:
|
MASS FLOW CONTROLLER WITH ENHANCED OPERATING RANGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/06/2013
|
Application #:
|
12757582
|
Filing Dt:
|
04/09/2010
|
|
Publication #:
|
|
Pub Dt:
|
10/13/2011
| | | | |
|
Title:
|
METHOD AND MASS FLOW CONTROLLER FOR ENHANCED OPERATING RANGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2012
|
Application #:
|
12768583
|
Filing Dt:
|
04/27/2010
|
|
Publication #:
|
|
Pub Dt:
|
10/27/2011
| | | | |
|
Title:
|
METHOD AND SYSTEM OF ON-TOOL AND ON-SITE MFC OPTIMIZATION PROVIDING CONSISTENT RESPONSE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/06/2012
|
Application #:
|
12797753
|
Filing Dt:
|
06/10/2010
|
|
Publication #:
|
|
Pub Dt:
|
12/15/2011
| | | | |
|
Title:
|
ADAPTIVE ON-TOOL MASS FLOW CONTROLLER TUNING
|
|
