Patent Assignment Details
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| Reel/Frame: | 038035/0675 | |
| Pages: | 11 |
| | Recorded: | 03/18/2016 | | |
| Attorney Dkt #: | KLAP126US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/22/2017
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Application #:
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14161398
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Filing Dt:
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01/22/2014
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Publication #:
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Pub Dt:
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07/23/2015
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Title:
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SYMMETRIC TARGET DESIGN IN SCATTEROMETRY OVERLAY METROLOGY
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Assignee
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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KLA-TENCOR CORPORATION AND SIMPSON & SIM
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5555 MAIN STREET
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WILLIAMSVILLE, NY 14221
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