Patent Assignment Details
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Reel/Frame: | 056647/0679 | |
| Pages: | 8 |
| | Recorded: | 06/22/2021 | | |
Attorney Dkt #: | 2857.7840003 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/28/2024
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Application #:
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17029845
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Filing Dt:
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09/23/2020
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Publication #:
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Pub Dt:
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04/01/2021
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Title:
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Lithographic Apparatus, Metrology Systems, Phased Array Illumination Sources and Methods thereof
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Assignee
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P.O. BOX 324 |
VELDHOVEN, NETHERLANDS 5500 AH |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, DC 20005
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06/07/2024 01:33 AM
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