Patent Assignment Details
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| Reel/Frame: | 012473/0680 | |
| Pages: | 3 |
| | Recorded: | 01/14/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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10043145
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Filing Dt:
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01/14/2002
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Publication #:
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Pub Dt:
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07/31/2003
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Title:
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METHOD FOR ELIMINATING POLYSILICON RESIDUE BY FULLY CONVERT THE POLYSILICON INTO SILICON DIOXIDE
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Assignee
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 16, LI HSIN ROAD |
| HSINCHU, TAIWAN R.O.C |
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Correspondence name and address
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LOWE HAUPTMAN GILMAN & BERNER
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BENJAMIN J. HAUPTMAN
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1700 DIAGONAL ROAD, SUITE 310
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ALEXANDRIA, VIRGINIA 22314
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