Patent Assignment Details
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| Reel/Frame: | 031363/0688 | |
| Pages: | 3 |
| | Recorded: | 10/08/2013 | | |
| Attorney Dkt #: | LAM2P771 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14032165
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Filing Dt:
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09/19/2013
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Publication #:
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Pub Dt:
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01/22/2015
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Title:
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Systems and Methods for In-Situ Wafer Edge and Backside Plasma Cleaning
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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KENNETH D. WRIGHT
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710 LAKEWAY DRIVE
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SUITE 200
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SUNNYVALE, CA 94085
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