Patent Assignment Details
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| Reel/Frame: | 014273/0689 | |
| Pages: | 2 |
| | Recorded: | 01/14/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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10300898
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Filing Dt:
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11/21/2002
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Publication #:
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Pub Dt:
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05/27/2004
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Title:
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METHOD AND APPARATUS FOR ISOLATING LIGHT SOURCE GAS FROM MAIN CHAMBER GAS IN A LITHOGRAPHY TOOL
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Assignee
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX PLLC
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, DC 20005
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