Total properties:
28
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Patent #:
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Issue Dt:
|
07/05/2005
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Application #:
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10103015
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Filing Dt:
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03/22/2002
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Publication #:
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Pub Dt:
|
09/25/2003
| | | | |
Title:
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APPARATUS AND METHOD FOR ELECTROLESS DEPOSITION OF MATERIALS ON SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
|
01/25/2005
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Application #:
|
10242331
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Filing Dt:
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09/13/2002
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Publication #:
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Pub Dt:
|
03/18/2004
| | | | |
Title:
|
METHOD AND APPARATUS FOR ELECTROLESS DEPOSITION WITH TEMPERATURE-CONTROLLED CHUCK
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Patent #:
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|
Issue Dt:
|
06/21/2005
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Application #:
|
10247895
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Filing Dt:
|
09/20/2002
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Publication #:
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Pub Dt:
|
05/06/2004
| | | | |
Title:
|
TEMPERATURE-CONTROLLED SUBSTRATE HOLDER FOR PROCESSING IN FLUIDS
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Patent #:
|
|
Issue Dt:
|
09/06/2005
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Application #:
|
10299069
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Filing Dt:
|
11/19/2002
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Publication #:
|
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Pub Dt:
|
05/20/2004
| | | | |
Title:
|
SPATIALLY-ARRANGED CHEMICAL PROCESSING STATION
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Patent #:
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|
Issue Dt:
|
06/26/2007
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Application #:
|
10299070
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Filing Dt:
|
11/19/2002
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Publication #:
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Pub Dt:
|
05/20/2004
| | | | |
Title:
|
Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growth
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Patent #:
|
|
Issue Dt:
|
06/28/2005
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Application #:
|
10339260
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Filing Dt:
|
01/10/2003
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Publication #:
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Pub Dt:
|
07/15/2004
| | | | |
Title:
|
SOLUTION COMPOSITION AND METHOD FOR ELECTROLESS DEPOSITION OF COATINGS FREE OF ALKALI METALS
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|
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Patent #:
|
|
Issue Dt:
|
09/21/2004
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Application #:
|
10345134
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Filing Dt:
|
05/05/2003
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Title:
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METHOD FOR ELECTROLESS DEPOSITION OF PHOSPHORUS-CONTAINING METAL FILMS ONTO COPPER WITH PALLADIUM-FREE ACTIVATION
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|
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Patent #:
|
|
Issue Dt:
|
08/30/2005
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Application #:
|
10369878
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Filing Dt:
|
02/21/2003
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Publication #:
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|
Pub Dt:
|
08/26/2004
| | | | |
Title:
|
UNIVERSAL SUBSTRATE HOLDER FOR TREATING OBJECTS IN FLUIDS
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|
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Patent #:
|
|
Issue Dt:
|
06/07/2005
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Application #:
|
10379692
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Filing Dt:
|
03/06/2003
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Publication #:
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Pub Dt:
|
09/09/2004
| | | | |
Title:
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ACTIVATION-FREE ELECTROLESS SOLUTION FOR DEPOSITION OF COBALT AND METHOD FOR DEPOSITION OF COBALT CAPPING/PASSIVATION LAYER ON COPPER
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|
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Patent #:
|
|
Issue Dt:
|
04/19/2005
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Application #:
|
10462167
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Filing Dt:
|
06/16/2003
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Publication #:
|
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Pub Dt:
|
12/16/2004
| | | | |
Title:
|
METHODS AND SYSTEM FOR PROCESSING A MICROELECTRONIC TOPOGRAPHY
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|
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Patent #:
|
|
Issue Dt:
|
03/01/2005
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Application #:
|
10462180
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Filing Dt:
|
06/16/2003
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Publication #:
|
|
Pub Dt:
|
12/16/2004
| | | | |
Title:
|
MICROELECTRONIC FABRICATION SYSTEM COMPONENTS AND METHOD FOR PROCESSING A WAFER USING SUCH COMPONENTS
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|
|
Patent #:
|
|
Issue Dt:
|
02/08/2011
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Application #:
|
10462343
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Filing Dt:
|
06/16/2003
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Publication #:
|
|
Pub Dt:
|
12/16/2004
| | | | |
Title:
|
METHOD FOR STRENGTHENING ADHESION BETWEEN DIELECTRIC LAYERS FORMED ADJACENT TO METAL LAYERS
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10624397
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Filing Dt:
|
07/22/2003
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Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
Title:
|
Multi-staged heating system for fabricating microelectronic devices
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|
|
Patent #:
|
|
Issue Dt:
|
01/26/2010
|
Application #:
|
11034363
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Filing Dt:
|
01/10/2005
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Publication #:
|
|
Pub Dt:
|
07/28/2005
| | | | |
Title:
|
MICROELECTRONIC FABRICATION SYSTEM COMPONENTS AND METHOD FOR PROCESSING A WAFER USING SUCH COMPONENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/01/2008
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Application #:
|
11102143
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Filing Dt:
|
04/08/2005
|
Publication #:
|
|
Pub Dt:
|
08/18/2005
| | | | |
Title:
|
METHODS AND SYSTEMS FOR PROCESSING A MICROELECTRONIC TOPOGRAPHY
|
|
|
Patent #:
|
|
Issue Dt:
|
08/23/2011
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Application #:
|
11108589
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Filing Dt:
|
04/18/2005
|
Publication #:
|
|
Pub Dt:
|
08/18/2005
| | | | |
Title:
|
METHODS AND SYSTEMS FOR PROCESSING A MICROELECTRONIC TOPOGRAPHY
|
|
|
Patent #:
|
|
Issue Dt:
|
03/06/2012
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Application #:
|
11138531
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Filing Dt:
|
05/26/2005
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Publication #:
|
|
Pub Dt:
|
10/06/2005
| | | | |
Title:
|
APPARATUS AND METHOD FOR ELECTROLESS DEPOSITION OF MATERIALS ON SEMICONDUCTOR SUBSTRATES
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11199620
|
Filing Dt:
|
08/09/2005
|
Publication #:
|
|
Pub Dt:
|
02/09/2006
| | | | |
Title:
|
Methods for forming a barrier layer with periodic concentrations of elements and structures resulting therefrom
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|
|
Patent #:
|
|
Issue Dt:
|
05/11/2010
|
Application #:
|
11199621
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Filing Dt:
|
08/09/2005
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Publication #:
|
|
Pub Dt:
|
02/09/2006
| | | | |
Title:
|
BARRIER LAYER CONFIGURATIONS AND METHODS FOR PROCESSING MICROELECTRONIC TOPOGRAPHIES HAVING BARRIER LAYERS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/22/2009
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Application #:
|
11199657
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Filing Dt:
|
08/09/2005
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Publication #:
|
|
Pub Dt:
|
02/09/2006
| | | | |
Title:
|
APPARATUS CONFIGURATIONS FOR AFFECTING MOVEMENT OF FLUIDS WITHIN A MICROELECTRONIC TOPOGRAPHY PROCESSING CHAMBER
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|
|
Patent #:
|
|
Issue Dt:
|
08/24/2010
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Application #:
|
11200324
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Filing Dt:
|
08/09/2005
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Publication #:
|
|
Pub Dt:
|
02/09/2006
| | | | |
Title:
|
SYSTEMS AND METHODS AFFECTING PROFILES OF SOLUTIONS DISPENSED ACROSS MICROELECTRONIC TOPOGRAPHIES DURING ELECTROLESS PLATING PROCESSES
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
11217750
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Filing Dt:
|
09/01/2005
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Publication #:
|
|
Pub Dt:
|
03/08/2007
| | | | |
Title:
|
Spatially-arranged chemical processing station
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11276728
|
Filing Dt:
|
03/11/2006
|
Publication #:
|
|
Pub Dt:
|
11/26/2009
| | | | |
Title:
|
NON-CORROSIVE CHEMICAL RINSE SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
01/19/2010
|
Application #:
|
11533042
|
Filing Dt:
|
09/19/2006
|
Publication #:
|
|
Pub Dt:
|
01/18/2007
| | | | |
Title:
|
METHOD OF ELECTROLESS DEPOSITION OF THIN METAL AND DIELECTRIC FILMS WITH TEMPERATURE CONTROLLED STAGES OF FILM GROWTH
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/2010
|
Application #:
|
11536429
|
Filing Dt:
|
09/28/2006
|
Title:
|
SYSTEMS INCORPORATING MICROWAVE HEATERS WITHIN FLUID SUPPLY LINES OF SUBSTRATE PROCESSING CHAMBERS AND METHODS FOR USE OF SUCH SYSTEMS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/29/2011
|
Application #:
|
11537643
|
Filing Dt:
|
09/30/2006
|
Publication #:
|
|
Pub Dt:
|
11/26/2009
| | | | |
Title:
|
ELECTROLESS DEPOSITION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/05/2011
|
Application #:
|
11549644
|
Filing Dt:
|
10/14/2006
|
Publication #:
|
|
Pub Dt:
|
10/08/2009
| | | | |
Title:
|
ELECTROLESS PLATING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/24/2010
|
Application #:
|
11563199
|
Filing Dt:
|
11/25/2006
|
Publication #:
|
|
Pub Dt:
|
11/26/2009
| | | | |
Title:
|
ELECTROLESS DEPOSITION CHEMICAL SYSTEM LIMITING STRONGLY ADSORBED SPECIES
|
|