Patent Assignment Details
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| Reel/Frame: | 018659/0691 | |
| Pages: | 3 |
| | Recorded: | 12/04/2006 | | |
| Attorney Dkt #: | 8947-000190/US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/12/2010
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Application #:
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11526802
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Filing Dt:
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09/26/2006
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Publication #:
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Pub Dt:
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03/29/2007
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Title:
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ELECTROSTATIC CHUCK WITH TEMPERATURE SENSING UNIT, EXPOSURE EQUIPMENT HAVING THE SAME, AND METHOD OF DETECTING TEMPERATURE FROM PHOTOMASK
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Assignee
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| 416, MAETAN-DONG, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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HARNESS, DICKEY & PIERCE, P.L.C.
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P.O. BOX 8910
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RESTON, VA 20195
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