Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 033543/0697 | |
| Pages: | 8 |
| | Recorded: | 08/14/2014 | | |
| Attorney Dkt #: | 509265/1858 |
| Conveyance: | SECURITY INTEREST |
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Total properties:
2
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Patent #:
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Issue Dt:
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08/10/2010
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Application #:
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10991554
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Filing Dt:
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11/18/2004
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Publication #:
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Pub Dt:
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05/18/2006
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Title:
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SYSTEMS AND METHODS FOR ACHIEVING ISOTHERMAL BATCH PROCESSING OF SUBSTRATES USED FOR THE PRODUCTION OF MICRO-ELECTRO-MECHANICAL-SYSTEMS
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Patent #:
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Issue Dt:
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10/07/2008
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Application #:
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11370541
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Filing Dt:
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03/08/2006
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Publication #:
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Pub Dt:
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09/21/2006
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Title:
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SELECTIVE ETCHING OF OXIDES FROM SUBSTRATES
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Assignee
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| 10 S. DEARBORN, 7TH FLOOR |
| CHICAGO, ILLINOIS 60603 |
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Correspondence name and address
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SAMANTHA J. HIMELMAN, ESQ.
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SIMPSON THACHER & BARTLETT LLP
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425 LEXINGTON AVENUE
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NEW YORK, NY 10017
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