Total properties:
40
|
|
Patent #:
|
|
Issue Dt:
|
02/25/1986
|
Application #:
|
06611522
|
Filing Dt:
|
05/17/1984
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Title:
|
CENTRIFUGAL WAFER PROCESSOR
|
|
|
Patent #:
|
|
Issue Dt:
|
02/14/1989
|
Application #:
|
07043852
|
Filing Dt:
|
04/29/1987
|
Title:
|
CLEANING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/26/1989
|
Application #:
|
07144515
|
Filing Dt:
|
01/15/1988
|
Title:
|
MEGASONIC CLEANING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/08/1989
|
Application #:
|
07197867
|
Filing Dt:
|
05/24/1988
|
Title:
|
APPARATUS FOR TREATING WAFERS UTILIZING MEGASONIC ENERGY
|
|
|
Patent #:
|
|
Issue Dt:
|
03/12/1991
|
Application #:
|
07272501
|
Filing Dt:
|
11/16/1988
|
Title:
|
MEGASONIC CLEANING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/06/1991
|
Application #:
|
07482086
|
Filing Dt:
|
02/15/1990
|
Title:
|
MEGASONIC CLEANING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
02/25/1992
|
Application #:
|
07598426
|
Filing Dt:
|
10/16/1990
|
Title:
|
SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/22/1992
|
Application #:
|
07598909
|
Filing Dt:
|
10/16/1990
|
Title:
|
SINGLE CHAMBER MEGASONIC ENERGY CLEANER
|
|
|
Patent #:
|
|
Issue Dt:
|
02/15/1994
|
Application #:
|
07809799
|
Filing Dt:
|
12/18/1991
|
Title:
|
SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSENG SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/22/1994
|
Application #:
|
08042889
|
Filing Dt:
|
04/05/1993
|
Title:
|
MEGASONIC TRANSDUCER ASSEMBLY
|
|
|
Patent #:
|
|
Issue Dt:
|
07/30/1996
|
Application #:
|
08213599
|
Filing Dt:
|
03/16/1994
|
Title:
|
CONTINUOUS FLOW VAPOR DRYER SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/17/1996
|
Application #:
|
08275807
|
Filing Dt:
|
07/15/1994
|
Title:
|
METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/09/1996
|
Application #:
|
08316940
|
Filing Dt:
|
10/03/1994
|
Title:
|
MEGASONIC CLEANING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/12/1997
|
Application #:
|
08361139
|
Filing Dt:
|
12/21/1994
|
Title:
|
SEMICONDUCTOR WAFER CLEANING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
03/21/2000
|
Application #:
|
08724518
|
Filing Dt:
|
09/30/1996
|
Title:
|
WAFER CLEANING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/01/1999
|
Application #:
|
08908330
|
Filing Dt:
|
08/07/1997
|
Title:
|
SEMICONDUCTOR WAFER CLEANING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/1999
|
Application #:
|
08908345
|
Filing Dt:
|
08/07/1997
|
Title:
|
SEMICONDUCTOR WAFER CLEANING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/14/1999
|
Application #:
|
08910033
|
Filing Dt:
|
08/11/1997
|
Title:
|
SEMICONDUCTOR WAFER CLEANING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/03/2000
|
Application #:
|
09040176
|
Filing Dt:
|
03/17/1998
|
Title:
|
GAS SEAL AND SUPPORT FOR ROTATING SEMICONDUCTOR PROCESSOR
|
|
|
Patent #:
|
|
Issue Dt:
|
10/31/2000
|
Application #:
|
09057182
|
Filing Dt:
|
04/08/1998
|
Title:
|
WAFER CLEANING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/26/2000
|
Application #:
|
09103930
|
Filing Dt:
|
06/24/1998
|
Title:
|
CENTRIFUGAL WAFER PROCESSOR AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
12/12/2000
|
Application #:
|
09358568
|
Filing Dt:
|
07/20/1999
|
Title:
|
SEMICONDUCTOR WAFER CLEANING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
10/02/2001
|
Application #:
|
09643328
|
Filing Dt:
|
08/22/2000
|
Title:
|
WAFER CLEANING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
04/30/2002
|
Application #:
|
09694938
|
Filing Dt:
|
10/23/2000
|
Title:
|
SEMICONDUCTOR WAFER CLEANING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2004
|
Application #:
|
09906384
|
Filing Dt:
|
07/16/2001
|
Publication #:
|
|
Pub Dt:
|
01/23/2003
| | | | |
Title:
|
MEGASONIC CLEANER PROBE SYSTEM WITH GASIFIED FLUID
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09916357
|
Filing Dt:
|
07/27/2001
|
Publication #:
|
|
Pub Dt:
|
07/04/2002
| | | | |
Title:
|
Small parts cleaner
|
|
|
Patent #:
|
|
Issue Dt:
|
01/20/2004
|
Application #:
|
09922509
|
Filing Dt:
|
08/03/2001
|
Publication #:
|
|
Pub Dt:
|
02/06/2003
| | | | |
Title:
|
MEGASONIC PROBE ENERGY ATTENUATOR
|
|
|
Patent #:
|
|
Issue Dt:
|
12/31/2002
|
Application #:
|
09937013
|
Filing Dt:
|
01/25/2002
|
Title:
|
SUN PROTECTION AGENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/15/2002
|
Application #:
|
09953504
|
Filing Dt:
|
09/13/2001
|
Publication #:
|
|
Pub Dt:
|
01/31/2002
| | | | |
Title:
|
WAFER CLEANING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
10/30/2007
|
Application #:
|
10059682
|
Filing Dt:
|
01/29/2002
|
Publication #:
|
|
Pub Dt:
|
07/31/2003
| | | | |
Title:
|
MEGASONIC PROBE ENERGY DIRECTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
03/06/2007
|
Application #:
|
10140029
|
Filing Dt:
|
05/06/2002
|
Publication #:
|
|
Pub Dt:
|
11/06/2003
| | | | |
Title:
|
RECIPROCATING MEGASONIC PROBE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/29/2004
|
Application #:
|
10171426
|
Filing Dt:
|
06/12/2002
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
MEGASONIC CLEANER AND DRYER
|
|
|
Patent #:
|
|
Issue Dt:
|
08/02/2005
|
Application #:
|
10171429
|
Filing Dt:
|
06/12/2002
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
STACKABLE PROCESS CHAMBERS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/2005
|
Application #:
|
10171430
|
Filing Dt:
|
06/12/2002
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
MEGASONIC CLEANER AND DRYER SYSTEM
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10171431
|
Filing Dt:
|
06/12/2002
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
Method of applying liquid to a megasonic apparatus for improved cleaning control
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10171494
|
Filing Dt:
|
06/12/2002
|
Publication #:
|
|
Pub Dt:
|
02/05/2004
| | | | |
Title:
|
Megasonic cleaner and dryer system
|
|
|
Patent #:
|
|
Issue Dt:
|
01/27/2004
|
Application #:
|
10243463
|
Filing Dt:
|
09/12/2002
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
Title:
|
WAFER CLEANING
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2004
|
Application #:
|
10243486
|
Filing Dt:
|
09/12/2002
|
Publication #:
|
|
Pub Dt:
|
01/23/2003
| | | | |
Title:
|
WAFER CLEANING
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2004
|
Application #:
|
10243486
|
Filing Dt:
|
09/12/2002
|
Publication #:
|
|
Pub Dt:
|
01/23/2003
| | | | |
Title:
|
WAFER CLEANING
|
|
|
Patent #:
|
|
Issue Dt:
|
09/12/2006
|
Application #:
|
10341425
|
Filing Dt:
|
01/10/2003
|
Publication #:
|
|
Pub Dt:
|
07/15/2004
| | | | |
Title:
|
MEGASONIC CLEANING SYSTEM WITH BUFFERED CAVITATION METHOD
|
|