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Reel/Frame:021453/0699   Pages: 3
Recorded: 08/28/2008
Attorney Dkt #:4913-0005
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
12090928
Filing Dt:
08/28/2008
Publication #:
Pub Dt:
06/18/2009
Title:
Adaptively Coupled Plasma Source Having Uniform Magnetic Field Distribution and Plasma Chamber Having the Same
Assignor
1
Exec Dt:
08/26/2008
Assignee
1
352-1 ICHI-RI, MAJANG-MYEON, ICHEON-SI
GYEONGGI-DO, KOREA, REPUBLIC OF 467-813
Correspondence name and address
MORGAN & FINNEGAN LLP
THREE WORLD FINANCIAL CENTER
NEW YORK, NY 10281-2101

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