Patent Assignment Details
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Reel/Frame: | 021453/0699 | |
| Pages: | 3 |
| | Recorded: | 08/28/2008 | | |
Attorney Dkt #: | 4913-0005 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12090928
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Filing Dt:
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08/28/2008
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Publication #:
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Pub Dt:
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06/18/2009
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Title:
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Adaptively Coupled Plasma Source Having Uniform Magnetic Field Distribution and Plasma Chamber Having the Same
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Assignee
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352-1 ICHI-RI, MAJANG-MYEON, ICHEON-SI |
GYEONGGI-DO, KOREA, REPUBLIC OF 467-813 |
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Correspondence name and address
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MORGAN & FINNEGAN LLP
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THREE WORLD FINANCIAL CENTER
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NEW YORK, NY 10281-2101
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06/03/2024 01:42 AM
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