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Reel/Frame:048688/0701   Pages: 7
Recorded: 03/25/2019
Attorney Dkt #:201600098 WO US
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
02/16/2021
Application #:
16098728
Filing Dt:
11/02/2018
Publication #:
Pub Dt:
05/09/2019
Title:
HYDROGENATED ISOTOPICALLY ENRICHED BORONT TRIFLUORIDE DOPANT SOURCE GAS COMPOSITION
Assignors
1
Exec Dt:
03/31/2016
2
Exec Dt:
06/21/2016
3
Exec Dt:
03/30/2016
4
Exec Dt:
05/26/2016
5
Exec Dt:
04/01/2016
Assignee
1
129 CONCORD ROAD
BILLERICA, MASSACHUSETTS 01821
Correspondence name and address
ENTEGRIS, INC.
129 CONCORD ROAD
BILLERICA, MA 01821

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