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04/06/2006
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04/28/2009
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10/24/2005
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11/23/2006
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10/23/2007
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01/19/2006
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05/19/2009
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08/20/2004
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01/12/2006
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11/24/2009
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11/08/2004
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09/15/2005
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Title:
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05/06/2008
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04/29/2005
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11/03/2005
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04/22/2014
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10/09/2008
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03/29/2011
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03/20/2008
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02/05/2013
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06/04/2009
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10/28/2010
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03/22/2011
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09/25/2008
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06/14/2011
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09/04/2008
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09/27/2011
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08/27/2009
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12/01/2009
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12/04/2008
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04/22/2010
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09/15/2015
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06/10/2010
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04/29/2010
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08/28/2012
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08/25/2011
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09/11/2012
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06/24/2010
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08/19/2010
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06/24/2010
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08/04/2015
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09/23/2010
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10/07/2010
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04/21/2011
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10/06/2011
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07/07/2011
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05/23/2013
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Title:
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METHOD FOR DETERMINING THE PERFORMANCE OF A PHOTOLITHOGRAPHIC MASK
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Patent #:
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Issue Dt:
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03/18/2014
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Application #:
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13805960
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Filing Dt:
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02/28/2013
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Publication #:
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Pub Dt:
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06/20/2013
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Title:
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METHOD AND APPARATUS FOR ANALYZING AND/OR REPAIRING OF AN EUV MASK DEFECT
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Patent #:
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Issue Dt:
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05/19/2015
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Application #:
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13806252
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Filing Dt:
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03/15/2013
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Publication #:
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Pub Dt:
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08/15/2013
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Title:
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CONTROLLABLE TRANSMISSION AND PHASE COMPENSATION OF TRANSPARENT MATERIAL
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Patent #:
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Issue Dt:
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02/09/2016
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Application #:
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13844362
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Filing Dt:
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03/15/2013
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Publication #:
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Pub Dt:
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10/03/2013
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Title:
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TEMPERATURE SENSOR AND METHOD FOR MEASURING A TEMPERATURE CHANGE
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Patent #:
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Issue Dt:
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06/13/2017
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Application #:
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13872356
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Filing Dt:
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04/29/2013
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Publication #:
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Pub Dt:
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11/07/2013
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Title:
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IRRADIATION MODULE FOR A MEASURING APPARATUS
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Patent #:
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Issue Dt:
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02/23/2016
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Application #:
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13908192
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Filing Dt:
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06/03/2013
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Publication #:
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Pub Dt:
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12/05/2013
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Title:
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MICROSCOPE AND METHOD FOR CHARACTERIZING STRUCTURES ON AN OBJECT
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Patent #:
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Issue Dt:
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07/01/2014
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Application #:
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13954617
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Filing Dt:
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07/30/2013
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Publication #:
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Pub Dt:
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01/02/2014
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Title:
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APPARATUS AND METHOD FOR ANALYZING AND MODIFYING A SPECIMEN SURFACE
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Patent #:
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Issue Dt:
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09/06/2016
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Application #:
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13994556
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Filing Dt:
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10/25/2013
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Publication #:
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Pub Dt:
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02/06/2014
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Title:
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METHOD AND APPARATUS FOR CORRECTING ERRORS ON A WAFER PROCESSED BY A PHOTOLITHOGRAPHIC MASK
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Patent #:
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Issue Dt:
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12/15/2015
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Application #:
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13995250
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Filing Dt:
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06/18/2013
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Publication #:
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Pub Dt:
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11/21/2013
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Title:
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METHOD FOR CHARACTERIZING A STRUCTURE ON A MASK AND DEVICE FOR CARRYING OUT SAID METHOD
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Patent #:
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Issue Dt:
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08/25/2015
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Application #:
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14038148
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Filing Dt:
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09/26/2013
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Publication #:
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Pub Dt:
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01/30/2014
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Title:
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APPARATUS AND METHOD FOR INVESTIGATING AN OBJECT
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Patent #:
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Issue Dt:
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08/28/2018
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Application #:
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14137731
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Filing Dt:
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12/20/2013
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Publication #:
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Pub Dt:
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06/12/2014
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Title:
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METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN EUV PHOTOMASK
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Patent #:
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Issue Dt:
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02/16/2016
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Application #:
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14192362
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Filing Dt:
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02/27/2014
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Publication #:
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Pub Dt:
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09/11/2014
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Title:
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METHOD FOR ANALYZING A PHOTOMASK
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14200264
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Filing Dt:
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03/07/2014
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Publication #:
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Pub Dt:
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09/11/2014
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Title:
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METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING BY A PARTICLE BEAM
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Patent #:
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Issue Dt:
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06/14/2016
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Application #:
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14307276
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Filing Dt:
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06/17/2014
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Publication #:
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Pub Dt:
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12/18/2014
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Title:
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METHOD FOR ESTABLISHING DISTORTION PROPERTIES OF AN OPTICAL SYSTEM IN A MICROLITHOGRAPHIC MEASUREMENT SYSTEM
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Patent #:
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Issue Dt:
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02/27/2018
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Application #:
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14311420
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Filing Dt:
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06/23/2014
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Publication #:
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Pub Dt:
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01/01/2015
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Title:
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ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYSTEM COMPRISING SUCH AN ILLUMINATION OPTICAL UNIT
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Patent #:
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Issue Dt:
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12/27/2016
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Application #:
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14327634
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Filing Dt:
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07/10/2014
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Publication #:
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Pub Dt:
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01/15/2015
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Title:
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METHOD FOR CALIBRATING A POSITION-MEASURING SYSTEM AND POSITION-MEASURING SYSTEM
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Patent #:
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Issue Dt:
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12/13/2016
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Application #:
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14351192
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Filing Dt:
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04/11/2014
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Publication #:
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Pub Dt:
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10/02/2014
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Title:
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OPTICALLY TRANSPARENT AND ELECTRICALLY CONDUCTIVE COATINGS AND METHOD FOR THEIR DEPOSITION ON A SUBSTRATE
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Patent #:
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Issue Dt:
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11/01/2016
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Application #:
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14468620
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Filing Dt:
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08/26/2014
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Publication #:
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Pub Dt:
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12/11/2014
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Title:
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MAGNIFYING IMAGING OPTICAL UNIT AND METROLOGY SYSTEM INCLUDING SAME
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Patent #:
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Issue Dt:
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01/16/2018
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Application #:
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14563259
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Filing Dt:
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12/08/2014
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Publication #:
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Pub Dt:
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07/16/2015
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Title:
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Method and device for examining a mask
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Patent #:
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Issue Dt:
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06/05/2018
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Application #:
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14568681
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Filing Dt:
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12/12/2014
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Publication #:
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Pub Dt:
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06/18/2015
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Title:
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APPARATUS AND METHOD FOR CORRELATING IMAGES OF A PHOTOLITHOGRAPHIC MASK
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Patent #:
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Issue Dt:
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01/03/2017
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Application #:
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14594851
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Filing Dt:
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01/12/2015
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Publication #:
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Pub Dt:
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07/16/2015
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Title:
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EMULATION OF REPRODUCTION OF MASKS CORRECTED BY LOCAL DENSITY VARIATIONS
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Patent #:
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Issue Dt:
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05/31/2016
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Application #:
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14706623
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Filing Dt:
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05/07/2015
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Publication #:
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Pub Dt:
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11/19/2015
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Title:
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METHOD FOR MEASURING A LITHOGRAPHY MASK OR A MASK BLANK
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Patent #:
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Issue Dt:
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08/21/2018
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Application #:
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14952073
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Filing Dt:
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11/25/2015
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Publication #:
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Pub Dt:
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06/16/2016
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Title:
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Method and System for EUV Mask Blank Buried Defect Analysis
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