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Reel/Frame:054255/0717   Pages: 3
Recorded: 11/03/2020
Attorney Dkt #:44017146US03
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
09/26/2023
Application #:
17028184
Filing Dt:
09/22/2020
Publication #:
Pub Dt:
03/25/2021
Title:
ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUMPING
Assignors
1
Exec Dt:
10/20/2020
2
Exec Dt:
10/20/2020
3
Exec Dt:
10/20/2020
4
Exec Dt:
10/27/2020
Assignee
1
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
SERVILLA WHITNEY LLC
33 WOOD AVENUE SOUTH
SUITE 830
ISELIN, NJ 08830

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