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Patent Assignment Details
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Reel/Frame:016630/0725   Pages: 9
Recorded: 08/15/2005
Attorney Dkt #:DEN572M
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 43
1
Patent #:
4872755
Issue Dt:
10/10/1989
Application #:
07164790
Filing Dt:
03/07/1988
Title:
INTERFEROMETER FOR MEASURING OPTICAL PHASE DIFFERENCES
2
Patent #:
5004346
Issue Dt:
04/02/1991
Application #:
07426772
Filing Dt:
10/26/1989
Title:
METHOD OF EXAMINING AN OPTICAL COMPONENT
3
Patent #:
5138490
Issue Dt:
08/11/1992
Application #:
07505176
Filing Dt:
04/05/1990
Title:
ARRANGEMENT FOR CHANGING THE GEOMETRICAL FORM OF A LIGHT BEAM
4
Patent #:
5041862
Issue Dt:
08/20/1991
Application #:
07531778
Filing Dt:
06/01/1990
Title:
LENS SCREEN
5
Patent #:
5023897
Issue Dt:
06/11/1991
Application #:
07568193
Filing Dt:
08/16/1990
Title:
DEVICE FOR GENERATING X-RADIATION WITH A PLASMA SOURCE
6
Patent #:
5138484
Issue Dt:
08/11/1992
Application #:
07624598
Filing Dt:
12/10/1990
Title:
MIRROR TELESCOPE
7
Patent #:
5311599
Issue Dt:
05/10/1994
Application #:
07692127
Filing Dt:
04/26/1991
Title:
METHOD AND APPARATUS FOR OPTICAL TESTING OF SAMPLES
8
Patent #:
5148326
Issue Dt:
09/15/1992
Application #:
07737448
Filing Dt:
07/29/1991
Title:
MIRROR FOR CHANGING THE GEOMETRICAL FORM OF A LIGHT BEAM
9
Patent #:
5289316
Issue Dt:
02/22/1994
Application #:
07856122
Filing Dt:
03/23/1992
Title:
MEASURING OBJECTIVE
10
Patent #:
5306892
Issue Dt:
04/26/1994
Application #:
07901729
Filing Dt:
06/22/1992
Title:
MIRROR OBJECTIVE ARRANGEMENT
11
Patent #:
5343489
Issue Dt:
08/30/1994
Application #:
07912277
Filing Dt:
07/13/1992
Title:
ARRANGEMENT FOR SHAPING A LASER BEAM AND FOR REDUCING THE COHERENCE THEREOF
12
Patent #:
5357341
Issue Dt:
10/18/1994
Application #:
07912285
Filing Dt:
07/13/1992
Title:
METHOD FOR EVALUATING INTERFEROGRAMS AND INTERFEROMETER THEREFOR
13
Patent #:
5361312
Issue Dt:
11/01/1994
Application #:
08044105
Filing Dt:
04/08/1993
Title:
METHOD AND APPARATUS FOR PHASE EVALUATION OF PATTERN IMAGES USED IN OPTICAL MEASUREMENT
14
Patent #:
5402267
Issue Dt:
03/28/1995
Application #:
08154093
Filing Dt:
11/18/1993
Title:
CATADIOPTRIC REDUCTION OBJECTIVE
15
Patent #:
5646715
Issue Dt:
07/08/1997
Application #:
08355157
Filing Dt:
12/08/1994
Title:
ILLUMINATING ARRANGEMENT FOR AN OPTICAL SYSTEM HAVING A RETICLE MASKING UNIT
16
Patent #:
5572287
Issue Dt:
11/05/1996
Application #:
08355177
Filing Dt:
12/08/1994
Title:
ILLUMINATING ARRANGEMENT FOR A PROJECTION MICROLITHOGRAPHIC EXPOSURE APPARATUS
17
Patent #:
5675401
Issue Dt:
10/07/1997
Application #:
08490752
Filing Dt:
06/15/1995
Title:
ILLUMINATING ARRANGEMENT INCLUDING A ZOOM OBJECTIVE INCORPRATING TWO AXICONS
18
Patent #:
5742436
Issue Dt:
04/21/1998
Application #:
08583025
Filing Dt:
01/19/1996
Title:
MAXIMUM APERTURE CATADIOPTRIC REDUCTION OBJECTIVE FOR MICROLITHOGRAPHY
19
Patent #:
5850310
Issue Dt:
12/15/1998
Application #:
08722872
Filing Dt:
09/26/1996
Title:
ZOOM DEVICE
20
Patent #:
5982558
Issue Dt:
11/09/1999
Application #:
08771654
Filing Dt:
12/23/1996
Title:
REMA OBJECTIVE FOR MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEMS
21
Patent #:
5880891
Issue Dt:
03/09/1999
Application #:
08845384
Filing Dt:
04/25/1997
Title:
HIGH RESOLUTION HIGH APERTURED OBJECTIVE
22
Patent #:
6084708
Issue Dt:
07/04/2000
Application #:
08929913
Filing Dt:
09/15/1997
Title:
DOUBLE-REFRACTING PLANAR PLATE ARRANGEMENT AND DEEP ULTRAVIOLET LAMDA/4-PLATE
23
Patent #:
6451462
Issue Dt:
09/17/2002
Application #:
09017159
Filing Dt:
02/02/1998
Title:
OPTICAL UNIT AND METHOD FOR MAKING THE SAME
24
Patent #:
6064516
Issue Dt:
05/16/2000
Application #:
09051339
Filing Dt:
04/06/1998
Title:
ACHROMATIC LENS SYSTEM FOR ULTRAVIOLET RADIATION WITH GERMANIUM DIOXIDE GLASS
25
Patent #:
6088083
Issue Dt:
07/11/2000
Application #:
09175429
Filing Dt:
10/20/1998
Title:
OPTICAL IMAGE RECORDING ARRANGEMENT AND METHOD OF USING THE SAME
26
Patent #:
6099193
Issue Dt:
08/08/2000
Application #:
09209831
Filing Dt:
12/11/1998
Title:
COMPOSITE BODY
27
Patent #:
6227754
Issue Dt:
05/08/2001
Application #:
09209833
Filing Dt:
12/11/1998
Title:
COMPOSITE BODY
28
Patent #:
6111691
Issue Dt:
08/29/2000
Application #:
09215318
Filing Dt:
12/18/1998
Title:
POSITIONING TABLE
29
Patent #:
6169627
Issue Dt:
01/02/2001
Application #:
09263788
Filing Dt:
03/05/1999
Title:
CATADIOPTRIC MICROLITHOGRAPHIC REDUCTION OBJECTIVE
30
Patent #:
6285443
Issue Dt:
09/04/2001
Application #:
09315267
Filing Dt:
05/20/1999
Title:
ILLUMINATING ARRANGEMENT FOR A PROJECTION MICROLITHOGRAPHIC APPARATUS
31
Patent #:
6191880
Issue Dt:
02/20/2001
Application #:
09352408
Filing Dt:
07/14/1999
Title:
RADIAL POLARIZATION-ROTATING OPTICAL ARRANGEMENT AND MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM INCORPORATING SAID ARRANGEMENT
32
Patent #:
6243206
Issue Dt:
06/05/2001
Application #:
09449415
Filing Dt:
11/29/1999
Title:
ILLUMINATING SYSTEM FOR VACUUM ULTRAVIOLET MICROLITHOGRAPHY
33
Patent #:
6392800
Issue Dt:
05/21/2002
Application #:
09730778
Filing Dt:
12/07/2000
Publication #:
US20010012154
Pub Dt:
08/09/2001
Title:
RADIAL POLARIZATION-ROTATING OPTICAL ARRANGEMENT AND MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM INCORPORATING SAID ARRANGEMENT
34
Patent #:
6631036
Issue Dt:
10/07/2003
Application #:
09741863
Filing Dt:
12/22/2000
Publication #:
US20030011894
Pub Dt:
01/16/2003
Title:
CATADIOPTRIC OBJECTIVE
35
Patent #:
6631036
Issue Dt:
10/07/2003
Application #:
09741863
Filing Dt:
12/22/2000
Publication #:
US20030011894
Pub Dt:
01/16/2003
Title:
CATADIOPTRIC OBJECTIVE
36
Patent #:
6873476
Issue Dt:
03/29/2005
Application #:
09759806
Filing Dt:
01/12/2001
Publication #:
US20020012100
Pub Dt:
01/31/2002
Title:
MICROLITHOGRAPHIC REDUCTION PROJECTION CATADIOPTRIC OBJECTIVE
37
Patent #:
6636350
Issue Dt:
10/21/2003
Application #:
09761562
Filing Dt:
01/16/2001
Publication #:
US20010043391
Pub Dt:
11/22/2001
Title:
MICROLITHOGRAPHIC REDUCTION PROJECTION CATADIOPTRIC OBJECTIVE
38
Patent #:
6636350
Issue Dt:
10/21/2003
Application #:
09761562
Filing Dt:
01/16/2001
Publication #:
US20010043391
Pub Dt:
11/22/2001
Title:
MICROLITHOGRAPHIC REDUCTION PROJECTION CATADIOPTRIC OBJECTIVE
39
Patent #:
6930758
Issue Dt:
08/16/2005
Application #:
09797961
Filing Dt:
03/05/2001
Publication #:
US20010019404
Pub Dt:
09/06/2001
Title:
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD FOR GENERATING MICROLITHOGRAPHIC IMAGES
40
Patent #:
6512573
Issue Dt:
01/28/2003
Application #:
09834906
Filing Dt:
04/16/2001
Publication #:
US20020039180
Pub Dt:
04/04/2002
Title:
PROJECTION EXPOSURE APPARATUS AND EXPOSURE METHOD
41
Patent #:
6583937
Issue Dt:
06/24/2003
Application #:
09871636
Filing Dt:
06/04/2001
Title:
ILLUMINATING SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE ARRANGEMENT
42
Patent #:
6583937
Issue Dt:
06/24/2003
Application #:
09871636
Filing Dt:
06/04/2001
Title:
ILLUMINATING SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE ARRANGEMENT
43
Patent #:
6597521
Issue Dt:
07/22/2003
Application #:
10244030
Filing Dt:
09/16/2002
Publication #:
US20030012893
Pub Dt:
01/16/2003
Title:
OPTICAL UNIT AND METHOD FOR MAKING THE SAME
Assignor
1
CARL-ZEISS-STIFTUNG HEIDENHEIM/BRENZ
Exec Dt:
06/30/2004
Assignee
1
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE
OBERKOCHEN, GERMANY 73447
Correspondence name and address
THOMAS S. BAKER, JR.
THOMAS S. BAKER, JR., ATTORNEY AT LAW, L
1371 WEST 3RD AVENUE
COLUMBUS, OHIO 43212

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