Patent Assignment Details
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| Reel/Frame: | 008029/0728 | |
| Pages: | 4 |
| | Recorded: | 06/20/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/01/1997
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Application #:
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08382973
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Filing Dt:
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02/03/1995
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Title:
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METHOD AND REFERENCE STANDARDS FOR MEASURING OVERLAY IN MULTILAYER STRUCTURES, AND FOR CALIBRATING IMAGING EQUIPMENT AS USED IN SEMICONDUCTOR MANUFACTURING
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Assignee
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| NATIONAL INSTITUTE OF STANDARDS |
| 14TH AND CONSTITUTION |
| WASHINGTON, DISTRICT OF COLUMBIA 20230 |
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Correspondence name and address
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NATIONAL INSTITUTE OF STANDARDS & TECH.
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MARCIA SALKELD
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BUILDING 820, ROOM 213
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GAITHERSBURG, MARYLAND 20899
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