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Reel/Frame:	041772/0733			Pages:	35
		Recorded:	02/20/2017
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 764
Page 7 of 8
Pages: 1 2 3 4 5 6 7 8

Patent #:	8383849	Issue Dt:	02/26/2013	Application #:	13051591	Filing Dt:	03/18/2011
Publication #:	US20110165346	Pub Dt:	07/07/2011
Title:	PRECURSORS FOR CVD SILICON CARBO-NITRIDE FILMS

Patent #:	NONE	Issue Dt:		Application #:	13052457	Filing Dt:	03/21/2011
Publication #:	US20110165777	Pub Dt:	07/07/2011
Title:	Method and Slurry for Tuning Low-K Versus Copper Removal Rates During Chemical Mechanical Polishing

Patent #:	8502401	Issue Dt:	08/06/2013	Application #:	13058688	Filing Dt:	05/11/2011
Publication #:	US20110260343	Pub Dt:	10/27/2011
Title:	POLYMERIC COMPOSITIONS COMPRISING PER(PHENYLETHYNYL) ARENE DERIVATIVES

Patent #:	8590705	Issue Dt:	11/26/2013	Application #:	13090346	Filing Dt:	04/20/2011
Publication #:	US20120103857	Pub Dt:	05/03/2012
Title:	Cylinder Surface Treated Container For Monochlorosilane

Patent #:	8616075	Issue Dt:	12/31/2013	Application #:	13106430	Filing Dt:	05/12/2011
Publication #:	US20120125128	Pub Dt:	05/24/2012
Title:	SYSTEM FOR PERFORMING INSPECTIONS, REPAIRS, AND/OR OTHER OPERATIONS WITHIN VESSELS

Patent #:	8092709	Issue Dt:	01/10/2012	Application #:	13109488	Filing Dt:	05/17/2011
Publication #:	US20110218371	Pub Dt:	09/08/2011
Title:	STABILIZERS FOR THE STABILIZATION OF UNSATURATED HYDROCARBON-BASED PRECURSOR

Patent #:	8912353	Issue Dt:	12/16/2014	Application #:	13114287	Filing Dt:	05/24/2011
Publication #:	US20120128897	Pub Dt:	05/24/2012
Title:	ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPRISING SAME

Patent #:	9018387	Issue Dt:	04/28/2015	Application #:	13152885	Filing Dt:	06/03/2011
Publication #:	US20120121806	Pub Dt:	05/17/2012
Title:	Complexes Of Imidazole Ligands

Patent #:	8821751	Issue Dt:	09/02/2014	Application #:	13154662	Filing Dt:	06/07/2011
Publication #:	US20120142191	Pub Dt:	06/07/2012
Title:	Chemical Mechanical Planarization Composition And Method With Low Corrosiveness

Patent #:	8507040	Issue Dt:	08/13/2013	Application #:	13156501	Filing Dt:	06/09/2011
Publication #:	US20120171378	Pub Dt:	07/05/2012
Title:	BINARY AND TERNARY METAL CHALCOGENIDE MATERIALS AND METHOD OF MAKING AND USING SAME

Patent #:	8883701	Issue Dt:	11/11/2014	Application #:	13171252	Filing Dt:	06/28/2011
Publication #:	US20120009762	Pub Dt:	01/12/2012
Title:	Method for Wafer Dicing and Composition Useful Thereof

Patent #:	9079923	Issue Dt:	07/14/2015	Application #:	13187833	Filing Dt:	07/21/2011
Publication #:	US20120201958	Pub Dt:	08/09/2012
Title:	MULTIDENTATE KETOIMINE LIGANDS FOR METAL COMPLEXES

Patent #:	8329933	Issue Dt:	12/11/2012	Application #:	13205015	Filing Dt:	08/08/2011
Publication #:	US20110295033	Pub Dt:	12/01/2011
Title:	LOW-IMPURITY ORGANOSILICON PRODUCT AS PRECURSOR FOR CVD

Patent #:	8591720	Issue Dt:	11/26/2013	Application #:	13208418	Filing Dt:	08/12/2011
Publication #:	US20120205252	Pub Dt:	08/16/2012
Title:	Method and Apparatus for Achieving Maximum Yield in the Electrolytic Preparation of Group IV and V Hydrides

Patent #:	8440599	Issue Dt:	05/14/2013	Application #:	13217994	Filing Dt:	08/25/2011
Publication #:	US20110311921	Pub Dt:	12/22/2011
Title:	COMPOSITION FOR STRIPPING AND CLEANING AND USE THEREOF

Patent #:	8535414	Issue Dt:	09/17/2013	Application #:	13236112	Filing Dt:	09/19/2011
Publication #:	US20120079939	Pub Dt:	04/05/2012
Title:	RECOVERING OF XENON BY ADSORPTION PROCESS

Patent #:	8528581	Issue Dt:	09/10/2013	Application #:	13245280	Filing Dt:	09/26/2011
Publication #:	US20130075637	Pub Dt:	03/28/2013
Title:	SOLENOID BYPASS FOR CONTINUOUS OPERATION OF PNEUMATIC VALVE

Patent #:	NONE	Issue Dt:		Application #:	13251684	Filing Dt:	10/03/2011
Publication #:	US20120277457	Pub Dt:	11/01/2012
Title:	AMINOSILANES AND METHODS FOR MAKING SAME

Patent #:	8951342	Issue Dt:	02/10/2015	Application #:	13286634	Filing Dt:	11/01/2011
Publication #:	US20120282415	Pub Dt:	11/08/2012
Title:	Methods For Using Porogens For Low K Porous Organosilica Glass Films

Patent #:	NONE	Issue Dt:		Application #:	13296836	Filing Dt:	11/15/2011
Publication #:	US20120295447	Pub Dt:	11/22/2012
Title:	Compositions and Methods for Texturing of Silicon Wafers

Patent #:	NONE	Issue Dt:		Application #:	13299448	Filing Dt:	11/18/2011
Publication #:	US20130011579	Pub Dt:	01/10/2013
Title:	Metal-Enolate Precursors For Depositing Metal-Containing Films

Patent #:	8906123	Issue Dt:	12/09/2014	Application #:	13325459	Filing Dt:	12/14/2011
Publication #:	US20120329279	Pub Dt:	12/27/2012
Title:	CMP SLURRY/METHOD FOR POLISHING RUTHENIUM AND OTHER FILMS

Patent #:	8617305	Issue Dt:	12/31/2013	Application #:	13348228	Filing Dt:	01/11/2012
Publication #:	US20130008345	Pub Dt:	01/10/2013
Title:	Novel Metal Complexes for Metal-Containing Film Deposition

Patent #:	8944420	Issue Dt:	02/03/2015	Application #:	13350989	Filing Dt:	01/16/2012
Publication #:	US20130015594	Pub Dt:	01/17/2013
Title:	Splashguard For High Flow Vacuum Bubbler Vessel

Patent #:	8746272	Issue Dt:	06/10/2014	Application #:	13352643	Filing Dt:	01/18/2012
Publication #:	US20130075636	Pub Dt:	03/28/2013
Title:	Solenoid Bypass System for Continuous Operation of Pneumatic Valve

Patent #:	NONE	Issue Dt:		Application #:	13353729	Filing Dt:	01/19/2012
Publication #:	US20130017644	Pub Dt:	01/17/2013
Title:	Fluorine Based Chamber Clean With Nitrogen Trifluoride Backup

Patent #:	8915992	Issue Dt:	12/23/2014	Application #:	13359790	Filing Dt:	01/27/2012
Publication #:	US20120118763	Pub Dt:	05/17/2012
Title:	Process and System for Providing Acetylene

Patent #:	8691710	Issue Dt:	04/08/2014	Application #:	13362077	Filing Dt:	01/31/2012
Publication #:	US20130030191	Pub Dt:	01/31/2013
Title:	Group IV Metal Complexes For Metal-Containing Film Deposition

Patent #:	8680289	Issue Dt:	03/25/2014	Application #:	13363918	Filing Dt:	02/01/2012
Publication #:	US20130078391	Pub Dt:	03/28/2013
Title:	Complexes Of Imidazole Ligands

Patent #:	8828505	Issue Dt:	09/09/2014	Application #:	13405453	Filing Dt:	02/27/2012
Publication #:	US20120171874	Pub Dt:	07/05/2012
Title:	Plasma Enhanced Cyclic Chemical Vapor Deposition of Silicon- Containing Films

Patent #:	8889609	Issue Dt:	11/18/2014	Application #:	13414339	Filing Dt:	03/07/2012
Publication #:	US20130061882	Pub Dt:	03/14/2013
Title:	Cleaning Formulations and Method of Using the Cleaning Formulations

Patent #:	8962875	Issue Dt:	02/24/2015	Application #:	13418747	Filing Dt:	03/13/2012
Publication #:	US20130066082	Pub Dt:	03/14/2013
Title:	Metal-Enolate Precursors For Depositing Metal-Containing Films

Patent #:	9061317	Issue Dt:	06/23/2015	Application #:	13439911	Filing Dt:	04/05/2012
Publication #:	US20130095255	Pub Dt:	04/18/2013
Title:	POROGENS, POROGENATED PRECURSORS AND METHODS FOR USING THE SAME TO PROVIDE POROUS ORGANOSILICA GLASS FILMS WITH LOW DIELECTRIC CONSTANTS

Patent #:	8563353	Issue Dt:	10/22/2013	Application #:	13466275	Filing Dt:	05/08/2012
Publication #:	US20120220076	Pub Dt:	08/30/2012
Title:	METHOD OF MAKING A MULTICOMPONENT FILM

Patent #:	8771807	Issue Dt:	07/08/2014	Application #:	13474076	Filing Dt:	05/17/2012
Publication #:	US20130129940	Pub Dt:	05/23/2013
Title:	ORGANOAMINOSILANE PRECURSORS AND METHODS FOR MAKING AND USING SAME

Patent #:	NONE	Issue Dt:		Application #:	13475632	Filing Dt:	05/18/2012
Publication #:	US20130130508	Pub Dt:	05/23/2013
Title:	Compositions and Methods for Texturing of Silicon Wafers

Patent #:	NONE	Issue Dt:		Application #:	13529503	Filing Dt:	06/21/2012
Publication #:	US20130153820	Pub Dt:	06/20/2013
Title:	Method and Composition for Chemical Mechanical Planarization of a Metal-Containing Substrate

Patent #:	8697577	Issue Dt:	04/15/2014	Application #:	13561398	Filing Dt:	07/30/2012
Publication #:	US20130102153	Pub Dt:	04/25/2013
Title:	METHOD AND COMPOSITION FOR CHEMICAL MECHANICAL PLANARIZATION OF A METAL OR A METAL ALLOY

Patent #:	NONE	Issue Dt:		Application #:	13562993	Filing Dt:	07/31/2012
Publication #:	US20120295828	Pub Dt:	11/22/2012
Title:	Composition for Removing Photoresist and/or Etching Residue From a Substrate and Use Thereof

Patent #:	NONE	Issue Dt:		Application #:	13572973	Filing Dt:	08/13/2012
Publication #:	US20130210217	Pub Dt:	08/15/2013
Title:	Precursors for GST Films in ALD/CVD Processes

Patent #:	NONE	Issue Dt:		Application #:	13595419	Filing Dt:	08/27/2012
Publication #:	US20130220410	Pub Dt:	08/29/2013
Title:	Precursors for Photovoltaic Passivation

Patent #:	NONE	Issue Dt:		Application #:	13610311	Filing Dt:	09/11/2012
Publication #:	US20130247971	Pub Dt:	09/26/2013
Title:	Oxygen Containing Precursors for Photovoltaic Passivation

Patent #:	8932675	Issue Dt:	01/13/2015	Application #:	13614387	Filing Dt:	09/13/2012
Publication #:	US20130244448	Pub Dt:	09/19/2013
Title:	METHODS FOR DEPOSITING SILICON CARBO-NITRIDE FILM

Patent #:	8993072	Issue Dt:	03/31/2015	Application #:	13622117	Filing Dt:	09/18/2012
Publication #:	US20130078392	Pub Dt:	03/28/2013
Title:	HALOGENATED ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPRISING SAME

Patent #:	8906455	Issue Dt:	12/09/2014	Application #:	13624190	Filing Dt:	09/21/2012
Publication #:	US20130189853	Pub Dt:	07/25/2013
Title:	LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS

Patent #:	8759563	Issue Dt:	06/24/2014	Application #:	13668545	Filing Dt:	11/05/2012
Publication #:	US20130060061	Pub Dt:	03/07/2013
Title:	LOW-IMPURITY ORGANOSILICON PRODUCT AS PRECURSOR FOR CVD

Patent #:	NONE	Issue Dt:		Application #:	13721608	Filing Dt:	12/20/2012
Publication #:	US20140008240	Pub Dt:	01/09/2014
Title:	Divided Electrochemical Cell and Low Cost High Purity Hydride Gas Production Process

Patent #:	9809711	Issue Dt:	11/07/2017	Application #:	13738482	Filing Dt:	01/10/2013
Publication #:	US20130180215	Pub Dt:	07/18/2013
Title:	CATALYST AND FORMULATIONS COMPRISING SAME FOR ALKOXYSILANES HYDROLYSIS REACTION IN SEMICONDUCTOR PROCESS

Patent #:	9200167	Issue Dt:	12/01/2015	Application #:	13745102	Filing Dt:	01/18/2013
Publication #:	US20130196082	Pub Dt:	08/01/2013
Title:	ALKOXYAMINOSILANE COMPOUNDS AND APPLICATIONS THEREOF

Patent #:	8846522	Issue Dt:	09/30/2014	Application #:	13767409	Filing Dt:	02/14/2013
Publication #:	US20130157435	Pub Dt:	06/20/2013
Title:	MATERIALS AND METHODS OF FORMING CONTROLLED VOID

Patent #:	NONE	Issue Dt:		Application #:	13773931	Filing Dt:	02/22/2013
Publication #:	US20130260575	Pub Dt:	10/03/2013
Title:	SILICON PRECURSORS AND COMPOSITIONS COMPRISING SAME FOR DEPOSITING LOW DIELECTRIC CONSTANT FILMS

Patent #:	8841216	Issue Dt:	09/23/2014	Application #:	13783835	Filing Dt:	03/04/2013
Publication #:	US20130178065	Pub Dt:	07/11/2013
Title:	Method and Composition for Chemical Mechanical Planarization of a Metal

Patent #:	NONE	Issue Dt:		Application #:	13795636	Filing Dt:	03/12/2013
Publication #:	US20130243968	Pub Dt:	09/19/2013
Title:	CATALYST SYNTHESIS FOR ORGANOSILANE SOL-GEL REACTIONS

Patent #:	8999193	Issue Dt:	04/07/2015	Application #:	13832234	Filing Dt:	03/15/2013
Publication #:	US20140099790	Pub Dt:	04/10/2014
Title:	Chemical Mechanical Polishing Composition Having Chemical Additives and Methods for Using Same

Patent #:	9216364	Issue Dt:	12/22/2015	Application #:	13839497	Filing Dt:	03/15/2013
Publication #:	US20140262732	Pub Dt:	09/18/2014
Title:	ONSITE ULTRA HIGH PURITY CHEMICALS OR GAS PURIFICATION

Patent #:	NONE	Issue Dt:		Application #:	13848808	Filing Dt:	03/22/2013
Publication #:	US20130260025	Pub Dt:	10/03/2013
Title:	Group 2 Imidazolate Formulations for Direct Liquid Injection

Patent #:	9460912	Issue Dt:	10/04/2016	Application #:	13857507	Filing Dt:	04/05/2013
Publication #:	US20130295779	Pub Dt:	11/07/2013
Title:	HIGH TEMPERATURE ATOMIC LAYER DEPOSITION OF SILICON OXIDE THIN FILMS

Patent #:	NONE	Issue Dt:		Application #:	13859263	Filing Dt:	04/09/2013
Publication #:	US20140110267	Pub Dt:	04/24/2014
Title:	Anodes for the Electrolytic Production of Nitrogen Trifluoride and Fluorine

Patent #:	9598766	Issue Dt:	03/21/2017	Application #:	13897967	Filing Dt:	05/20/2013
Publication #:	US20130312855	Pub Dt:	11/28/2013
Title:	VESSEL WITH FILTER

Patent #:	9337018	Issue Dt:	05/10/2016	Application #:	13902300	Filing Dt:	05/24/2013
Publication #:	US20130323435	Pub Dt:	12/05/2013
Title:	METHODS FOR DEPOSITING FILMS WITH ORGANOAMINODISILANE PRECURSORS

Patent #:	9978585	Issue Dt:	05/22/2018	Application #:	13902375	Filing Dt:	05/24/2013
Publication #:	US20130319290	Pub Dt:	12/05/2013
Title:	ORGANOAMINODISILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPRISING SAME

Patent #:	NONE	Issue Dt:		Application #:	13913069	Filing Dt:	06/07/2013
Publication #:	US20130341178	Pub Dt:	12/26/2013
Title:	Method and Apparatus for Removing Contaminants from Nitrogen Trifluoride

Patent #:	8974692	Issue Dt:	03/10/2015	Application #:	13929346	Filing Dt:	06/27/2013
Publication #:	US20150004788	Pub Dt:	01/01/2015
Title:	Chemical Mechanical Polishing Slurry Compositions and Method Using the Same for Copper and Through-Silicon Via Applications

Patent #:	8790521	Issue Dt:	07/29/2014	Application #:	13930273	Filing Dt:	06/28/2013
Publication #:	US20130288479	Pub Dt:	10/31/2013
Title:	Combination, Method, and Composition for Chemical Mechanical Planarization of a Tungsten-Containing Substrate

Patent #:	NONE	Issue Dt:		Application #:	13936557	Filing Dt:	07/08/2013
Publication #:	US20130295334	Pub Dt:	11/07/2013
Title:	Method for Removal of Carbon from an Organosilicate Material

Patent #:	9201308	Issue Dt:	12/01/2015	Application #:	13936656	Filing Dt:	07/08/2013
Publication #:	US20130296215	Pub Dt:	11/07/2013
Title:	WATER-RICH STRIPPING AND CLEANING FORMULATION AND METHOD FOR USING SAME

Patent #:	9243324	Issue Dt:	01/26/2016	Application #:	13949420	Filing Dt:	07/24/2013
Publication #:	US20140030448	Pub Dt:	01/30/2014
Title:	METHODS OF FORMING NON-OXYGEN CONTAINING SILICON-BASED FILMS

Patent #:	8940648	Issue Dt:	01/27/2015	Application #:	13964658	Filing Dt:	08/12/2013
Publication #:	US20130330937	Pub Dt:	12/12/2013
Title:	PROCESS FOR PRODUCING SILICON AND OXIDE FILMS FROM ORGANOAMINOSILANE PRECURSORS

Patent #:	9536730	Issue Dt:	01/03/2017	Application #:	14010748	Filing Dt:	08/27/2013
Publication #:	US20140109931	Pub Dt:	04/24/2014
Title:	Cleaning Formulations

Patent #:	8859428	Issue Dt:	10/14/2014	Application #:	14030657	Filing Dt:	09/18/2013
Publication #:	US20140110626	Pub Dt:	04/24/2014
Title:	CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION FOR SHALLOW TRENCH ISOLATION (STI) APPLICATIONS AND METHODS OF MAKING THEREOF

Patent #:	NONE	Issue Dt:		Application #:	14032985	Filing Dt:	09/20/2013
Publication #:	US20140024173	Pub Dt:	01/23/2014
Title:	Method of Making a Multicomponent Film

Patent #:	NONE	Issue Dt:		Application #:	14043330	Filing Dt:	10/01/2013
Publication #:	US20140100151	Pub Dt:	04/10/2014
Title:	Stripping and Cleaning Compositions for Removal of Thick Film Resist

Patent #:	NONE	Issue Dt:		Application #:	14046261	Filing Dt:	10/04/2013
Publication #:	US20140110269	Pub Dt:	04/24/2014
Title:	Anodes for the Electrolytic Production of Nitrogen Trifluoride and Fluorine

Patent #:	NONE	Issue Dt:		Application #:	14051969	Filing Dt:	10/11/2013
Publication #:	US20150104940	Pub Dt:	04/16/2015
Title:	BARRIER CHEMICAL MECHANICAL PLANARIZATION COMPOSITION AND METHOD THEREOF

Patent #:	NONE	Issue Dt:		Application #:	14070957	Filing Dt:	11/04/2013
Publication #:	US20140065844	Pub Dt:	03/06/2014
Title:	Amino Vinylsilane Precursors for Stressed SiN Films

Patent #:	10279959	Issue Dt:	05/07/2019	Application #:	14096388	Filing Dt:	12/04/2013
Publication #:	US20140158580	Pub Dt:	06/12/2014
Title:	ALKOXYSILYLAMINE COMPOUNDS AND APPLICATIONS THEREOF

Patent #:	9447287	Issue Dt:	09/20/2016	Application #:	14122825	Filing Dt:	06/04/2014
Publication #:	US20140287164	Pub Dt:	09/25/2014
Title:	COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONTAINING FILMS

Patent #:	NONE	Issue Dt:		Application #:	14142087	Filing Dt:	12/27/2013
Publication #:	US20140273458	Pub Dt:	09/18/2014
Title:	Chemical Mechanical Planarization for Tungsten-Containing Substrates

Patent #:	NONE	Issue Dt:		Application #:	14149318	Filing Dt:	01/07/2014
Publication #:	US20140196664	Pub Dt:	07/17/2014
Title:	SYSTEM AND METHOD FOR TUNGSTEN HEXAFLUORIDE RECOVERY AND REUSE

Patent #:	8959998	Issue Dt:	02/24/2015	Application #:	14163407	Filing Dt:	01/24/2014
Publication #:	US20140338442	Pub Dt:	11/20/2014
Title:	ULTRASONIC LIQUID LEVEL SENSING SYSTEMS

Patent #:	9316525	Issue Dt:	04/19/2016	Application #:	14163518	Filing Dt:	01/24/2014
Publication #:	US20140338443	Pub Dt:	11/20/2014
Title:	ULTRASONIC LIQUID LEVEL SENSING SYSTEMS

Patent #:	NONE	Issue Dt:		Application #:	14191730	Filing Dt:	02/27/2014
Publication #:	US20140242795	Pub Dt:	08/28/2014
Title:	Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors

Patent #:	9502234	Issue Dt:	11/22/2016	Application #:	14193417	Filing Dt:	02/28/2014
Publication #:	US20150249007	Pub Dt:	09/03/2015
Title:	Methods to Prepare Silicon-Containing Films

Patent #:	9328318	Issue Dt:	05/03/2016	Application #:	14195285	Filing Dt:	03/03/2014
Publication #:	US20140170835	Pub Dt:	06/19/2014
Title:	Method for Wafer Dicing and Composition Useful Thereof

Patent #:	NONE	Issue Dt:		Application #:	14204577	Filing Dt:	03/11/2014
Publication #:	US20140183706	Pub Dt:	07/03/2014
Title:	Dielectric Films Comprising Silicon And Methods For Making Same

Patent #:	NONE	Issue Dt:		Application #:	14205601	Filing Dt:	03/12/2014
Publication #:	US20140193578	Pub Dt:	07/10/2014
Title:	Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel

Patent #:	9435027	Issue Dt:	09/06/2016	Application #:	14205786	Filing Dt:	03/12/2014
Publication #:	US20140191423	Pub Dt:	07/10/2014
Title:	Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel

Patent #:	9770804	Issue Dt:	09/26/2017	Application #:	14218578	Filing Dt:	03/18/2014
Publication #:	US20140261824	Pub Dt:	09/18/2014
Title:	SLURRY SUPPLY AND/OR CHEMICAL BLEND SUPPLY APPARATUSES, PROCESSES, METHODS OF USE AND METHODS OF MANUFACTURE

Patent #:	NONE	Issue Dt:		Application #:	14224839	Filing Dt:	03/25/2014
Publication #:	US20140315386	Pub Dt:	10/23/2014
Title:	Metal Compound Coated Colloidal Particles Process for Making and Use Therefor

Patent #:	9214630	Issue Dt:	12/15/2015	Application #:	14245403	Filing Dt:	04/04/2014
Publication #:	US20140308802	Pub Dt:	10/16/2014
Title:	METHOD OF MAKING A MULTICOMPONENT FILM

Patent #:	9018107	Issue Dt:	04/28/2015	Application #:	14270609	Filing Dt:	05/06/2014
Publication #:	US20140242813	Pub Dt:	08/28/2014
Title:	LOW K PRECURSORS PROVIDING SUPERIOR INTEGRATION ATTRIBUTES

Patent #:	9284198	Issue Dt:	03/15/2016	Application #:	14284983	Filing Dt:	05/22/2014
Publication #:	US20150004089	Pub Dt:	01/01/2015
Title:	PROCESS FOR MAKING TRISILYLAMINE

Patent #:	9005719	Issue Dt:	04/14/2015	Application #:	14291818	Filing Dt:	05/30/2014
Publication #:	US20140272194	Pub Dt:	09/18/2014
Title:	ORGANOAMINOSILANE PRECURSORS AND METHODS FOR MAKING AND USING SAME

Patent #:	9796739	Issue Dt:	10/24/2017	Application #:	14293554	Filing Dt:	06/02/2014
Publication #:	US20150147871	Pub Dt:	05/28/2015
Title:	AZA-POLYSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPRISING SAME

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Assignor

AIR PRODUCTS AND CHEMICALS, INC.

Exec Dt:

02/14/2017

Assignee

VERSUM MATERIALS US, LLC

8555 S. RIVER PARKWAY

TEMPE, ARIZONA 85284

Correspondence name and address
	LISA HOFFMANN
	7201 HAMILTON BLVD.
	ALLENTOWN, PA 18195

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