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Reel/Frame:018910/0743   Pages: 3
Recorded: 02/15/2007
Attorney Dkt #:JCLA20955
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
09/28/2010
Application #:
11675401
Filing Dt:
02/15/2007
Publication #:
Pub Dt:
08/21/2008
Title:
APPARATUS AND METHOD FOR COMPENSATING UNIFORMITY OF FILM THICKNESS
Assignors
1
Exec Dt:
02/13/2007
2
Exec Dt:
02/13/2007
3
Exec Dt:
02/13/2007
Assignee
1
2F, NO. 3. LI-HSIN RD. II
SCIENCE-BASED INDUSTRIAL PARK
HSIN-CHU CITY, TAIWAN
Correspondence name and address
J.C. PATENTS
4 VENTURE, SUITE 250
IRVINE, CA 92618

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