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Reel/Frame:058945/0748   Pages: 30
Recorded: 02/02/2022
Attorney Dkt #:36772-239
Conveyance: SECOND LIEN PATENT SECURITY AGREEMENT
Total properties: 340
Page 2 of 4
Pages: 1 2 3 4
1
Patent #:
8602716
Issue Dt:
12/10/2013
Application #:
11876896
Filing Dt:
10/23/2007
Publication #:
US20080219812
Pub Dt:
09/11/2008
Title:
SEMICONDUCTOR MANUFACTURING PROCESS MODULES
2
Patent #:
8696298
Issue Dt:
04/15/2014
Application #:
11876902
Filing Dt:
10/23/2007
Publication #:
US20080124194
Pub Dt:
05/29/2008
Title:
SEMICONDUCTOR MANUFACTURING PROCESS MODULES
3
Patent #:
8313277
Issue Dt:
11/20/2012
Application #:
11876915
Filing Dt:
10/23/2007
Publication #:
US20080124197
Pub Dt:
05/29/2008
Title:
SEMICONDUCTOR MANUFACTURING PROCESS MODULES
4
Patent #:
10444749
Issue Dt:
10/15/2019
Application #:
11877058
Filing Dt:
10/23/2007
Publication #:
US20080155443
Pub Dt:
06/26/2008
Title:
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
5
Patent #:
8639365
Issue Dt:
01/28/2014
Application #:
11877071
Filing Dt:
10/23/2007
Publication #:
US20080163094
Pub Dt:
07/03/2008
Title:
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
6
Patent #:
8639489
Issue Dt:
01/28/2014
Application #:
11877096
Filing Dt:
10/23/2007
Publication #:
US20080155442
Pub Dt:
06/26/2008
Title:
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
7
Patent #:
8775148
Issue Dt:
07/08/2014
Application #:
11877180
Filing Dt:
10/23/2007
Publication #:
US20080163095
Pub Dt:
07/03/2008
Title:
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
8
Patent #:
8612198
Issue Dt:
12/17/2013
Application #:
11877191
Filing Dt:
10/23/2007
Publication #:
US20080155445
Pub Dt:
06/26/2008
Title:
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
9
Patent #:
8972029
Issue Dt:
03/03/2015
Application #:
11877203
Filing Dt:
10/23/2007
Publication #:
US20080155446
Pub Dt:
06/26/2008
Title:
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
10
Patent #:
8473270
Issue Dt:
06/25/2013
Application #:
11877214
Filing Dt:
10/23/2007
Publication #:
US20080155447
Pub Dt:
06/26/2008
Title:
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
11
Patent #:
7769482
Issue Dt:
08/03/2010
Application #:
11877228
Filing Dt:
10/23/2007
Publication #:
US20080155448
Pub Dt:
06/26/2008
Title:
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
12
Patent #:
7899562
Issue Dt:
03/01/2011
Application #:
11877242
Filing Dt:
10/23/2007
Publication #:
US20080155449
Pub Dt:
06/26/2008
Title:
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
13
Patent #:
7945348
Issue Dt:
05/17/2011
Application #:
11877303
Filing Dt:
10/23/2007
Publication #:
US20080155450
Pub Dt:
06/26/2008
Title:
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
14
Patent #:
8272827
Issue Dt:
09/25/2012
Application #:
11891835
Filing Dt:
08/13/2007
Publication #:
US20080063496
Pub Dt:
03/13/2008
Title:
REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
15
Patent #:
7748944
Issue Dt:
07/06/2010
Application #:
11929357
Filing Dt:
10/30/2007
Publication #:
US20080089774
Pub Dt:
04/17/2008
Title:
A METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING
16
Patent #:
7841820
Issue Dt:
11/30/2010
Application #:
11938236
Filing Dt:
11/09/2007
Publication #:
US20080101892
Pub Dt:
05/01/2008
Title:
UNIVERSAL MODULAR WAFER TRANSPORT SYSTEM
17
Patent #:
8672605
Issue Dt:
03/18/2014
Application #:
12025477
Filing Dt:
02/04/2008
Publication #:
US20080187417
Pub Dt:
08/07/2008
Title:
SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
18
Patent #:
8500388
Issue Dt:
08/06/2013
Application #:
12025516
Filing Dt:
02/04/2008
Publication #:
US20080187418
Pub Dt:
08/07/2008
Title:
SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
19
Patent #:
8197177
Issue Dt:
06/12/2012
Application #:
12025541
Filing Dt:
02/04/2008
Publication #:
US20080232947
Pub Dt:
09/25/2008
Title:
SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
20
Patent #:
8434989
Issue Dt:
05/07/2013
Application #:
12030902
Filing Dt:
02/14/2008
Publication #:
US20080131237
Pub Dt:
06/05/2008
Title:
Batch Wafer Alignment
21
Patent #:
7894657
Issue Dt:
02/22/2011
Application #:
12032341
Filing Dt:
02/15/2008
Publication #:
US20080147333
Pub Dt:
06/19/2008
Title:
WAFER CENTER FINDING
22
Patent #:
7859685
Issue Dt:
12/28/2010
Application #:
12032489
Filing Dt:
02/15/2008
Publication #:
US20080231866
Pub Dt:
09/25/2008
Title:
WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES
23
Patent #:
8442667
Issue Dt:
05/14/2013
Application #:
12032733
Filing Dt:
02/18/2008
Publication #:
US20080147580
Pub Dt:
06/19/2008
Title:
APPLICATIONS OF NEURAL NETWORKS
24
Patent #:
10163667
Issue Dt:
12/25/2018
Application #:
12054160
Filing Dt:
03/24/2008
Publication #:
US20080232934
Pub Dt:
09/25/2008
Title:
LINEAR WAFER DRIVE FOR HANDLING WAFERS DURING SEMICONDUCTOR FABRICATION
25
Patent #:
8950998
Issue Dt:
02/10/2015
Application #:
12106975
Filing Dt:
04/21/2008
Publication #:
US20080260500
Pub Dt:
10/23/2008
Title:
BATCH SUBSTRATE HANDLING
26
Patent #:
8267636
Issue Dt:
09/18/2012
Application #:
12117355
Filing Dt:
05/08/2008
Publication #:
US20080298944
Pub Dt:
12/04/2008
Title:
SUBSTRATE TRANSPORT APPARATUS
27
Patent #:
8752449
Issue Dt:
06/17/2014
Application #:
12117415
Filing Dt:
05/08/2008
Publication #:
US20090087288
Pub Dt:
04/02/2009
Title:
SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM
28
Patent #:
8562271
Issue Dt:
10/22/2013
Application #:
12123329
Filing Dt:
05/19/2008
Publication #:
US20090003976
Pub Dt:
01/01/2009
Title:
COMPACT SUBSTRATE TRANSPORT SYSTEM
29
Patent #:
8272825
Issue Dt:
09/25/2012
Application #:
12123365
Filing Dt:
05/19/2008
Publication #:
US20090016855
Pub Dt:
01/15/2009
Title:
LOAD LOCK FAST PUMP VENT
30
Patent #:
9105673
Issue Dt:
08/11/2015
Application #:
12123391
Filing Dt:
05/19/2008
Publication #:
US20090129897
Pub Dt:
05/21/2009
Title:
SIDE OPENING UNIFIED POD
31
Patent #:
10586722
Issue Dt:
03/10/2020
Application #:
12131024
Filing Dt:
05/30/2008
Publication #:
US20080298936
Pub Dt:
12/04/2008
Title:
VACUUM SUBSTRATE STORAGE
32
Patent #:
7737567
Issue Dt:
06/15/2010
Application #:
12143197
Filing Dt:
06/20/2008
Publication #:
US20090001616
Pub Dt:
01/01/2009
Title:
METHOD AND APPARATUS FOR WAFER MARKING
33
Patent #:
8231322
Issue Dt:
07/31/2012
Application #:
12148346
Filing Dt:
04/18/2008
Publication #:
US20080253868
Pub Dt:
10/16/2008
Title:
FAST SWAP DUAL SUBSTRATE TRANSPORT FOR LOAD LOCK
34
Patent #:
8129984
Issue Dt:
03/06/2012
Application #:
12163716
Filing Dt:
06/27/2008
Publication #:
US20090224750
Pub Dt:
09/10/2009
Title:
MULTIPLE DIMENSION POSITION SENSOR
35
Patent #:
8222892
Issue Dt:
07/17/2012
Application #:
12163802
Filing Dt:
06/27/2008
Publication #:
US20090033316
Pub Dt:
02/05/2009
Title:
SENSOR FOR SIMULTANEOUS POSITION AND GAP MEASUREMENT
36
Patent #:
7834618
Issue Dt:
11/16/2010
Application #:
12163984
Filing Dt:
06/27/2008
Publication #:
US20090015248
Pub Dt:
01/15/2009
Title:
POSITION SENSOR SYSTEM
37
Patent #:
8659205
Issue Dt:
02/25/2014
Application #:
12163993
Filing Dt:
06/27/2008
Publication #:
US20090033173
Pub Dt:
02/05/2009
Title:
MOTOR STATOR WITH LIFT CAPABILITY AND REDUCED COGGING CHARACTERISTICS
38
Patent #:
8283813
Issue Dt:
10/09/2012
Application #:
12163996
Filing Dt:
06/27/2008
Publication #:
US20090243413
Pub Dt:
10/01/2009
Title:
ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS
39
Patent #:
8008884
Issue Dt:
08/30/2011
Application #:
12175278
Filing Dt:
07/17/2008
Publication #:
US20090022571
Pub Dt:
01/22/2009
Title:
SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS
40
Patent #:
8178829
Issue Dt:
05/15/2012
Application #:
12195095
Filing Dt:
08/20/2008
Publication #:
US20090095886
Pub Dt:
04/16/2009
Title:
WAFER PRESENCE DETECTOR WITH END EFFECTORS HAVING OPTICAL COUPLERS AND FIBERS
41
Patent #:
8029225
Issue Dt:
10/04/2011
Application #:
12206382
Filing Dt:
09/08/2008
Publication #:
US20090067958
Pub Dt:
03/12/2009
Title:
STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM
42
Patent #:
8029226
Issue Dt:
10/04/2011
Application #:
12239717
Filing Dt:
09/26/2008
Publication #:
US20090087286
Pub Dt:
04/02/2009
Title:
SEMICONDUCTOR MANUFACTURING SYSTEMS
43
Patent #:
7988399
Issue Dt:
08/02/2011
Application #:
12260818
Filing Dt:
10/29/2008
Publication #:
US20090053016
Pub Dt:
02/26/2009
Title:
MID-ENTRY LOAD LOCK FOR SEMICONDUCTOR HANDLING SYSTEM
44
Patent #:
8293066
Issue Dt:
10/23/2012
Application #:
12325993
Filing Dt:
12/01/2008
Publication #:
US20090078374
Pub Dt:
03/26/2009
Title:
APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES
45
Patent #:
8960099
Issue Dt:
02/24/2015
Application #:
12330780
Filing Dt:
12/09/2008
Publication #:
US20090162179
Pub Dt:
06/25/2009
Title:
SUBSTRATE PROCESSING APPARATUS
46
Patent #:
9524896
Issue Dt:
12/20/2016
Application #:
12368241
Filing Dt:
02/09/2009
Publication #:
US20090191030
Pub Dt:
07/30/2009
Title:
APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES
47
Patent #:
8424703
Issue Dt:
04/23/2013
Application #:
12434330
Filing Dt:
05/01/2009
Publication #:
US20090272743
Pub Dt:
11/05/2009
Title:
SUBSTRATE CONTAINER SEALING VIA MOVABLE MAGNETS
48
Patent #:
9033647
Issue Dt:
05/19/2015
Application #:
12499565
Filing Dt:
07/08/2009
Publication #:
US20100119349
Pub Dt:
05/13/2010
Title:
SUBSTRATE ALIGNMENT SYSTEM
49
Patent #:
8602706
Issue Dt:
12/10/2013
Application #:
12542588
Filing Dt:
08/17/2009
Publication #:
US20110038692
Pub Dt:
02/17/2011
Title:
SUBSTRATE PROCESSING APPARATUS
50
Patent #:
8328495
Issue Dt:
12/11/2012
Application #:
12544064
Filing Dt:
08/19/2009
Publication #:
US20100054897
Pub Dt:
03/04/2010
Title:
REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
51
Patent #:
8459922
Issue Dt:
06/11/2013
Application #:
12651160
Filing Dt:
12/31/2009
Publication #:
US20110118875
Pub Dt:
05/19/2011
Title:
MANIPULATOR AUO-TEACH AND POSITION CORRECTION SYSTEM
52
Patent #:
8454293
Issue Dt:
06/04/2013
Application #:
12723837
Filing Dt:
03/15/2010
Publication #:
US20100172721
Pub Dt:
07/08/2010
Title:
SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER
53
Patent #:
8425172
Issue Dt:
04/23/2013
Application #:
12761499
Filing Dt:
04/16/2010
Publication #:
US20100292826
Pub Dt:
11/18/2010
Title:
RETICLE MANIPULATION DEVICE
54
Patent #:
8851820
Issue Dt:
10/07/2014
Application #:
12780761
Filing Dt:
05/14/2010
Publication #:
US20100290872
Pub Dt:
11/18/2010
Title:
SUBSTRATE CONTAINER STORAGE SYSTEM
55
Patent #:
8882433
Issue Dt:
11/11/2014
Application #:
12780846
Filing Dt:
05/14/2010
Publication #:
US20100290873
Pub Dt:
11/18/2010
Title:
INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS
56
Patent #:
8870516
Issue Dt:
10/28/2014
Application #:
12828236
Filing Dt:
06/30/2010
Publication #:
US20120000816
Pub Dt:
01/05/2012
Title:
PORT DOOR POSITIONING APPARATUS AND ASSOCIATED METHODS
57
Patent #:
8182192
Issue Dt:
05/22/2012
Application #:
12843659
Filing Dt:
07/26/2010
Publication #:
US20110014016
Pub Dt:
01/20/2011
Title:
EQUIPMENT STORAGE FOR SUBSTRATE PROCESSING APPARATUS
58
Patent #:
8419341
Issue Dt:
04/16/2013
Application #:
12875414
Filing Dt:
09/03/2010
Publication #:
US20100329827
Pub Dt:
12/30/2010
Title:
LINEAR VACUUM ROBOT WITH Z MOTION AND ARTICULATED ARM
59
Patent #:
8270702
Issue Dt:
09/18/2012
Application #:
12875462
Filing Dt:
09/03/2010
Publication #:
US20100324732
Pub Dt:
12/23/2010
Title:
WAFER CENTER FINDING WITH A KALMAN FILTER
60
Patent #:
8678734
Issue Dt:
03/25/2014
Application #:
12897440
Filing Dt:
10/04/2010
Publication #:
US20110142575
Pub Dt:
06/16/2011
Title:
ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM
61
Patent #:
11002566
Issue Dt:
05/11/2021
Application #:
12901146
Filing Dt:
10/08/2010
Publication #:
US20110025310
Pub Dt:
02/03/2011
Title:
POSITION FEEDBACK FOR SELF BEARING MOTOR
62
Patent #:
8851817
Issue Dt:
10/07/2014
Application #:
12943198
Filing Dt:
11/10/2010
Publication #:
US20120213614
Pub Dt:
08/23/2012
Title:
UNIVERSAL MODULAR WAFER TRANSPORT SYSTEM
63
Patent #:
8125652
Issue Dt:
02/28/2012
Application #:
12977514
Filing Dt:
12/23/2010
Publication #:
US20110093237
Pub Dt:
04/21/2011
Title:
WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES
64
Patent #:
8356207
Issue Dt:
01/15/2013
Application #:
13008559
Filing Dt:
01/18/2011
Publication #:
US20110173496
Pub Dt:
07/14/2011
Title:
INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
65
Patent #:
9020617
Issue Dt:
04/28/2015
Application #:
13011970
Filing Dt:
01/24/2011
Publication #:
US20110118855
Pub Dt:
05/19/2011
Title:
SCALABLE MOTION CONTROL SYSTEM
66
Patent #:
8951002
Issue Dt:
02/10/2015
Application #:
13030856
Filing Dt:
02/18/2011
Publication #:
US20120045308
Pub Dt:
02/23/2012
Title:
DUAL ARM ROBOT
67
Patent #:
8403619
Issue Dt:
03/26/2013
Application #:
13030926
Filing Dt:
02/18/2011
Publication #:
US20120045300
Pub Dt:
02/23/2012
Title:
HIGH SPEED SUBSTRATE ALIGNER APPARATUS
68
Patent #:
8801069
Issue Dt:
08/12/2014
Application #:
13036876
Filing Dt:
02/28/2011
Publication #:
US20110241367
Pub Dt:
10/06/2011
Title:
ROBOT EDGE CONTACT GRIPPER
69
Patent #:
8303764
Issue Dt:
11/06/2012
Application #:
13042407
Filing Dt:
03/07/2011
Publication #:
US20110158773
Pub Dt:
06/30/2011
Title:
APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES
70
Patent #:
8651796
Issue Dt:
02/18/2014
Application #:
13113476
Filing Dt:
05/23/2011
Publication #:
US20110224822
Pub Dt:
09/15/2011
Title:
SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE INDEPENDENTLY MOVABLE ARTICULATED ARMS
71
Patent #:
8807905
Issue Dt:
08/19/2014
Application #:
13158883
Filing Dt:
06/13/2011
Publication #:
US20120148374
Pub Dt:
06/14/2012
Title:
LINEAR SEMICONDUCTOR PROCESSING FACILITIES
72
Patent #:
8651789
Issue Dt:
02/18/2014
Application #:
13159034
Filing Dt:
06/13/2011
Publication #:
US20110232844
Pub Dt:
09/29/2011
Title:
SUBSTRATE PROCESSING APPARATUS
73
Patent #:
8371792
Issue Dt:
02/12/2013
Application #:
13195401
Filing Dt:
08/01/2011
Publication #:
US20110280693
Pub Dt:
11/17/2011
Title:
SUBSTRATE PROCESSING APPARATUS
74
Patent #:
8237391
Issue Dt:
08/07/2012
Application #:
13219267
Filing Dt:
08/26/2011
Publication #:
US20110316370
Pub Dt:
12/29/2011
Title:
SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS
75
Patent #:
8590956
Issue Dt:
11/26/2013
Application #:
13230280
Filing Dt:
09/12/2011
Publication #:
US20120089251
Pub Dt:
04/12/2012
Title:
SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION
76
Patent #:
8523507
Issue Dt:
09/03/2013
Application #:
13248386
Filing Dt:
09/29/2011
Publication #:
US20120020759
Pub Dt:
01/26/2012
Title:
SEMICONDUCTOR MANUFACTURING SYSTEMS
77
Patent #:
8944738
Issue Dt:
02/03/2015
Application #:
13248600
Filing Dt:
09/29/2011
Publication #:
US20120014769
Pub Dt:
01/19/2012
Title:
STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM
78
Patent #:
9656386
Issue Dt:
05/23/2017
Application #:
13270844
Filing Dt:
10/11/2011
Publication #:
US20120128450
Pub Dt:
05/24/2012
Title:
COAXIAL DRIVE VACUUM ROBOT
79
Patent #:
9691649
Issue Dt:
06/27/2017
Application #:
13286186
Filing Dt:
10/31/2011
Publication #:
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Assignor
1
BROOKS AUTOMATION US, LLC
Exec Dt:
02/01/2022
Assignee
1
GOLDMAN SACHS BANK USA
200 WEST STREET
NEW YORK, NEW YORK 10282
Correspondence name and address
NOREEN GOSSELIN
KIRKLAND & ELLIS LLP
300 NORTH LASALLE
CHICAGO, IL 60654

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