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Patent #:
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Issue Dt:
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09/09/2014
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Application #:
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13692749
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Filing Dt:
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12/03/2012
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Publication #:
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Pub Dt:
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12/19/2013
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Title:
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TRANSPORT SYSTEM
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Patent #:
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Issue Dt:
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02/17/2015
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Application #:
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13703234
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Filing Dt:
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12/10/2012
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Publication #:
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Pub Dt:
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03/28/2013
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Title:
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INVENTORY MONITORING OF LIVE-STORAGE SYSTEMS BY MEANS OF RFID
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Patent #:
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Issue Dt:
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08/11/2015
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Application #:
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13739831
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Filing Dt:
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01/11/2013
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Publication #:
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Pub Dt:
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07/17/2014
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Title:
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INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
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Patent #:
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Issue Dt:
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09/09/2014
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Application #:
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13764373
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Filing Dt:
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02/11/2013
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Publication #:
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Pub Dt:
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09/05/2013
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/29/2015
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Application #:
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13768495
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Filing Dt:
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02/15/2013
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Publication #:
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Pub Dt:
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02/27/2014
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Title:
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DUAL SCARA ARM
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Patent #:
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Issue Dt:
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01/17/2017
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Application #:
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13830692
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Filing Dt:
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03/14/2013
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Publication #:
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Pub Dt:
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09/18/2014
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Title:
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TRAY ENGINE WITH SLIDE ATTACHED TO AN END EFFECTOR BASE
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Patent #:
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Issue Dt:
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02/12/2019
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Application #:
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13861693
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Filing Dt:
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04/12/2013
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Publication #:
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Pub Dt:
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09/05/2013
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Title:
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LINEAR VACUUM ROBOT WITH Z MOTION AND ARTICULATED ARM
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Patent #:
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Issue Dt:
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06/06/2017
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Application #:
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13908909
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Filing Dt:
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06/03/2013
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Publication #:
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Pub Dt:
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12/19/2013
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Title:
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SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER
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Patent #:
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Issue Dt:
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11/18/2014
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Application #:
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13914397
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Filing Dt:
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06/10/2013
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Publication #:
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Pub Dt:
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12/26/2013
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Title:
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MANIPULATOR AUTO-TEACH AND POSITION CORRECTION SYSTEM
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Patent #:
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Issue Dt:
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10/02/2018
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Application #:
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14014910
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Filing Dt:
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08/30/2013
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Publication #:
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Pub Dt:
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12/26/2013
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Title:
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SEMICONDUCTOR MANUFACTURING SYSTEMS
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Patent #:
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Issue Dt:
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03/21/2017
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Application #:
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14042248
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Filing Dt:
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09/30/2013
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Publication #:
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Pub Dt:
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05/29/2014
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Title:
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HIGH SPEED SUBSTRATE ALIGNER APPARATUS
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Patent #:
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Issue Dt:
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07/26/2016
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Application #:
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14058436
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Filing Dt:
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10/21/2013
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Publication #:
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Pub Dt:
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02/13/2014
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Title:
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COMPACT SUBSTRATE TRANSPORT SYSTEM
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Patent #:
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Issue Dt:
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09/04/2018
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Application #:
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14071314
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Filing Dt:
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11/04/2013
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Publication #:
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Pub Dt:
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05/08/2014
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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06/27/2017
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Application #:
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14089439
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Filing Dt:
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11/25/2013
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Publication #:
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Pub Dt:
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08/18/2016
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Title:
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SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION
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Patent #:
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Issue Dt:
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02/12/2019
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Application #:
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14148785
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Filing Dt:
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01/07/2014
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Publication #:
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Pub Dt:
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05/01/2014
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER
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Patent #:
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Issue Dt:
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01/13/2015
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Application #:
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14159223
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Filing Dt:
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01/20/2014
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Publication #:
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Pub Dt:
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07/24/2014
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Title:
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WAFER CENTER FINDING WITH KALMAN FILTER
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Patent #:
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Issue Dt:
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08/27/2019
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Application #:
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14161039
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Filing Dt:
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01/22/2014
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Publication #:
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Pub Dt:
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07/24/2014
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Title:
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SUBSTRATE TRANSPORT
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Patent #:
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Issue Dt:
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02/14/2017
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Application #:
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14180876
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Filing Dt:
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02/14/2014
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Publication #:
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Pub Dt:
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06/12/2014
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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10/25/2016
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Application #:
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14195086
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Filing Dt:
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03/03/2014
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Publication #:
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Pub Dt:
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06/26/2014
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Title:
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LOAD LOCK CHAMBER
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Patent #:
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Issue Dt:
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02/06/2018
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Application #:
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14216829
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Filing Dt:
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03/17/2014
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Publication #:
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Pub Dt:
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07/17/2014
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Title:
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SEMICONDUCTOR WAFER HANDLING TRANSPORT
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Patent #:
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Issue Dt:
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06/14/2016
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Application #:
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14223553
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Filing Dt:
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03/24/2014
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Publication #:
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Pub Dt:
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11/20/2014
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Title:
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ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM
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Patent #:
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Issue Dt:
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07/02/2019
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Application #:
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14305715
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Filing Dt:
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06/16/2014
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Publication #:
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Pub Dt:
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10/02/2014
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM
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Patent #:
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Issue Dt:
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12/06/2016
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Application #:
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14325702
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Filing Dt:
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07/08/2014
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Publication #:
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Pub Dt:
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01/08/2015
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Title:
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PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING
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Patent #:
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Issue Dt:
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12/13/2016
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Application #:
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14342035
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Filing Dt:
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05/09/2014
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Publication #:
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Pub Dt:
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09/04/2014
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Title:
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TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICES
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Patent #:
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Issue Dt:
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11/07/2017
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Application #:
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14344930
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Filing Dt:
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07/10/2014
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Publication #:
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Pub Dt:
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09/03/2015
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Title:
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LOAD STATION
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Patent #:
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Issue Dt:
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01/09/2018
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Application #:
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14353153
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Filing Dt:
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04/21/2014
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Publication #:
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Pub Dt:
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09/18/2014
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Title:
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SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
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Patent #:
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Issue Dt:
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11/27/2018
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Application #:
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14365277
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Filing Dt:
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06/13/2014
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Publication #:
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Pub Dt:
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10/09/2014
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Title:
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TRANSPORT APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14377987
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Filing Dt:
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08/11/2014
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Publication #:
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Pub Dt:
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01/15/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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01/30/2018
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Application #:
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14452490
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Filing Dt:
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08/05/2014
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Publication #:
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Pub Dt:
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12/04/2014
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Title:
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Workpiece Structures and Apparatus for Accessing Same
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Patent #:
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Issue Dt:
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12/14/2021
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Application #:
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14469260
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Filing Dt:
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08/26/2014
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Publication #:
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Pub Dt:
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05/14/2015
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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09/14/2021
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Application #:
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14472678
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Filing Dt:
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08/29/2014
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Pub Dt:
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12/18/2014
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Title:
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LOAD PORT MODULE
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Patent #:
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Issue Dt:
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06/28/2016
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Application #:
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14508974
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Filing Dt:
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10/07/2014
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01/22/2015
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Title:
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Port Door Positioning Apparatus and Associated Methods
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Patent #:
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Issue Dt:
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01/14/2020
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14530102
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Filing Dt:
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10/31/2014
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Pub Dt:
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02/26/2015
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Title:
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Access Arbitration System for Semiconductor Fabrication Equipment and Methods for Using and Operating the Same
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Patent #:
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Issue Dt:
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12/12/2017
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Application #:
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14537696
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11/10/2014
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Pub Dt:
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03/05/2015
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Title:
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INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS
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Patent #:
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Issue Dt:
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07/09/2019
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Application #:
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14540055
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Filing Dt:
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11/13/2014
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Publication #:
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Pub Dt:
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05/21/2015
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Title:
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SEALED SWITCHED RELUCTANCE MOTOR
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Patent #:
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Issue Dt:
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08/11/2020
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Application #:
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14540058
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Filing Dt:
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11/13/2014
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Publication #:
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Pub Dt:
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06/09/2016
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Title:
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POSITION FEEDBACK FOR SEALED ENVIRONMENTS
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Patent #:
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Issue Dt:
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04/17/2018
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Application #:
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14540072
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Filing Dt:
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11/13/2014
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Publication #:
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Pub Dt:
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05/21/2015
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Title:
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SEALED ROBOT DRIVE
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Patent #:
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Issue Dt:
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02/18/2020
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Application #:
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14540077
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Filing Dt:
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11/13/2014
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Publication #:
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Pub Dt:
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06/18/2015
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Title:
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METHOD AND APPARATUS FOR BRUSHLESS ELECTRICAL MACHINE CONTROL
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Patent #:
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Issue Dt:
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01/30/2018
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Application #:
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14541934
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11/14/2014
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Publication #:
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Pub Dt:
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06/04/2015
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Title:
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REDUCED CAPACITY CARRIER AND METHOD OF USE
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Patent #:
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Issue Dt:
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11/20/2018
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Application #:
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14568742
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Filing Dt:
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12/12/2014
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Publication #:
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Pub Dt:
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07/23/2015
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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01/05/2016
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Application #:
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14579067
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Filing Dt:
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12/22/2014
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Publication #:
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Pub Dt:
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04/23/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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07/24/2018
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Application #:
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14617052
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Filing Dt:
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02/09/2015
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Publication #:
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Pub Dt:
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08/06/2015
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Title:
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DUAL ARM ROBOT
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Patent #:
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Issue Dt:
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11/26/2019
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Application #:
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14698110
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Filing Dt:
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04/28/2015
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Pub Dt:
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01/21/2016
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Title:
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SCALABLE MOTION CONTROL SYSTEM
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Patent #:
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Issue Dt:
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11/06/2018
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Application #:
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14822310
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Filing Dt:
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08/10/2015
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Publication #:
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Pub Dt:
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12/03/2015
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Title:
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INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
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Patent #:
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Issue Dt:
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05/22/2018
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Application #:
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14822392
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Filing Dt:
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08/10/2015
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Publication #:
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Pub Dt:
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02/04/2016
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Title:
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SIDE OPENING UNIFIED POD
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Patent #:
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Issue Dt:
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11/27/2018
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14868689
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09/29/2015
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Publication #:
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Pub Dt:
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01/21/2016
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Title:
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DUAL SCARA ARM
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Patent #:
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Issue Dt:
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08/25/2020
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14928352
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10/30/2015
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Pub Dt:
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05/05/2016
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Title:
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WAFER ALIGNER
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Issue Dt:
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06/19/2018
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14937676
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11/10/2015
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05/12/2016
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Title:
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TOOL AUTO-TEACH METHOD AND APPARATUS
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09/05/2017
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14941888
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11/16/2015
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Publication #:
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05/19/2016
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Title:
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COMPACT DIRECT DRIVE SPINDLE
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Issue Dt:
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06/09/2020
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14976952
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Filing Dt:
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12/21/2015
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Publication #:
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Pub Dt:
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04/21/2016
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Title:
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REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
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Patent #:
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12/26/2017
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14988256
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01/05/2016
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Publication #:
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Pub Dt:
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05/12/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/10/2019
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Application #:
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15012425
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02/01/2016
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Publication #:
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Pub Dt:
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08/04/2016
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Title:
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UNEQUAL LINK SCARA ARM
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Patent #:
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Issue Dt:
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09/15/2020
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Application #:
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15103268
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06/09/2016
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Publication #:
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Pub Dt:
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10/06/2016
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Title:
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PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/15/2022
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15110130
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07/07/2016
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Publication #:
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Pub Dt:
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11/10/2016
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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09/12/2017
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15114275
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07/26/2016
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Publication #:
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Pub Dt:
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02/09/2017
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Issue Dt:
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09/17/2019
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15137722
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04/25/2016
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10/27/2016
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Title:
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WORKPIECE HANDLING MODULES
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Issue Dt:
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11/20/2018
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15209497
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07/13/2016
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01/19/2017
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Title:
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ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
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NONE
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15215143
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07/20/2016
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11/10/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS
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01/21/2020
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15333021
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10/24/2016
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08/09/2018
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Title:
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12/29/2020
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15369573
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12/05/2016
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03/23/2017
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Title:
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08/28/2018
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15376119
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12/12/2016
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03/30/2017
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Title:
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TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICES
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10/09/2018
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15386799
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12/21/2016
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04/13/2017
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Title:
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NONE
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11/22/2022
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15465326
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03/21/2017
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08/17/2017
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Title:
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HIGH SPEED SUBSTRATE ALIGNER APPARATUS
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08/11/2020
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15489449
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04/17/2017
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10/05/2017
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DUAL ARM ROBOT
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04/09/2019
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15618525
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06/09/2017
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12/13/2018
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Title:
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COLLABORATIVE ROBOT
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03/08/2022
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15634871
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06/27/2017
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01/18/2018
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Title:
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SUBSTRATE PROCESSING APPARATUS
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04/07/2020
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15634957
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06/27/2017
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10/19/2017
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Title:
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SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION
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07/24/2018
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15682632
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08/22/2017
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COLLABORATIVE ROBOT
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03/31/2020
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15693871
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09/01/2017
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03/08/2018
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Title:
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SUBSTRATE PROCESSING APPARATUS
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12/03/2019
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15695744
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09/05/2017
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12/21/2017
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COMPACT DIRECT DRIVE SPINDLE
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02/12/2019
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15702436
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09/12/2017
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01/04/2018
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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08/18/2020
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15743727
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01/11/2018
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07/26/2018
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Title:
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03/17/2020
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15816728
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11/17/2017
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04/05/2018
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Title:
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06/18/2019
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15849002
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12/20/2017
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05/17/2018
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Title:
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SUBSTRATE PROCESSING APPARATUS
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03/26/2019
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15866215
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01/09/2018
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05/24/2018
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SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
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10/08/2019
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15875890
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01/19/2018
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05/24/2018
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Title:
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05/12/2020
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15880387
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01/25/2018
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10/04/2018
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Title:
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METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION
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NONE
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15889811
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02/06/2018
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10/25/2018
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Title:
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METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT
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11/05/2019
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15952595
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04/13/2018
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08/16/2018
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SEALED ROBOT DRIVE
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11/24/2020
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15971827
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05/04/2018
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05/16/2019
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Title:
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METHOD AND APPARATUS FOR HEALTH ASSESSMENT OF A TRANSPORT APPARATUS
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01/08/2019
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15981047
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05/16/2018
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12/13/2018
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COLLABORATIVE ROBOT
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08/13/2019
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16011978
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06/19/2018
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01/24/2019
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TOOL AUTO-TEACH METHOD AND APPARATUS
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01/26/2021
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16029320
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07/06/2018
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01/17/2019
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SEMICONDUCTOR PROCESS TRANSPORT APPARATUS COMPRISING AN ADAPTER PENDANT
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02/22/2022
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16043757
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07/24/2018
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02/21/2019
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DUAL ARM ROBOT
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04/06/2021
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16115505
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08/28/2018
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12/20/2018
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TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICES
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08/03/2021
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16116025
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08/29/2018
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12/20/2018
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08/30/2022
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16121148
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09/04/2018
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12/27/2018
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06/01/2021
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10/04/2018
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04/11/2019
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11/24/2020
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11/05/2018
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06/13/2019
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04/13/2021
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16197087
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11/20/2018
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05/30/2019
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ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
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02/21/2023
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11/20/2018
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01/26/2023
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SUBSTRATE TRANSPORT APPARATUS
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02/11/2020
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11/27/2018
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05/30/2019
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TRANSPORT APPARATUS
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01/26/2021
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11/27/2018
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03/28/2019
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DUAL SCARA ARM
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08/10/2021
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01/25/2019
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08/01/2019
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10/27/2020
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02/11/2019
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06/06/2019
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02/07/2023
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03/15/2019
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09/19/2019
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03/24/2020
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06/18/2019
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10/03/2019
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SUBSTRATE PROCESSING APPARATUS
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10/31/2023
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07/02/2019
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01/02/2020
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09/13/2022
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07/09/2019
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10/31/2019
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09/08/2020
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16539819
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08/13/2019
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12/05/2019
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TOOL AUTO-TEACH METHOD AND APPARATUS
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