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Reel/Frame:058945/0748   Pages: 30
Recorded: 02/02/2022
Attorney Dkt #:36772-239
Conveyance: SECOND LIEN PATENT SECURITY AGREEMENT
Total properties: 340
Page 4 of 4
Pages: 1 2 3 4
1
Patent #:
11121015
Issue Dt:
09/14/2021
Application #:
16552881
Filing Dt:
08/27/2019
Publication #:
US20200161153
Pub Dt:
05/21/2020
Title:
SUBSTRATE TRANSPORT
2
Patent #:
NONE
Issue Dt:
Application #:
16566730
Filing Dt:
09/10/2019
Publication #:
US20200001451
Pub Dt:
01/02/2020
Title:
UNEQUAL LINK SCARA ARM
3
Patent #:
11295975
Issue Dt:
04/05/2022
Application #:
16570453
Filing Dt:
09/13/2019
Publication #:
US20210082729
Pub Dt:
03/18/2021
Title:
METHOD AND APPARATUS FOR SUBSTRATE ALIGNMENT
4
Patent #:
11192239
Issue Dt:
12/07/2021
Application #:
16592431
Filing Dt:
10/03/2019
Publication #:
US20200122316
Pub Dt:
04/23/2020
Title:
SUBSTRATE PROCESSING APPARATUS
5
Patent #:
11545380
Issue Dt:
01/03/2023
Application #:
16668290
Filing Dt:
10/30/2019
Publication #:
US20200144087
Pub Dt:
05/07/2020
Title:
TRANSPORT APPARATUS WITH LINEAR BEARING
6
Patent #:
11799346
Issue Dt:
10/24/2023
Application #:
16674933
Filing Dt:
11/05/2019
Publication #:
US20200067368
Pub Dt:
02/27/2020
Title:
SEALED ROBOT DRIVE
7
Patent #:
10923375
Issue Dt:
02/16/2021
Application #:
16692359
Filing Dt:
11/22/2019
Publication #:
US20200168493
Pub Dt:
05/28/2020
Title:
LOAD PORT MODULE
8
Patent #:
11031265
Issue Dt:
06/08/2021
Application #:
16692443
Filing Dt:
11/22/2019
Publication #:
US20200168488
Pub Dt:
05/28/2020
Title:
LOAD PORT MODULE
9
Patent #:
NONE
Issue Dt:
Application #:
16696822
Filing Dt:
11/26/2019
Publication #:
US20200166913
Pub Dt:
05/28/2020
Title:
SCALABLE MOTION CONTROL SYSTEM
10
Patent #:
11110598
Issue Dt:
09/07/2021
Application #:
16702403
Filing Dt:
12/03/2019
Publication #:
US20200101598
Pub Dt:
04/02/2020
Title:
COMPACT DIRECT DRIVE SPINDLE
11
Patent #:
10854478
Issue Dt:
12/01/2020
Application #:
16722930
Filing Dt:
12/20/2019
Publication #:
US20200126820
Pub Dt:
04/23/2020
Title:
LOAD LOCK FAST PUMP VENT
12
Patent #:
11420337
Issue Dt:
08/23/2022
Application #:
16787184
Filing Dt:
02/11/2020
Publication #:
US20200180163
Pub Dt:
06/11/2020
Title:
TRANSPORT APPARATUS
13
Patent #:
11181582
Issue Dt:
11/23/2021
Application #:
16793623
Filing Dt:
02/18/2020
Publication #:
US20200256919
Pub Dt:
08/13/2020
Title:
METHOD AND APPARATUS FOR BRUSHLESS ELECTRICAL MACHINE CONTROL
14
Patent #:
11195738
Issue Dt:
12/07/2021
Application #:
16825663
Filing Dt:
03/20/2020
Publication #:
US20200321232
Pub Dt:
10/08/2020
Title:
SUBSTRATE PROCESSING APPARATUS
15
Patent #:
11404939
Issue Dt:
08/02/2022
Application #:
16838785
Filing Dt:
04/02/2020
Publication #:
US20200389075
Pub Dt:
12/10/2020
Title:
POSITION FEEDBACK FOR SEALED ENVIRONMENTS
16
Patent #:
11251059
Issue Dt:
02/15/2022
Application #:
16872864
Filing Dt:
05/12/2020
Publication #:
US20200273734
Pub Dt:
08/27/2020
Title:
METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION
17
Patent #:
NONE
Issue Dt:
Application #:
16899151
Filing Dt:
06/11/2020
Publication #:
US20200395232
Pub Dt:
12/17/2020
Title:
SUBSTRATE PROCESS APPARATUS
18
Patent #:
11164769
Issue Dt:
11/02/2021
Application #:
16942255
Filing Dt:
07/29/2020
Publication #:
US20210043484
Pub Dt:
02/11/2021
Title:
ROBOT EMBEDDED VISION APPARATUS
19
Patent #:
11613002
Issue Dt:
03/28/2023
Application #:
16990775
Filing Dt:
08/11/2020
Publication #:
US20210023698
Pub Dt:
01/28/2021
Title:
DUAL ARM ROBOT
20
Patent #:
11276598
Issue Dt:
03/15/2022
Application #:
16996409
Filing Dt:
08/18/2020
Publication #:
US20210066105
Pub Dt:
03/04/2021
Title:
SUBSTRATE TRANSPORT APPARATUS
21
Patent #:
NONE
Issue Dt:
Application #:
17002587
Filing Dt:
08/25/2020
Publication #:
US20200388523
Pub Dt:
12/10/2020
Title:
WAFER ALIGNER
22
Patent #:
11469126
Issue Dt:
10/11/2022
Application #:
17014575
Filing Dt:
09/08/2020
Publication #:
US20210098276
Pub Dt:
04/01/2021
Title:
TOOL AUTO-TEACH METHOD AND APPARATUS
23
Patent #:
11302564
Issue Dt:
04/12/2022
Application #:
17081811
Filing Dt:
10/27/2020
Publication #:
US20210043494
Pub Dt:
02/11/2021
Title:
SUBSTRATE TRANSPORT APPARATUS
24
Patent #:
11650581
Issue Dt:
05/16/2023
Application #:
17102811
Filing Dt:
11/24/2020
Publication #:
US20210173390
Pub Dt:
06/10/2021
Title:
INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
25
Patent #:
11338437
Issue Dt:
05/24/2022
Application #:
17103243
Filing Dt:
11/24/2020
Publication #:
US20210146545
Pub Dt:
05/20/2021
Title:
METHOD AND APPARATUS FOR HEALTH ASSESSMENT OF A TRANSPORT APPARATUS
26
Patent #:
11610787
Issue Dt:
03/21/2023
Application #:
17108473
Filing Dt:
12/01/2020
Publication #:
US20210175096
Pub Dt:
06/10/2021
Title:
LOAD LOCK FAST PUMP VENT
27
Patent #:
11569111
Issue Dt:
01/31/2023
Application #:
17108530
Filing Dt:
12/01/2020
Publication #:
US20210183675
Pub Dt:
06/17/2021
Title:
SUBSTRATE PROCESSING APPARATUS
28
Patent #:
11664259
Issue Dt:
05/30/2023
Application #:
17136661
Filing Dt:
12/29/2020
Publication #:
US20210193495
Pub Dt:
06/24/2021
Title:
PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING
29
Patent #:
11235935
Issue Dt:
02/01/2022
Application #:
17156007
Filing Dt:
01/22/2021
Publication #:
US20210229934
Pub Dt:
07/29/2021
Title:
SUBSTRATE TRANSPORT APPARATUS
30
Patent #:
11670534
Issue Dt:
06/06/2023
Application #:
17158523
Filing Dt:
01/26/2021
Publication #:
US20210225685
Pub Dt:
07/22/2021
Title:
TRANSPORT APPARATUS AND ADAPTER PENDANT
31
Patent #:
NONE
Issue Dt:
Application #:
17158723
Filing Dt:
01/26/2021
Publication #:
US20210225678
Pub Dt:
07/22/2021
Title:
DUAL SCARA ARM
32
Patent #:
NONE
Issue Dt:
Application #:
17167831
Filing Dt:
02/04/2021
Publication #:
US20210257241
Pub Dt:
08/19/2021
Title:
SUBSTRATE PROCESSING APPARATUS
33
Patent #:
11476142
Issue Dt:
10/18/2022
Application #:
17176949
Filing Dt:
02/16/2021
Publication #:
US20210249292
Pub Dt:
08/12/2021
Title:
LOAD PORT MODULE
34
Patent #:
11476139
Issue Dt:
10/18/2022
Application #:
17180298
Filing Dt:
02/19/2021
Publication #:
US20210265188
Pub Dt:
08/26/2021
Title:
SUBSTRATE PROCESS APPARATUS
35
Patent #:
11776834
Issue Dt:
10/03/2023
Application #:
17229495
Filing Dt:
04/13/2021
Publication #:
US20210305076
Pub Dt:
09/30/2021
Title:
ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
36
Patent #:
11610793
Issue Dt:
03/21/2023
Application #:
17341638
Filing Dt:
06/08/2021
Publication #:
US20210296142
Pub Dt:
09/23/2021
Title:
LOAD PORT MODULE
37
Patent #:
11676845
Issue Dt:
06/13/2023
Application #:
17362565
Filing Dt:
06/29/2021
Publication #:
US20220059383
Pub Dt:
02/24/2022
Title:
AUTOMATED TEACH APPARATUS FOR ROBOTIC SYSTEMS AND METHOD THEREFOR
38
Patent #:
12002696
Issue Dt:
06/04/2024
Application #:
17362599
Filing Dt:
06/29/2021
Publication #:
US20210407831
Pub Dt:
12/30/2021
Title:
SUBSTRATE MAPPING APPARATUS AND METHOD THEREFOR
39
Patent #:
NONE
Issue Dt:
Application #:
17382858
Filing Dt:
07/22/2021
Publication #:
US20210346915
Pub Dt:
11/11/2021
Title:
Tray Engine and Methods for Transferring Trays to and From Tools and in Sorters
40
Patent #:
11764093
Issue Dt:
09/19/2023
Application #:
17398847
Filing Dt:
08/10/2021
Publication #:
US20210375657
Pub Dt:
12/02/2021
Title:
AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
Assignor
1
BROOKS AUTOMATION US, LLC
Exec Dt:
02/01/2022
Assignee
1
GOLDMAN SACHS BANK USA
200 WEST STREET
NEW YORK, NEW YORK 10282
Correspondence name and address
NOREEN GOSSELIN
KIRKLAND & ELLIS LLP
300 NORTH LASALLE
CHICAGO, IL 60654

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