skip navigationU S P T O SealUnited States Patent and Trademark Office AOTW logo
Home|Site Index|Search|Guides|Contacts|eBusiness|eBiz alerts|News|Help
Assignments on the Web > Patent Query
Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:055370/0755   Pages: 7
Recorded: 02/23/2021
Attorney Dkt #:AGX (2 OF 2)
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 39
1
Patent #:
6462315
Issue Dt:
10/08/2002
Application #:
09208954
Filing Dt:
12/08/1998
Publication #:
US20010038005
Pub Dt:
11/08/2001
Title:
OPTICAL RADIATION MEASUREMENT APPARATUS
2
Patent #:
6191392
Issue Dt:
02/20/2001
Application #:
09208955
Filing Dt:
12/08/1998
Title:
METHOD OF MEASURING ELECTROMAGNETIC RADIATION
3
Patent #:
6449428
Issue Dt:
09/10/2002
Application #:
09209735
Filing Dt:
12/11/1998
Title:
GAS DRIVEN ROTATING SUSCEPTOR FOR RAPID THERMAL PROCESSING (RTP) SYSTEM
4
Patent #:
6566271
Issue Dt:
05/20/2003
Application #:
09671827
Filing Dt:
09/27/2000
Title:
METHOD OF PRODUCING A SEMICONDUCTOR SURFACE COVERED WITH FLUORINE
5
Patent #:
6752625
Issue Dt:
06/22/2004
Application #:
09700577
Filing Dt:
11/13/2000
Title:
METHOD AND APPARATUS DEVICE FOR THE HEAT TREATMENT OF SUBSTRATES
6
Patent #:
6561694
Issue Dt:
05/13/2003
Application #:
09744880
Filing Dt:
04/19/2001
Title:
METHOD AND APPARATUS FOR CALIBRATING TEMPERATURE MEASUREMENTS INDEPENDENT OF EMISSIVITY
7
Patent #:
6369363
Issue Dt:
04/09/2002
Application #:
09789942
Filing Dt:
02/16/2001
Publication #:
US20010010308
Pub Dt:
08/02/2001
Title:
Method of measuring electromagnetic radiation
8
Patent #:
6847012
Issue Dt:
01/25/2005
Application #:
09913269
Filing Dt:
11/16/2001
Title:
DEVICE AND METHOD FOR MEASURING THE TEMPERATURE OF SUBSTRATES
9
Patent #:
6614005
Issue Dt:
09/02/2003
Application #:
09979646
Filing Dt:
12/13/2001
Title:
Apparatus and Method for the Thermal Treatment of Substrates
10
Patent #:
7041610
Issue Dt:
05/09/2006
Application #:
10111737
Filing Dt:
09/17/2002
Title:
METHOD AND APPARATUS FOR THE THERMAL TREATMENT OF SUBSTRATES
11
Patent #:
6953338
Issue Dt:
10/11/2005
Application #:
10182594
Filing Dt:
07/28/2003
Publication #:
US20040029065
Pub Dt:
02/12/2004
Title:
DEVICE FOR THERMAL TREATMENT OF SUBSTRATES
12
Patent #:
6830631
Issue Dt:
12/14/2004
Application #:
10220001
Filing Dt:
09/25/2002
Publication #:
US20030155000
Pub Dt:
08/21/2003
Title:
METHOD FOR THE REMOVING OF ADSORBED MOLECULES FROM A CHAMBER
13
Patent #:
6809011
Issue Dt:
10/26/2004
Application #:
10276767
Filing Dt:
11/18/2002
Publication #:
US20030134492
Pub Dt:
07/17/2003
Title:
ADJUSTING OF DEFECT PROFILES IN CRYSTAL OR CRYSTALLINE-LIKE STRUCTURES
14
Patent #:
7144826
Issue Dt:
12/05/2006
Application #:
10476136
Filing Dt:
02/02/2004
Publication #:
US20040137754
Pub Dt:
07/15/2004
Title:
Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment
15
Patent #:
7056389
Issue Dt:
06/06/2006
Application #:
10478754
Filing Dt:
04/09/2004
Publication #:
US20040185680
Pub Dt:
09/23/2004
Title:
METHOD AND DEVICE FOR THERMAL TREATMENT OF SUBSTRATES
16
Patent #:
7144747
Issue Dt:
12/05/2006
Application #:
10487573
Filing Dt:
02/18/2004
Publication #:
US20040209483
Pub Dt:
10/21/2004
Title:
METHOD FOR THERMALLY TREATING A SUBSTRATE THAT COMPRISES SEVERAL LAYERS
17
Patent #:
7169717
Issue Dt:
01/30/2007
Application #:
10536788
Filing Dt:
05/26/2005
Publication #:
US20060040478
Pub Dt:
02/23/2006
Title:
METHOD OF PRODUCING A CALIBRATION WAFER
18
Patent #:
7412299
Issue Dt:
08/12/2008
Application #:
10540613
Filing Dt:
08/15/2005
Publication #:
US20060100735
Pub Dt:
05/11/2006
Title:
PROCESS FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTOR WAFER IN A RAPID HEATING UNIT
19
Patent #:
7098157
Issue Dt:
08/29/2006
Application #:
10540614
Filing Dt:
06/23/2005
Publication #:
US20060115968
Pub Dt:
06/01/2006
Title:
METHOD AND APPARATUS FOR THERMALLY TREATING DISK-SHAPED SUBSTRATES
20
Patent #:
7528348
Issue Dt:
05/05/2009
Application #:
11021915
Filing Dt:
12/22/2004
Publication #:
US20060027558
Pub Dt:
02/09/2006
Title:
APPARATUS AND METHOD FOR MEASURING THE TEMPERATURE OF SUBSTRATES
21
Patent #:
7316969
Issue Dt:
01/08/2008
Application #:
11446675
Filing Dt:
06/05/2006
Publication #:
US20060291834
Pub Dt:
12/28/2006
Title:
METHOD AND APPARATUS FOR THERMALLY TREATING SUBSTRATES
22
Patent #:
7746482
Issue Dt:
06/29/2010
Application #:
11597178
Filing Dt:
04/10/2008
Publication #:
US20080316505
Pub Dt:
12/25/2008
Title:
DETERMINING THE POSITION OF A SEMICONDUCTOR SUBSTRATE ON A ROTATION DEVICE
23
Patent #:
8450652
Issue Dt:
05/28/2013
Application #:
12251916
Filing Dt:
10/15/2008
Publication #:
US20090139977
Pub Dt:
06/04/2009
Title:
APPARATUS FOR THERMALLY TREATING SEMICONDUCTOR SUBSTRATES
24
Patent #:
11348767
Issue Dt:
05/31/2022
Application #:
15930874
Filing Dt:
05/13/2020
Publication #:
US20200365377
Pub Dt:
11/19/2020
Title:
PLASMA PROCESSING APPARATUS HAVING A FOCUS RING ADJUSTMENT ASSEMBLY
25
Patent #:
NONE
Issue Dt:
11/22/2022
Application #:
15930910
Filing Dt:
05/13/2020
Publication #:
US20200365405
Pub Dt:
11/19/2020
Title:
FOCUS RING ADJUSTMENT ASSEMBLY OF A SYSTEM FOR PROCESSING WORKPIECES UNDER VACUUM
26
Patent #:
11515127
Issue Dt:
11/29/2022
Application #:
15930924
Filing Dt:
05/13/2020
Publication #:
US20200361094
Pub Dt:
11/19/2020
Title:
END EFFECTORS FOR MOVING WORKPIECES AND REPLACEABLE PARTS WITHIN A SYSTEM FOR PROCESSING WORKPIECES UNDER VACUUM
27
Patent #:
NONE
Issue Dt:
Application #:
15930943
Filing Dt:
05/13/2020
Publication #:
US20200365381
Pub Dt:
11/19/2020
Title:
Systems And Methods For Transportation Of Replaceable Parts In a Vacuum Processing Apparatus
28
Patent #:
10872761
Issue Dt:
12/22/2020
Application #:
16403722
Filing Dt:
05/06/2019
Publication #:
US20190393027
Pub Dt:
12/26/2019
Title:
Post Etch Defluorination Process
29
Patent #:
11348784
Issue Dt:
05/31/2022
Application #:
16547724
Filing Dt:
08/22/2019
Publication #:
US20210050213
Pub Dt:
02/18/2021
Title:
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing
30
Patent #:
10950428
Issue Dt:
03/16/2021
Application #:
16556938
Filing Dt:
08/30/2019
Publication #:
US20210066074
Pub Dt:
03/04/2021
Title:
Method for Processing a Workpiece
31
Patent #:
NONE
Issue Dt:
Application #:
16598423
Filing Dt:
10/10/2019
Publication #:
US20200135554
Pub Dt:
04/30/2020
Title:
Water Vapor Based Fluorine Containing Plasma For Removal Of Hardmask
32
Patent #:
11251050
Issue Dt:
02/15/2022
Application #:
16904669
Filing Dt:
06/18/2020
Publication #:
US20210066088
Pub Dt:
03/04/2021
Title:
Silicon Oxide Selective Dry Etch Process
33
Patent #:
11257680
Issue Dt:
02/22/2022
Application #:
17001728
Filing Dt:
08/25/2020
Publication #:
US20210066085
Pub Dt:
03/04/2021
Title:
Methods For Processing a Workpiece Using Fluorine Radicals
34
Patent #:
11276560
Issue Dt:
03/15/2022
Application #:
17001751
Filing Dt:
08/25/2020
Publication #:
US20210066047
Pub Dt:
03/04/2021
Title:
Spacer Etching Process
35
Patent #:
11791181
Issue Dt:
10/17/2023
Application #:
17024851
Filing Dt:
09/18/2020
Publication #:
US20210082724
Pub Dt:
03/18/2021
Title:
METHODS FOR THE TREATMENT OF WORKPIECES
36
Patent #:
NONE
Issue Dt:
Application #:
17026401
Filing Dt:
09/21/2020
Publication #:
US20210005431
Pub Dt:
01/07/2021
Title:
Plasma Processing Apparatus With Post Plasma Gas Injection
37
Patent #:
11183397
Issue Dt:
11/23/2021
Application #:
17071293
Filing Dt:
10/15/2020
Publication #:
US20210118694
Pub Dt:
04/22/2021
Title:
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
38
Patent #:
11644817
Issue Dt:
05/09/2023
Application #:
17084228
Filing Dt:
10/29/2020
Publication #:
US20210132592
Pub Dt:
05/06/2021
Title:
Control System For Adaptive Control Of A Thermal Processing System
39
Patent #:
NONE
Issue Dt:
Application #:
17120382
Filing Dt:
12/14/2020
Publication #:
US20210202231
Pub Dt:
07/01/2021
Title:
Systems and Methods for Removal of Hardmask
Assignor
1
MATTSON TECHNOLOGY, INC.
Exec Dt:
02/19/2021
Assignees
1
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY
FREMONT, CALIFORNIA 94538
2
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD
ECONOMIC AND TECHNICAL DEVELOPMENT ZONE
BEJING, CHINA 100176
Correspondence name and address
DORITY & MANNING, P.A. AND MATTSON
P.O. BOX 1449
GREENVILLE, SC 29602

Search Results as of: 05/23/2024 08:21 PM
If you have any comments or questions concerning the data displayed, contact PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified: August 25, 2017 v.2.6
| .HOME | INDEX| SEARCH | eBUSINESS | CONTACT US | PRIVACY STATEMENT