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Patent Assignment Details
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Reel/Frame:018041/0758   Pages: 3
Recorded: 07/05/2006
Attorney Dkt #:30205/42167
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
11481162
Filing Dt:
07/05/2006
Publication #:
Pub Dt:
05/24/2007
Title:
Method for manufacturing semiconductor device using immersion lithography process
Assignors
1
Exec Dt:
06/29/2006
2
Exec Dt:
06/29/2006
Assignee
1
SAN 136-1, AMI-RI, BUBAL-EUP, ICHON-SHI
GYUNGGI-DO, KOREA, REPUBLIC OF 467-860
Correspondence name and address
JAMES P. ZELLER
MARSHAL GERSTEIN & BORUN
233 S. WACKER DRIVE, SUITE 6300
SEARS TOWER
CHICAGO, IL 60606-6357

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