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Reel/Frame:021730/0773   Pages: 2
Recorded: 10/24/2008
Attorney Dkt #:081468-0375609
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
05/04/2010
Application #:
12257544
Filing Dt:
10/24/2008
Publication #:
Pub Dt:
02/26/2009
Title:
METHOD AND ARRANGEMENT FOR CORRECTING THERMALLY-INDUCED FIELD DEFORMATIONS OF A LITHOGRAPHICALLY EXPOSED SUBSTRATE
Assignors
1
Exec Dt:
11/16/2005
2
Exec Dt:
11/16/2005
Assignee
1
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondence name and address
PILLSBURY WINTHROP SHAW PITTMAN LLP
1650 TYSONS BOULEVARD
P.O. BOX 10500
MCLEAN, VA 22102

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