Patent Assignment Details
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| Reel/Frame: | 014460/0776 | |
| Pages: | 2 |
| | Recorded: | 09/02/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10653298
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Filing Dt:
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09/02/2003
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Publication #:
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Pub Dt:
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03/03/2005
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Title:
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Resist supply apparatus with resist recycling function, coating system having the same and method of resist recycling
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Assignee
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| 121, PARK AVENUE, III |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU 300, TAIWAN R.O.C. |
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Correspondence name and address
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THOMAS, KAYDEN, HORSTEMEYER & RISLEY LLP
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DANIEL R. MCCLURE
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100 GALLERIA PARKWAY, SUITE 1750
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ATLANTA, GEORGIA 30339-5948
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