Patent Assignment Details
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Reel/Frame: | 012892/0783 | |
| Pages: | 8 |
| | Recorded: | 05/08/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/11/2003
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Application #:
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10140662
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Filing Dt:
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05/08/2002
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Title:
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USE OF A CAPPING LAYER TO REDUCE PARTICLE EVOLUTION DURING SPUTTER PRE-CLEAN PROCEDURES
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Assignee
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SCIENCE-BASED INDUSTRIAL PARK |
121 PARK AVE. 3 |
HSIN-CHU, TAIWAN R.O.C |
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Correspondence name and address
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GEORGE O. SAILE
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STEPHEN B. ACKERMAN
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20 MCINTOSH DRIVE
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POUGHKEEPSIE, NY 12603
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