Patent Assignment Details
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Reel/Frame: | 027326/0794 | |
| Pages: | 17 |
| | Recorded: | 12/05/2011 | | |
Attorney Dkt #: | 109684-19 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/04/2014
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Application #:
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13376259
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Filing Dt:
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12/05/2011
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Publication #:
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Pub Dt:
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04/05/2012
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Title:
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METHOD OF POLISHING A SILICON WAFER
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Assignee
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2-1 SHIBAURA, 1-CHOME, MINATO-KU |
TOKYO, JAPAN 105-8634 |
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Correspondence name and address
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THOMAS J. ENGELLENNER
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155 SEAPORT BOULEVARD
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SEAPORT WEST
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BOSTON, MA 02210
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