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Total properties:
26
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Patent #:
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Issue Dt:
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10/17/2006
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Application #:
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11088475
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Filing Dt:
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03/23/2005
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Publication #:
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Pub Dt:
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08/31/2006
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Title:
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METHOD AND APPARATUS FOR EUV LIGHT SOURCE TARGET MATERIAL HANDLING
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Patent #:
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Issue Dt:
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05/15/2007
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Application #:
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11148021
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Filing Dt:
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06/08/2005
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Publication #:
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Pub Dt:
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12/22/2005
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Title:
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SYSTEMS AND METHODS FOR DEFLECTING PLASMA-GENERATED IONS TO PREVENT THE IONS FROM REACHING AN INTERNAL COMPONENT OF AN EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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10/21/2008
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Application #:
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11174299
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Filing Dt:
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06/29/2005
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Publication #:
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Pub Dt:
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01/04/2007
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Title:
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LPP EUV LIGHT SOURCE DRIVE LASER SYSTEM
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Patent #:
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Issue Dt:
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01/27/2009
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Application #:
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11217161
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Filing Dt:
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08/31/2005
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Publication #:
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Pub Dt:
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08/31/2006
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Title:
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LPP EUV LIGHT SOURCE DRIVE LASER SYSTEM
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Patent #:
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Issue Dt:
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06/02/2009
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Application #:
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11237535
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Filing Dt:
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09/27/2005
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Publication #:
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Pub Dt:
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04/26/2007
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Title:
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THERMAL-EXPANSION TOLERANT, PREIONIZER ELECTRODE FOR A GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
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11/28/2006
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Application #:
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11237649
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Filing Dt:
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09/27/2005
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Title:
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EUV LIGHT SOURCE COLLECTOR EROSION MITIGATION
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Patent #:
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Issue Dt:
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02/20/2007
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Application #:
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11238828
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Filing Dt:
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09/28/2005
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Publication #:
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Pub Dt:
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12/28/2006
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Title:
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EUV LIGHT SOURCE COLLECTOR EROSION MITIGATION
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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11239581
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Filing Dt:
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09/28/2005
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Title:
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ADJUSTABLE FLOW GUIDE TO ACCOMMODATE ELECTRODE EROSION IN A GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11241850
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Filing Dt:
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09/29/2005
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Publication #:
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Pub Dt:
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03/29/2007
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Title:
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GAS DISCHARGE LASER SYSTEM ELECTRODES AND POWER SUPPLY FOR DELIVERING ELECTRICAL ENERGY TO SAME
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Patent #:
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Issue Dt:
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01/05/2010
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Application #:
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11254282
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Filing Dt:
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10/20/2005
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Publication #:
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Pub Dt:
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06/01/2006
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Title:
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METHOD AND APPARATUS FOR GAS DISCHARGE LASER BANDWIDTH AND CENTER WAVELENGTH CONTROL
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Patent #:
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Issue Dt:
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01/08/2008
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Application #:
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11261845
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Filing Dt:
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10/28/2005
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Publication #:
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Pub Dt:
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05/03/2007
| | | | |
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Title:
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SYSTEMS AND METHODS TO SHAPE LASER LIGHT AS A HOMOGENEOUS LINE BEAM FOR INTERACTION WITH A FILM DEPOSITED ON A SUBSTRATE
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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11261846
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Filing Dt:
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10/28/2005
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Publication #:
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Pub Dt:
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05/03/2007
| | | | |
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Title:
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SYSTEMS AND METHODS TO SHAPE LASER LIGHT AS A LINE BEAM FOR INTERACTION WITH A SUBSTRATE HAVING SURFACE VARIATIONS
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Patent #:
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Issue Dt:
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12/30/2008
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Application #:
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11261948
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Filing Dt:
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10/28/2005
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Publication #:
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Pub Dt:
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05/03/2007
| | | | |
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Title:
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SYSTEMS AND METHODS FOR GENERATING LASER LIGHT SHAPED AS A LINE BEAM
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Patent #:
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Issue Dt:
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11/18/2008
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Application #:
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11323397
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Filing Dt:
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12/29/2005
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Publication #:
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Pub Dt:
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05/10/2007
| | | | |
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Title:
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EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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11/09/2010
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Application #:
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11323604
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Filing Dt:
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12/29/2005
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Publication #:
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Pub Dt:
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07/06/2006
| | | | |
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Title:
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MULTI-CHAMBER GAS DISCHARGE LASER BANDWIDTH CONTROL THROUGH DISCHARGE TIMING
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Patent #:
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Issue Dt:
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05/27/2008
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Application #:
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11358983
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Filing Dt:
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02/21/2006
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Publication #:
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Pub Dt:
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08/31/2006
| | | | |
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Title:
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SOURCE MATERIAL DISPENSER FOR EUV LIGHT SOURCE
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|
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Patent #:
|
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Issue Dt:
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10/06/2009
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Application #:
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11358992
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Filing Dt:
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02/21/2006
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Publication #:
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Pub Dt:
|
10/05/2006
| | | | |
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Title:
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LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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06/08/2010
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Application #:
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11394513
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Filing Dt:
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03/31/2006
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Publication #:
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Pub Dt:
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10/04/2007
| | | | |
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Title:
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BANDWIDTH MEASURING DEVICE FOR HIGH PULSE REPETITION RATE PULSED LASER
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Patent #:
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Issue Dt:
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09/04/2012
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Application #:
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11472088
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Filing Dt:
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06/21/2006
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Publication #:
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Pub Dt:
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12/27/2007
| | | | |
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Title:
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BANDWIDTH CONTROL DEVICE
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Patent #:
|
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Issue Dt:
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01/13/2009
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Application #:
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11509925
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Filing Dt:
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08/25/2006
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Publication #:
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Pub Dt:
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02/28/2008
| | | | |
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Title:
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SOURCE MATERIAL COLLECTION UNIT FOR A LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
|
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Issue Dt:
|
01/05/2010
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Application #:
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11982103
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Filing Dt:
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10/31/2007
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Publication #:
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Pub Dt:
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09/18/2008
| | | | |
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Title:
|
LASER SYSTEM
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|
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Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
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11982217
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Filing Dt:
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10/31/2007
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Publication #:
|
|
Pub Dt:
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12/03/2009
| | | | |
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Title:
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Laser system
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/14/2011
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Application #:
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12004871
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Filing Dt:
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12/20/2007
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Publication #:
|
|
Pub Dt:
|
06/25/2009
| | | | |
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Title:
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EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND REFURBISHING SAME
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/11/2013
|
Application #:
|
13087207
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Filing Dt:
|
04/14/2011
|
|
Publication #:
|
|
Pub Dt:
|
08/11/2011
| | | | |
|
Title:
|
LPP EUV LIGHT SOURCE DRIVE LASER SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
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11/20/2012
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Application #:
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13091923
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Filing Dt:
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04/21/2011
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Publication #:
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Pub Dt:
|
08/11/2011
| | | | |
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Title:
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EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND REFURBISHING SAME
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/01/2014
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Application #:
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13675972
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Filing Dt:
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11/13/2012
|
|
Publication #:
|
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Pub Dt:
|
03/21/2013
| | | | |
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Title:
|
EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND REFURBISHING SAME
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