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Total properties:
33
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Patent #:
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Issue Dt:
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06/21/1988
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Application #:
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06921637
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Filing Dt:
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10/22/1986
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Title:
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FIBEROPTIC SENSING OF TEMPERATURE AND/OR OTHER PHYSICAL PARAMETERS
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Patent #:
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|
Issue Dt:
|
09/27/1994
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Application #:
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07773039
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Filing Dt:
|
10/08/1991
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Title:
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MODULAR LUMINESCENCE-BASED MEASURING SYSTEM USING FAST DIGITAL SIGNAL PROCESSING
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Patent #:
|
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Issue Dt:
|
11/15/1994
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Application #:
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07874829
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Filing Dt:
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04/28/1992
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Title:
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APPARATUS AND METHOD FOR MONITORING A TEMPERATURE USING A THERMALLY FUSED COMPOSITE BLACKBODY TEMPERATURE PROBE
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|
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Patent #:
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Issue Dt:
|
05/03/1994
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Application #:
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07896132
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Filing Dt:
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06/09/1992
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Title:
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ENDPOINT AND UNIFORMITY DETERMINATIONS IN MATERIAL LAYER PROCESSING THROUGH MONITORING MULTIPLE SURFACE REGIONS ACROSS THE LAYER
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Patent #:
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Issue Dt:
|
04/19/1994
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Application #:
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07945229
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Filing Dt:
|
09/15/1992
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Title:
|
LUMINESCENT DECAY TIME MEASUREMENTS BY USE OF A CCD CAMERA
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Patent #:
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Issue Dt:
|
05/09/1995
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Application #:
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08019748
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Filing Dt:
|
02/19/1993
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|
Title:
|
INTERFERENCE REMOVAL
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/08/1994
|
Application #:
|
08052401
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Filing Dt:
|
04/23/1993
|
|
Title:
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PROCESSING ENDPOINT DETECTING TECHNIQUE AND DETECTOR STRUCTURE USING MULTIPLE RADIATION SOURCES OR DISCRETE DETECTORS
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|
|
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Patent #:
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|
Issue Dt:
|
05/09/1995
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Application #:
|
08075680
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Filing Dt:
|
06/11/1993
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|
Title:
|
MEASURING SYSTEM EMPLOYING A LUMINESCENT SENSOR AND METHODS OF DESIGNING THE SYSTEM
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|
|
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Patent #:
|
|
Issue Dt:
|
11/28/1995
|
Application #:
|
08075743
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Filing Dt:
|
06/11/1993
|
|
Title:
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APPARATUS AND METHOD FOR MEASURING TEMPERATURES AT A PLURALITY OF LOCATIONS USING LUMINESCENT-TYPE TEMPERATURE SENSORS WHICH ARE EXCITED IN A TIME SEQUENCE
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|
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Patent #:
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|
Issue Dt:
|
03/19/1996
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Application #:
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08122207
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Filing Dt:
|
09/16/1993
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Title:
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OPTICAL TECHNIQUES OF MEASURING ENDPOINT DURING THE PROCESSING OF MATERIAL LAYERS IN AN OPTICALLY HOSTILE ENVIRONMENT
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|
|
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Patent #:
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|
Issue Dt:
|
02/13/1996
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Application #:
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08180641
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Filing Dt:
|
01/12/1994
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Title:
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NON-CONTACT OPTICAL TECHNIQUES FOR MEASURING SURFACE CONDITIONS
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|
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Patent #:
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|
Issue Dt:
|
06/23/1998
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Application #:
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08180852
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Filing Dt:
|
01/12/1994
|
|
Title:
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NON-CONTACT OPTICAL TECHNIQUES FOR MEASURING SURFACE CONDITIONS
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|
|
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Patent #:
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|
Issue Dt:
|
02/10/1998
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Application #:
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08312146
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Filing Dt:
|
09/26/1994
|
|
Title:
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ELECTRO-OPTICAL BOARD ASSEMBLY FOR MEASURING THE TEMPERATURE OF AN OBJECT SURFACE FROM INFRA-RED EMISSIONS THEREOF, INCLUDING AN AUTOMATIC GAIN CONTROL THEREFORE
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|
|
|
|
Patent #:
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|
Issue Dt:
|
07/28/1998
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Application #:
|
08436946
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Filing Dt:
|
05/08/1995
|
|
Title:
|
INTERFERENCE REMOVAL
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|
|
|
|
Patent #:
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|
Issue Dt:
|
02/04/1997
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Application #:
|
08465827
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Filing Dt:
|
06/06/1995
|
|
Title:
|
TEMPERATURE MEASURING SYSTEM HAVING IMPROVED SIGNAL PROCESSING AND MULTIPLE OPTICAL SENSORS
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|
|
|
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Patent #:
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|
Issue Dt:
|
01/04/2000
|
Application #:
|
08585164
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Filing Dt:
|
01/11/1996
|
|
Title:
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IN SITU TECHNIQUE FOR MONITORING AND CONTROLLING A PROCESS OF CHEMICAL-MECHANICAL-POLISHING VIA A RADIATIVE COMMUNICATION LINK
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|
|
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Patent #:
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|
Issue Dt:
|
12/09/1997
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Application #:
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08615417
|
Filing Dt:
|
03/14/1996
|
|
Title:
|
OPTICAL TECHNIQUES OF MEASURING ENDPOINT DURING THE PROCESSING OF MATERIAL LAYERS IN AN OPTICALLY HOSTILE ENVIRONMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/06/1999
|
Application #:
|
08872885
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Filing Dt:
|
06/11/1997
|
|
Title:
|
OPTICAL TECHNIQUES OF MEASURING ENDPOINT DURING THE PROCESSING OF MATERIAL LAYERS IN AN OPTICALLY HOSTILE ENVIRONMENT
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|
|
|
|
Patent #:
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|
Issue Dt:
|
06/18/2002
|
Application #:
|
08877537
|
Filing Dt:
|
06/17/1997
|
|
Title:
|
LIQUID ETCH ENDPOINT DETECTION AND PROCESS METROLOGY
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|
|
|
|
Patent #:
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|
Issue Dt:
|
02/22/2000
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Application #:
|
08899470
|
Filing Dt:
|
07/23/1997
|
|
Title:
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SIGNAL PROCESSING FOR IN SITU MONITORING OF THE FORMATION OR REMOVAL OF A TRANSPARENT LAYER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/29/2000
|
Application #:
|
08918907
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Filing Dt:
|
08/27/1997
|
|
Title:
|
OPTICAL TECHNIQUES OF MEASURING ENDPOINT DURING THE PROCESSING OF MATERIAL LAYERS IN AN OPTICALLY HOSTILE ENVIRONMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/27/1999
|
Application #:
|
08938138
|
Filing Dt:
|
09/26/1997
|
|
Title:
|
ELECTRO OPTICAL BOARD ASSEMBLY FOR MEASURING THE TEMPERATURE OF AN OBJECT SURFACE FROM INFRA RED EMISSIIONS THEREOF INCLUDING AN AUTOMATIC GAIN CONTROL THEREFORE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/30/2002
|
Application #:
|
09097429
|
Filing Dt:
|
06/15/1998
|
|
Title:
|
OPTICAL TECHNIQUES OF MEASURING ENDPOINT DURING THE PROCESSING OF MATERIAL LAYERS IN AN OPTICALLY HOSTILE ENVIRONMENT
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|
|
|
|
Patent #:
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|
Issue Dt:
|
04/24/2001
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Application #:
|
09287651
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Filing Dt:
|
04/07/1999
|
|
Title:
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POLARIZATION INTERFEROMETER SPECTROMETER WITH ROTATABLE BIREFRINGENT ELEMENT
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|
|
|
|
Patent #:
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|
Issue Dt:
|
06/20/2000
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Application #:
|
09291831
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Filing Dt:
|
04/14/1999
|
|
Title:
|
OPTICAL TECHNIQUES OF MEASURING ENDPOINT DURING THE PROCESSING OF MATERIAL LAYERS IN AN OPTICALLY HOSTILE ENVIRONMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/27/2003
|
Application #:
|
09317697
|
Filing Dt:
|
05/24/1999
|
|
Title:
|
OPTICAL TECHNIQUES FOR MEASURING LAYER THICKNESSES AND OTHER SURFACE CHARACTERISTICS OF OBJECTS SUCH AS SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/02/2002
|
Application #:
|
09505929
|
Filing Dt:
|
02/14/2000
|
|
Title:
|
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/25/2003
|
Application #:
|
09577795
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Filing Dt:
|
05/24/2000
|
|
Title:
|
OPTICAL TECHNIQUES FOR MEASURING LAYER THICKNESSES AND OTHER SURFACE CHARACTERISTICS OF OBJECTS SUCH AS SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/03/2003
|
Application #:
|
09839857
|
Filing Dt:
|
04/20/2001
|
|
Title:
|
IN SITU OPTICAL SURFACE TEMPERATURE MEASURING TECHNIQUES AND DEVICES
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|
|
|
|
Patent #:
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|
Issue Dt:
|
08/23/2005
|
Application #:
|
10672558
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Filing Dt:
|
09/26/2003
|
|
Title:
|
OPTICAL TECHNIQUES FOR MEASURING LAYER THICKNESSES AND OTHER SURFACE CHARACTERISTICS OF OBJECTS SUCH AS SEMICONDUCTOR WAFERS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/25/2006
|
Application #:
|
10839876
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Filing Dt:
|
05/05/2004
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|
Publication #:
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Pub Dt:
|
12/23/2004
| | | | |
|
Title:
|
IN SITU OPTICAL SURFACE TEMPERATURE MEASURING TECHNIQUES AND DEVICES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/09/2006
|
Application #:
|
11013070
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Filing Dt:
|
12/15/2004
|
|
Publication #:
|
|
Pub Dt:
|
05/19/2005
| | | | |
|
Title:
|
OPTICAL TECHNIQUES FOR MEASURING LAYER THICKNESSES AND OTHER SURFACE CHARACTERISTICS OF OBJECTS SUCH AS SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
05/20/2008
|
Application #:
|
11361543
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Filing Dt:
|
02/24/2006
|
|
Publication #:
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|
Pub Dt:
|
06/29/2006
| | | | |
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Title:
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IN SITU OPTICAL SURFACE TEMPERATURE MEASURING TECHNIQUES AND DEVICES
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|
